semi合集-English.pdf - 第379页

SEMI E52-0703 © SEMI 1995, 2003 15 Code Gas Name Symbol Formula Synonym Ref 115 Iodine Pentafluoride IF5 IF 5 1 323 Iodomethane CH3I CH 3 I Methyl iodide; Un 2644 2 230 Iron Carbonyl C5O5Fe Fe(CO) 5 2 111 Isobutane C4H10…

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SEMI E52-0703 © SEMI 1995, 2003 14
Code Gas Name Symbol Formula Synonym Ref
224 Fluorotriethoxysilane C6H15OSiF (C
2
H
5
O)
3
SiF 2
322 Formaldehyde CH2O CH
2
O H2C0; UN 1198; BFV 2
43 Germane GeH4 GeH
4
1
113 Germanium Tetrachloride GeCl4 GeCl
4
Tetrachlorogermane 2
99 Germanium Tetrafluoride GeF4 GeF
4
Tetrafluorogermane 2
335 Glycidol C3H6O2 CH
2
CHCH
2
OH 1-Propanol, 2,3 epoxy 3
333 Glycol methylene ether C3H6O2 C
3
H
6
O
2
1,3 - Dioxolane 3
275 Hafnium Tetranitrate HfN4O12 Hf(NO
3
)
4
1
137 Halothane C2HBrClF3 BrClHCCF
3
6
1 Helium He He 1
295 Heptafluoropropane C3HF7 C
3
HF
7
1,1,1,2,3,3,3-Heptafluoropropane,
Freon 227
2
272 Hexafluoro Acetylacetone C5H2F6O2 C
5
H
2
F
6
O
2
1
297 Hexafluoro butadiene-1,3 C4F6 CF
2
=CF-CF=CF
2
Perfluorobutadiene-1,3; 3
267 Hexafluoro Propane C3H2F6 CH
2
FCF
2
CF
3
1,1,1,2,2,3-Hexafluoropropane 2
270 Hexafluoro-2-Butyne C4F6 CF
3
C=CCF
3
Bis(trifluoromethyl)acetylene;
Perfluoro-2-butyne
3
225 Hexafluoroacetone C3F6O (CF
3
)
2
CO 2
192 Hexafluorobenzene C6F6 C
6
F
6
2
296 Hexafluorocyclobutene C4F6 C
4
F
6
Perfluorocyclobutene;
1,2,3,3,4,4-
Hexafluorocyclobutene
3
118 Hexafluoroethane C2F6 F
3
CCF
3
F-116, Perfluoroethane 1
138 Hexafluoropropylene C3F6 CF
3
CF=CF
2
Perfluoropropylene or Propylene,
Perfluoro
1
286 Hexafluoropropylene oxide C3F6O C
3
F
6
O Hexafluoroepoxypropane 2
139 Hexamethyldisilane C6H18Si2 (CH
3
)
3
Si
2
(CH
3
)
3
HMDSi, HMDS 3
227 Hexamethyldisilazane C6H19Si2N (CH
3
)
6
Si
2
NH 2
228 Hexamethyldisiloxane C6H18Si2O (CH
3
)
6
Si
2
O 2
127 Hexane C6H14 CH
3
(CH
2
)
4
CH
3
2
170 Hexanediol-1,6 C6H14O2 HO(CH
2
)
6
OH Hexyleneglycol,
Hexamethyleneglycol
2
50 Hydrazine N2H4 H
2
NNH
2
2
269 Hydrazoic Acid HN3 HN
3
1
7 Hydrogen H2 H
2
1
10 Hydrogen Bromide HBr HBr 1
11 Hydrogen Chloride HCl HCl 1
24 Hydrogen Cyanide HCN HCN 1
12 Hydrogen Fluoride HF HF 1
17 Hydrogen Iodide HI HI 1
23 Hydrogen Selenide H2Se H
2
Se 1
22 Hydrogen Sulfide H2S H
2
S 1
229 Hydrogen telluride H2Te H
2
Te 2
90 Intentionally Left Blank
92 Intentionally Left Blank
175 Intentionally Left Blank
SEMI E52-0703 © SEMI 1995, 2003 15
Code Gas Name Symbol Formula Synonym Ref
115 Iodine Pentafluoride IF5 IF
5
1
323 Iodomethane CH3I CH
3
I Methyl iodide; Un 2644 2
230 Iron Carbonyl C5O5Fe Fe(CO)
5
2
111 Isobutane C4H10 (CH
3
)
2
CHCH
3
2-Methylpropane or Propane, 2-
Methyl
1
106 Isobutene C4H8 (CH
3
)
2
C=CH
2
Isobutylene, Methylpropene 2
341 Isobutyl Alcohol C4H10O (CH
3
)
2
CHCH
2
OH 3
231 Isopentane C5H12 CH
3
CH
2
CH(CH
3
)
2
2-Methylbutane 2
187 Isopropal Alcohol C3H8O (CH
3
)
2
CHOH 2-Propanol 2
5 Krypton Kr Kr 1
329 Mercury Hg Hg UN 2809 2
28 Methane CH4 CH
4
1
176 Methanol CH4O CH
3
OH Methyl Alcohol 2
292 Methyl acetate C3H6O2 CH
3
CO
2
CH
3
Methyl ester acetic acid; UN
1231
3
68 Methyl Acetylene C3H4 CH
3
C=CH Propyne 1
44 Methyl Bromide CH3Br CH
3
Br Bromomethane or Methane,
Bromo
1
36 Methyl Chloride CH3Cl CH
3
Cl Chloromethane or Methane,
Chloro
1
33 Methyl Fluoride CH3F CH
3
F Fluoromethane or Methane,
Fluoro
1
340 Methyl isopropyl ether C4H10O (CH
3
)
2
CHOCH
3
3
47 Methyl Mercaptan CH4S CH
3
SH 1
305 Methyl methacrylate polymer C5H8O2 C
5
H
8
O
2
Poly(methyl methacrylate); 2-
Methyl1-2-propenoic acid
2
339 Methyl propyl ether C4H10O CH
3
OC
3
H
7
3
81 Methyl Vinyl Ether C3H6O CH
3
OCH=CH
2
1
52 Methylamine CH5N CH
3
NH
2
Amino Methane,
Monomethylamine
2
120 Methylbutene C5H10 CH
3
CH
2
CCH
3
=CH
2
2-Methyl-1-Butene 1
177 Methylcyclohexane C7H14 CH
3
C
6
H
11
Hexahydrotoluene 2
268 Methylene Bromide CH2Br2 CH
2
Br
2
UN 2664; Methyl dibromide,
Dibromomethane
1
185 Methylsilane CH6Si CH
3
SiH
3
Monomethylsilane 2
183 Methyltrichlorosilane CH3Cl3Si CH
3
SiCl
3
MTS 2
124 Molybdenum Hexafluoride MoF6 MoF
6
2
233 Monoethylamine C2H7N C
2
H
5
NH
2
2
234 Monomethyl hydrazine CH6N2 CH
3
N
2
H
3
2
2 Neon Ne Ne 1
140 Nickel Carbonyl C4O4Ni Ni(CO)
4
1
346 Niobium Pentachloride NbCl5 NbCl
5
3
167 Nitric Acid HNO3 HNO
3
2
16 Nitric Oxide NO NO 2
13 Nitrogen N2 N
2
1
26 Nitrogen Dioxide NO2 NO
2
1
95 Nitrogen Tetroxide N2O4 N
2
O
4
Dinitrogenoxide 2
SEMI E52-0703 © SEMI 1995, 2003 16
Code Gas Name Symbol Formula Synonym Ref
53 Nitrogen Trifluoride NF3 NF
3
1
78 Nitrogen Trioxide N2O3 N
2
O
3
1
235 Nitromethane CH3NO2 CH
3
NO
2
2
141 Nitrosyl Chloride NOCl NOCl 1
27 Nitrous Oxide N2O N
2
O 1
236 Octafluorobutane C4F8 C
4
F
8
3
129 Octafluorocyclobutane C4F8 (CF
2
)
4
Perfluorocyclobutane or
Cyclobutane, Perfluoro
1
266 Octafluorocyclopentene C5F8 CF
2
=C(CF
3
)-CF=CF
2
3
237 Octane C8H18 CH
3
(CH
2
)
6
CH
3
2
15 Oxygen O2 O
2
1
238 Oxygen Dichloride OCl2 OCl
2
2
41 Oxygen Difluoride OF2 OF
2
1
179 o-Xylene C8H10 1,2-(CH
3
)
2
C
6
H
4
1,2-Dimethylbenzene 2
30 Ozone O3 O
3
1
142 Pentaborane B5H9 B
5
H
9
2
239 Pentaborane(11) B5H11 B
5
H
11
2
155 Pentafluoroethane C2HF5 CF
3
CHF
2
F-125, R-125 9
288 Pentafluoropropanol C3H3F5O C
2
F
5
CH
2
OH Perfluorodihydropropanol,
1,1,1,2,2-Pentafluoropropane
2
240 Pentane C5H12 CH
3
(CH
2
)
3
CH
3
2
72 Perchloryl Fluoride ClO3F ClO
3
F 1
351 Perfluoro (Oxacyclopentane) C4F8O C
4
F
8
O 3
241 Perfluorobutane C4F10 C
4
F
10
3
128 Perfluoropropane C3F8 CF
2
(CF
3
)
2
1
180 Phenol C6H6O C
6
H
5
OH 2
60 Phosgene CCl2O CCl
2
O Carbonyl Chloride 1
31 Phosphine PH3 PH
3
1
102 Phosphorous Oxychloride POCl3 POCl
3
2
143 Phosphorus Pentafluoride PF5 PF
5
1
193 Phosphorus Trichloride PCL3 PCl
3
2
62 Phosphorus Trifluoride PF3 PF
3
1
89 Propane C3H8 CH
3
CH
2
CH
3
1
334 Propanoic acid C3H6O2 CH
3
CH
2
CO
2
H Propionic acid 3
293 Propenamine C3H7N C
3
H
7
N Allylamine; Monoallylamine; UN
2334
2
69 Propylene C3H6 CH
3
CH=CH
2
Propene 1
304 Pyridine C5H5N C
5
H
5
N Azabenzene; Azine 2
3 Radon Rn Rn 2
243 Rhenium Hexafluoride ReF6 ReF
6
2
325 Selenium hexafluoride SeF6 SeF
6
UN 2194; Selenium fluoride 2
39 Silane SiH4 SiH
4
1
278 Silicon tetrabromide Br4Si Br
4
Si SiBr4; Tetrabromosilane; Silicon
(IV) bromide
2
108 Silicon Tetrachloride SiCl4 SiCl
4
Tetrachlorosilane 2