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SEMI E87-0705 © SEMI 1999, 2005 43 Variable Name Desc ription Type Acc ess Comment CarrierAccessingStatus The state of the carrier access ing status. Enumerated: NOT ACCESSED, IN ACCESS, CARRIER COMPLETE, CARRIER STOPPED…

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SEMI E87-0705 © SEMI 1999, 2005 42
18.12.4 If a ProceedWithCarrier service is received from the host by the equipment the carrier object is instantiated
via transition 4 in the Carrier State Model.
18.12.5 If a CancelCarrier service is received, the equipment uses the host provided CarrierID to instantiate the
carrier object via transition 5, associates the carrier to the load port and prepares carrier for unload.
19 Variable Data
19.1 The purpose of this section is to define the list of variable data requirements for CMS equipment. Values of
these variables are available to the host via collection event reports and host status queries. Some of the data items
listed are valid for internal buffer production equipment only, and are marked as such.
19.2 Variable Data Definitions
19.2.1 The following table defines variable data that shall be provided by the production equipment. Also, for the
objects defined by Carrier Management, the identifier of that object and all of the attributes of that object shall be
available for inclusion in event reports associated with that object. Subscripted variables are used either as items
within a list or to differentiate data representing different entities. Subscripted variables are always valid.
Table 37 Variable Data Definitions
Variable Name Description Type Acc
ess
Comment
AccessMode The access mode of the loadport. Enumerated:
MANUAL, AUTO
RO
AccessMode
i
The access mode for the i
th
load
port.
Enumerated:
MANUAL,
AUTO
RO
AvailPartitionCapacity The current available buffer
capacity for a logical partition
inside internal buffer equipment
(PartitionCapacity - # of carriers
in partition).
Non-negative integer RO Only applicable to internal
buffer production equipment.
AvailPartitionCapacity
i
The AvailPartitionCapacity for the
i
th
PartitionID within the internal
buffer.
Non-negative integer RO Only applicable to internal
buffer production equipment.
BufferCapacityList The current PartitionType,
AvailPartitionCapacity, and
PartitionCapacity for all logical
buffer partitions.
List of n groups of items
1. BufferPartitionInfo
1
.
.
n. BufferPartitionInfo
n
RO Only applicable to internal
buffer production equipment.
BufferPartitionInfo The related information for a
logical buffer partition.
Structure of 5 items
PartitionID
PartitionType
AvailPartitionCapacity
PartitionCapacity
UnallocatedPartitionCapacity
RO Only applicable to internal
buffer production equipment.
BufferPartitionInfo
i
The related information for the i
th
buffer partition.
Structure of 5 items
PartitionID
i
PartitionType
i
AvailPartitionCapacity
i
PartitionCapacity
i
UnallocatedPartitionCapacity
i
RO Only applicable to internal
buffer production equipment.
BypassReadID Enables or disables automatic ID
acceptance when the carrier ID
reader is unavailable.
Boolean. RW If TRUE, the ID provided
with Bind is used
automatically.
SEMI E87-0705 © SEMI 1999, 2005 43
Variable Name Description Type Acc
ess
Comment
CarrierAccessingStatus The state of the carrier accessing
status.
Enumerated:
NOT ACCESSED,
IN ACCESS,
CARRIER COMPLETE,
CARRIER STOPPED
RO
CarrierID The ID of the carrier. Text RO
CarrierID
i
The CarrierID at the i
th
locationID. Text RO
CarrierIDStatus State of the carrier ID status. Enumerated:
ID NOT READ,
[ID]WAITING FOR HOST,
ID VERIFICATION OK,
ID VERIFICATION
FAILED
RO
CarrierLocationMatrix A list all the carriers at/in the
equipment. Both internal to the
equipment, and on equipment load
ports.
List of n pairs of items
1. LocationID
1
CarrierID
1
.
.
n. LocationID
n
CarrierID
n
RO The CarrierID
i
shall be null if
there is no carrier at the
locationID
i
. If a carrier is at
LocationID
i
, but the
CarrierID
i
is not known, the
value of CarrierID
i
shall be
“UNKNOWN”.
LocationID The ID of a carrier location. Text RO Carrier locations are any
location at/in the production
equipment where a carrier
may rest.
LocationID
i
The LocationID
of the i
th
carrier
location.
Text RO Carrier locations are any
location at/in the production
equipment where a carrier
may rest.
LoadPortReservation-
State
The reservation state of a Load
Port.
Enumerated:
NOT RESERVED,
RESERVED
RO
LoadPortReservation-
State
I
The reservation state of the i
th
Load Port.
Enumerated:
NOT RESERVED,
RESERVED
RO
LoadPortReservation-
StateList
The current reservation state of all
the load ports.
A list of n items
1. LoadPortReservationState
1
.
.
n.LoadPortReservationState
n
RO This can be used to
resynchronize the host.
PartitionCapacity The total PartitionCapacity for a
logical internal buffer partition.
Non-negative integer RO Only applicable to internal
buffer production equipment.
PartitionCapacity
i
The PartitionCapacity for the i
th
PartitionID of the internal buffer.
Non-negative integer RO Only applicable to internal
buffer production equipment.
PartitionID The ID of a logical internal buffer
partition.
Text RO Used to identify separate
material types in an internal
buffer.
PartitionID
i
The ID of the i
th
logical partition
of the internal buffer.
Text RO Used to identify separate
material types in an internal
buffer.
SEMI E87-0705 © SEMI 1999, 2005 44
Variable Name Description Type Acc
ess
Comment
PartitionType The type of a logical partition
within an internal buffer.
Text RO Only applicable to internal
buffer production equipment.
Some examples of logical
buffer PartitionType are
Product, Dummy, Substrate,
and Seed.
PartitionType
i
The PartitionType corresponding
with the i
th
PartitionID.
Text RO Only applicable to internal
buffer production equipment.
Some examples of logical
buffer PartitionType are
Product, Dummy, Substrate,
and Seed.
PortAssociationState The association state of a load
port.
Enumerated:
ASSOCIATED,
NOT ASSOCIATED
RO
PortAssociationState
i
The association state of the i
th
load
port.
Enumerated:
ASSOCIATED,
NOT ASSOCIATED
RO
PortAssociationState-
List
The current association state for
all load ports.
A list of n items
1. PortAssociationState
1
.
.
n. PortAssociationState
n
RO This can be used to re-
synchronize the host.
PortID ID of a load port. Positive integer RO
PortID
i
ID of the load port where the
carrier transfer is taking place.
One PortID exists for each load
port.
Positive integer RO
PortStateInfo The PortAssociationState
combined with the
PortTransferState.
List of 2 items
PortAssociationState
PortTransferState
RO A combination of both port
states.
PortStateInfo
i
The PortAssociationState
combined with the
PortTransferState for the i
th
load
port.
List of 2 items
PortAssociationState
i
PortTransferState
i
RO A combination of both port
states.
PortStateInfoList List of PortStateInfo for all load
ports.
List of n items
1. PortStateInfo
1
.
.
n PortStateInfo
n
RO A list of all the port states for
all the ports.
PortTransferState The current transfer state of a load
port.
Enumerated:
OUT OF SERVICE,
TRANSFER BLOCKED,
READY TO LOAD,
READY TO UNLOAD
RO Super states are not included,
only sub states.
PortTransferState
i
The current transfer state of the i
th
load port.
Enumerated:
OUT OF SERVICE,
TRANSFER BLOCKED,
READY TO LOAD,
READY TO UNLOAD
RO Super states are not included,
only sub states.
PortTransferStateList The current Load Port Transfer
State for all load ports.
A list of n items
1. PortTransferState
1
.
.
n. PortTransferState
n
RO This can be used to re-
synchronize the host.