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SEMI E87-0705 © SEMI 1999, 2005 58 # Comment Dir Message LTS1 LRS2 LCAS3 LTS2 LRS2 LCAS2 CIDSA CSMS A CIDS B CSMS B 4 CarrierID read at load port 2, Equipment based verification indicates that a correct carrier was deliv…

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SEMI E87-0705 © SEMI 1999, 2005 57
R1-2.201 Correct Carrier Delivery to Wrong Port 1 Scenario
R1-2.20.1 Assumptions: Fixed Load Port Equipment based verification.
R1-2.20.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-20 Correct Carrier Delivery to Wrong Port 1 Scenario
# Comment Dir Message LTS1 LRS2 LCAS3 LTS2 LRS2 LCAS2 CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port 1 is
associated with
specified carrierID,
and reserved for
loading.
H->E
H<-E
Bind (lp1)
LP1 Associated
RTL
2 Transfer starts at load
port 2.
H<-E LP2 TRANSFER
BLOCKED
3 Transfer Completes
at load port2.
H<-E Transfer
Complete
R A
NA
INR
4 CarrierID read at load
port 2
Equipment based
verification indicates
the carrier is at the
correct equipment.
H<-E
H<-E
H<-E
LP1 NOT
ASSOCIATED
LP2
ASSOCIATED
IV0
RTL
NR NA
TB
NR
A WFH
SNR
R1-2.21 Correct Carrier Delivery to Wrong Port 2 Scenario
R1-2.21.1 Assumptions: Fixed Load Port Equipment based verification.
R1-21.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-21 Correct Carrier Delivery to Wrong Port 2 Scenario
# Comment Dir Message LTS1 LRS2 LCAS3 LTS2 LRS2 LCAS2 CIDSA CSMS
A
CIDS
B
CSMS
B
0 Initial condition. NR NA (T) (T)
1 Load port 1 is
associated with
specified
carrierID A, and
reserved for
loading.
H->E
H<-E
Bind (CA,
LP1)
Lp1
Associated
NR NA (T) (T)
2 Load port 2 is
associated with
specified
carrierID B, and
reserved for
loading.
H->E
H<-E
Bind (CB,
LP2)
Lp2
Associated
RTL
2 Carrier A
Transfer starts at
load port 2.
H<-E LP2
TRANSFER
BLOCKED
R
3 Transfer
Completes at
load port2.
H<-E Transfer
Complete
RTL
R A
TB
NR
A
INR SNR
INR SNR
SEMI E87-0705 © SEMI 1999, 2005 58
# Comment Dir Message LTS1 LRS2 LCAS3 LTS2 LRS2 LCAS2 CIDSA CSMS
A
CIDS
B
CSMS
B
4 CarrierID read at
load port 2,
Equipment based
verification
indicates that a
correct carrier
was delivered to
the wrong load
port.
H<-E
H<-E
H<-E
LP1 NOT
ASSOCI-
ATED
Carrier B
object
destroyed
Alarm LP2
verification
failed
WFH
5 Host oks
processing.
H-> ProceedWith
Carrier
NR NA
IVO
(T) (T)
R1-2.22 CarrierID Read Fail Scenario 1
R1-2.22.1 Assumptions: Fixed buffer Equipment, Equipment based Verification, Bind service has been received.
R1-2.22.2 Indicated states: LTS = Load Port Transfer State, LCAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-22 CarrierID Read Fail Scenario 1
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL A INR SNR
1 Carrier Arrives. E>H Transfer Blocked TB A INR SNR
2 ID read attempt fails. E>H State change to Waiting For Host
3 Decision to continue is made.
TB A WFH SNR
4 Host sends ProceedWithCarrier
service.
H>E
E>H
ProceedWithCarrier
State change to Id Verification OK
TB A IVO SNR
R1-2.23 CarrierID Read Fail Scenario 2
R1-2.23.1 Assumptions: Fixed buffer Equipment, Equipment based Verification, Bind service has been received.
R1-2.23.2 Indicated states: LTS = Load Port Transfer State, LCAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-23 CarrierID Read Fail Scenario 2
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Carrier Arrives. E>H Transfer Blocked TB
INR
2 ID read attempt fails. E>H State change to Waiting For Host
3 Decision to stop is made.
TB WFH
4 Host sends CancelCarrier service. H>E
E>H
CancelCarrier
State change to Id Verification Failed
TB
A
IVF
SNR
R1-2.24 CarrierID Read Fail Scenario 3
R1-2.24.1 Assumptions: Fixed buffer Equipment, Host based Verification.
R1-2.24.2 Indicated states: LTS = Load Port Transfer State, LCAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status.
SEMI E87-0705 © SEMI 1999, 2005 59
Table R1-24 CarrierID Read Fail Scenario 3
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Carrier Arrives. E>H Transfer Blocked
2 ID read attempt fails. E>H ID read fail event
3 Decision to continue is made. H>E
NA (T) (T)
4 Host sends ProceedWithCarrier
service.
H>E
E>H
E>H
ProceedWithCarrier
State change to Id Verification OK
State change to Load Port Associated
TB
A IVO SNR
R1-2.25 CarrierID Read Fail Scenario 4
R1-2.25.1 Assumptions: Fixed buffer Equipment, Host based Verification.
R1-2.25.2 Indicated states: LTS = Load Port Transfer State, LCAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-25 CarrierID Read Fail Scenario 4
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Carrier Arrives. E>H Transfer Blocked
2 ID read attempt fails. E>H ID read fail event
3 Decision to stop is made. H>E
NA (T) (T)
4 Host sends CancelCarrier. H>E
E>H
E>H
CancelCarrier
State change to Id Verification Failed
State change to Load Port Associated
TB
A IVF SNR
R1-2.26 CarrierID Read Fail Scenario 5
R1-2.26.1 Assumptions: Fixed buffer Equipment, Host based Verification.
R1-2.26.2 Indicated states: LTS = Load Port Transfer State, LCAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-26 CarrierID Read Fail Scenario 5
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Carrier Arrives. E>H Transfer Blocked
2 ID read attempt fails. E>H ID read fail event
3 Decision to stop is made. H>E
4 Host sends CancelCarrierAtPort. H>E CancelCarrierAtPort
TB
NA (T) (T)
R1-3 Example Equipment Logic for Carrier Delivery
R1-3.1 To summarize the CMS carrier object behavior, following flow-charts are provided. The charts show the
example of an equipment logic for the CMS definitions.