semi合集-English.pdf - 第5520页

SEMI P10-0705 © SEMI 1990, 2005 15 END_PATTERN_OPTIONS <shippable_data> = START_SHIPPABLE_DATA [SEND_MASK_SHIPPED_DA TE_TIME [<ship_to>] ] [SEND_FINAL_AUDIT_DATE_ TIME [<ship_to>] ] [SHIP_CD_DATA [< …

SEMI P10-0705 © SEMI 1990, 2005 14

[OPTICAL_MASK_SET_ID [OPTICAL_MASK_ID] ]

[OPTICAL_MASK_TITLE]

pattern_options>]

END_PATTERN_DEFINITION

<cell_instance> = CELL_INSTANCE [<

pattern_options>]

END_CELL_INSTANCE_OPTIONS {<

placement>}

END_CELL_INSTANCE

<pattern_instance> = PATTERN_GROUP_INSTANCE [<

pattern_options>]

placement>}

END_PATTERN_GROUP_INSTANCE

<placement> = START_PLACEMENT { LOCATION [STEPPING_DISTANCE STEPPING_COUNT] }

[ARRAY_DIAMETER ARRAY_CENTER [ARRAY_DIAMETER_INCLUSIVE] ]

[DATA_OFFSET]

{DROPOUT [SCRIBE_TONE SCRIBE_INSIDE_CORNERS

SCRIBE_OUTSIDE_CORNERS] }

[LOCATION_SPEC] [CD_MEASURE_DIE]

END_PLACEMENT

<pattern_options> = START_PATTERN_OPTIONS [

PATTERN_FUNCTION]

[

DATA_FILE_SIZE] [DATA_CHECKSUM DATA_CHECKSUM_TYPE ]

[PATTERN_ADDRESS_SIZE] [SCALE_FACTOR]

[DIGITIZED_DATA_DARK]

[STRIPE_HEIGHT]

[UNSCALED_PATTERN_SIZE]

[

MFG_BIAS_PREAPPLIED]

{ LITHO_MODE_REQD } [VIRTUAL_ADDRESS]

[SURROUNDING_TONE SURROUNDING_WIDTH SURROUNDING_HEIGHT]

[MIRROR_PATTERN]

[<ship_plot>] [PATTERN_PLOT_APPR_REQD]

films>}

phase_shift>]

registration>}

cd_group>}

cd_set>}

cd_xy_definition>}

cd_iso_dense_definition>}

[PERCENT_CLEAR]

[INSPECT_ALL_SITES]

defect_definition>}

[BUTTING_ERROR]

[ADDITIONAL_PATTERN_INFO]

SEMI P10-0705 © SEMI 1990, 2005 15

END_PATTERN_OPTIONS

<shippable_data> = START_SHIPPABLE_DATA

[SEND_MASK_SHIPPED_DATE_TIME [<ship_to>] ]

[SEND_FINAL_AUDIT_DATE_TIME [<ship_to>] ]

[SHIP_CD_DATA [<ship_to>] ]

[SHIP_CD_PRINTOUT [<

ship_to>] ]

[SHIP_CD_UNIFORMITY_MAP [<

ship_to>] ]

[SHIP_AIM_DATA [<ship_to>] ]

[SHIP_DEFECT_DATA [<

ship_to>] ]

[SHIP_THRU_PELLICLE_DATA [<

ship_to>] ]

[SHIP_MANUAL_INSPECTION_FORM [<

ship_to>] ]

[SHIP_INSP_DATABASE_DATA [INSP_DATABASE_DATA_FORMAT] [<

ship_to>] ]

[SHIP_FIRST_PREPELL_DIE_DB_MSK_MAP [<

ship_to>] ]

[SHIP_FIRST_PREPELL_DIE_DB_PTN_MAP [<

ship_to>] ]

[SHIP_FIRST_PREPELL_DIE_DIE_MAP [<

ship_to>] ]

[SHIP_FIRST_ROT_PREPELL_DIE_DIE_MAP [<

ship_to>] ]

[SHIP_FINAL_PREPELL_DIE_DB_MSK_MAP [<

ship_to>] ]

[SHIP_FINAL_PREPELL_DIE_DB_PTN_MAP [<

ship_to>] ]

[SHIP_FINAL_PREPELL_DIE_DIE_MAP [<

ship_to>] ]

[SHIP_FINAL_ROT_PREPELL_DIE_DIE_MAP [<

ship_to>] ]

[SHIP_FIRST_POSTPELL_DIE_DB_MSK_MAP [<

ship_to>] ]

[SHIP_FIRST_POSTPELL_DIE_DB_PTN_MAP [<

ship_to>] ]

[SHIP_FIRST_POSTPELL_DIE_DIE_MAP [<

ship_to>] ]

[SHIP_FIRST_ROT_POSTPELL_DIE_DIE_MAP [<

ship_to>] ]

[SHIP_FINAL_POSTPELL_DIE_DB_MSK_MAP [<

ship_to>] ]

[SHIP_FINAL_POSTPELL_DIE_DB_PTN_MAP [<

ship_to>] ]

[SHIP_FINAL_POSTPELL_DIE_DIE_MAP [<

ship_to>] ]

[SHIP_FINAL_ROT_POSTPELL_DIE_DIE_MAP [<

ship_to>] ]

[SHIP_REPAIR_DATA [<

ship_to>] ]

[SHIP_REGISTR_DATA [<

ship_to>] ]

[SHIP_ARRAY_REGISTR_MAP [<

ship_to>] ]

[SHIP_CLOSURE_DATA [<

ship_to>] ]

[SHIP_DIE_FIT_MAP [<

ship_to>] ]

[SHIP_MEASURE_FILE_REGISTR_MAP [<

ship_to>] ]

[SHIP_FIELD_FIT_MAP [<

ship_to>] ]

[SHIP_CENTRALITY_DATA [<

ship_to

>] ]

[SHIP_CENTRALITY_MAP [<

ship_to>] ]

[

SHIP_SURF_INSP_MEASUREMENTS [<ship_to>] ]

[SHIP_SURF_INSPECTION_MAP [<

ship_to>] ]

[SHIP_SURF_INSP_PELL_TOP_MAP [<ship_to>] ]

[SHIP_SURF_INSP_PELL_BOTTOM_MAP [<ship_to>] ]

[SHIP_SURF_INSP_GLASS_SIDE_MAP [<

ship_to>] ]

[SHIP_SURF_INSP_PATTERN_SIDE_MAP [<

ship_to>] ]

[SHIP_STARLIGHT_MAP [<

ship_to>] ]

[

SHIP_PHASE_SHIFT_MEASUREMENTS [<ship_to>] ]

[SHIP_PHASE_SHIFT_REPORT [<

ship_to>] ]

[SHIP_SEM_PHOTOS [<

ship_to>] ]

{<ship_plot>}

[SHIP_BARCODE_PLOT [<ship_to>] ]

films>}

[SHIP_CERTIFICATE_OF_CONFORMANCE [<

ship_to>] ]

{SHIP_CUSTOMER_QUALITY_FORM [<

ship_to>] }

[SHIP_TRAVELER [<

ship_to>] ]

[PERCENT_CLEAR_REQUESTED [<

ship_to>] ]

{SHIP_SPECIAL_REQUEST [<

ship_to>] }

END_SHIPPABLE_DATA

<ship_to> = START_SHIP_TO

{EMAIL_ADDRESS} [<

ftp_address>] [WEB_ADDRESS]

{MAILING_ADDRESS} [SHIP_TO_FAX]

[DUE_DATE_TIME_REQUESTED]

END_SHIP_TO

<ftp_address> = FTP_HOST_NAME [FTP_LOGIN] [FTP_PASSWORD] [FTP_DIRECTORY]

[FTP_MODE] END_FTP_HOST

7.5 Mask Results Data Structure Syntax  The following syntax definition uses the upper case keyword to

represent the permissible applications of the corresponding data record within the mask results data structure. This

structure allows the vendor to deliver to the customer actual data regarding masks being built.

<mask_results> = START_MASK_RESULTS SEMI_REVISION CUSTOMER VENDOR

FILE_DATE_TIME [OPERATOR_NAME]

MASK_SET_ID [<vendor_info>]

ORDER_ID MASK_SET_NAME MASK_SET_VERSION

{MASK_GROUP_ID [<vendor_info>]

{MASK_ID <mask_results_options> END_MASK}

END_MASK_GROUP}

END_MASK_SET

END_MASK_RESULTS

CHECKSUM

<mask_results_options>

= START_MASK_RESULTS_OPTIONS

[STATUS]