semi合集-English.pdf - 第6707页

SEMI C38-0699 © SEMI 1991, 1999 3 NOTICE: T hese standards do not pu rport to address safety issues, if any , associated with th eir use. It is the responsibility of t he user of these standards to establish appropriate …

SEMI C38-0699 © SEMI 1991, 1999 PHOSPHORUS OXYCHLORIDE2

Table 1 Impurity Limits and Other Requirements for Phosphorus Oxychloride

Previous SEMI Reference # C7.12-91

Tier A

(Guideline)

Assay 99.9% min

Color (APHA) 5 max

Hydroxyl 0.1 absorbance units (see NOTE 1)

Aluminum (Al) 10 ppb max

Arsenic (As) 7 ppb max

Barium (Ba) 1 ppb max

Bismuth (Bi) 1 ppb max

Calcium (Ca) 6 ppb max

Chromium (Cr) 1 ppb max

Cobalt (Co) 1 ppb max

Copper (Cu) 3 ppb max

Gallium (Ga) 1 ppb max

Gold (Au) 1 ppb max

Iron (Fe) 5 ppb max

Lead (Pb) 3 ppb max

Lithium (Li) 6 ppb max

Magnesium (Mg) 5 ppb max

Manganese (Mn) 1 ppb max

Mercury (Hg) 8 ppb max

Nickel (Ni) 1 ppb max

Niobium (Nb) 1 ppb max

Potassium (K) 3 ppb max

Silver (Ag) 1 ppb max

Sodium (Na) 5 ppb max

Strontium (Sr) 1 ppb max

Tin (Sn) 1 ppb max

Titanium (Ti) 3 ppb max

Zinc (Zn) 10 ppb max

Particles in bottles:

size, #/mL

≥0.3 µm, 50 max

NOTE 1: Absorbance for the 4000 to 2700 cm

-1

for 5 mm optical path length.

SEMI C38-0699 © SEMI 1991, 19993

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

POTASSIUM HYDROXIDE PELLETS SEMI C39-0699 © SEMI 1978, 19991

SEMI C39-0699

SPECIFICATION FOR POTASSIUM HYDROXIDE PELLETS

This specification was technically approved by the Global Process Chemicals Committee and is the direct

responsibility of the North American Process Chemicals Committee. Current edition approved by the North

American Regional Standards Committee on April 23, 1999. Initially available on SEMI OnLine May 1999;

to be published June 1999. This document replaces SEMI C1.14 in its entirety. Originally published in

1978.

1 Purpose

1.1 The purpose of this document is to standardize

requirements for potassium hydroxide pellets used in

the semiconductor industry and testing procedures to

support those standards. Test methods have been shown

to give statistically valid results. This document also

provides guidelines for grades of potassium hydroxide

pellets for which a need has been identified. In the case

of the guidelines, the test methods may not have been

statistically validated yet.

2 Scope

2.1 The scope of this document is all grades of

potassium hydroxide pellets used in the semiconductor

industry.

3 Limitations

3.1 None.

4 Referenced Documents

SEMI C1 — Specifications for Reagents

5 Terminology

5.1 None.

6 Physical Property (for information only)

6.1 Not applicable.

7 Requirements

7.1 The requirements for potassium hydroxide pellets

for Grade 1 are listed in Table 1.

8 Grade 1 Procedures

8.1 Assay — Weigh accurately 35 to 40 g of sample in

a closed weighing bottle. Transfer to a 500 mL

volumetric flask, dissolve in carbon dioxide-free water,

cool to 25°C, dilute to the mark with carbon dioxide

free water, and mix thoroughly. Transfer 25.0 mL of

this solution to a 500 mL glass-stoppered flask, dilute

with 175 mL of carbon dioxide-free water, add 5 mL of

barium chloride reagent solution, shake, and allow to

stand for five minutes. Add 0.15 mL of phenolphthalein

indicator solution and titrate with 1 N hydrochloric

acid. (Save this solution for the potassium carbonate

test.)

% Assay

112

Weight of sample g

()

8.2 Potassium Carbonate (K

) — To the above ti-

trated solution, add 0.15 mL of methyl orange indicator

solution and continue the titration with 1 N hydro-

chloric acid. The additional hydrochloric acid is equiv-

alent to that consumed by the potassium carbonate.

% K

138

Weight of sample g

()

8.3 Ammonium Hydroxide Precipitate — Weigh about

10 g of sample and dissolve in about 100 mL of water.

8.3.1 Cautiously add 12 mL of sulfuric acid to 15 mL

of water, cool, then cautiously add the mixture to the

solution of the sample and evaporate to dense fumes.

Cool, dissolve the residue in 130 mL of hot water, and

add ammonium hydroxide until the solution is just basic

to methyl red.

8.3.2 Heat to boiling, filter, wash with hot water, and

ignite. The weight of the residue should not exceed 2

mg.

8.4 Insoluble Matter — Dissolve 50 g of sample in

250 mL of carbon dioxide-free water in a 500 mL

stoppered flask and cool to 25°C. The solution should

be clear and colorless. Filter through a tared, medium-

porosity filtering crucible and wash thoroughly with hot

water. Dry the crucible at 105°C for 1 hour, cool, and

weigh the residue. The weight of the residue should not

exceed 2.5 mg.

8.5 Stock Solution for 8.6-8.11, 8.13-8.14 — Dissolve

50 g of sample in 250 mL of carbon dioxide-free water

and dilute with such water to 500 mL. One mL contains

0.10 g of sample. Store in a plastic container.

8.6 Nitrogen Compounds — Dilute 20 mL of the

Stock Solution with 50 mL of water in a flask

connected through a spray trap to a condenser, the end

of which dips beneath the surface of 10 mL of 0.1 N

hydrochloric acid. For the standard, take 50 mL of

water in a similar flask, and add 10 mL of the Stock

Solution and 1 mL of the nitrogen standard solution. To

each flask add 0.5 g of aluminum wire in small pieces,