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SEMI E84-0305 © SEMI 1999, 2005 7 Signal Name P/A Description L_REQ P -> A Indicates the load port is assigned to load a carr ier. L_REQ always indicates a carr ier transfer from Active to Passive equipment. ON: The l…

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SEMI E84-0305 © SEMI 1999, 2005 6
6.1.2.3 The assignment of the load port is relevant when two load ports use a common parallel I/O interface. The
active equipment shall select the load port by means of the CS_0 and/or CS_1 signals (see Figure 6).
CS_0 selects the left hand load port as viewed when facing towards the equipment’s load ports.
CS_1 selects the right hand load port as viewed when facing towards the equipment’s load ports.
6.1.2.4 For the simultaneous handoff, both of CS_0 and CS_1 must be set to ON at the handoff. Figure 8 shows a
piece of passive equipment with four load ports (LP1, LP2, LP3, LP4) and two parallel I/O interfaces (PI/O#1,
PI/O#2), where PI/O#1 is common to load ports LP1 and LP2 and PI/O#2 is common to load ports LP3 and LP4.
Tables 2 and 3 show the range of signal combinations.
6.1.3 Load Port Assignment Signals for OHS (Passive type)
6.1.3.1 The signals VS_0 and VS_1 are used to select load ports to be used for the handoff. For the parallel I/O
interface which is dedicated to a single load port, the signals must be set;
VS_0 ON
VS_1 OFF
6.1.3.2 Two load ports can be controlled by using VS_0 and VS_1.
VS_0 ON: Selects left hand Load port.
OFF: Does not select Left hand Load port.
VS_1 ON: Selects Right hand Load port.
OFF: Does not select Right hand Load port.
VS_0 and VS_1 are controlled individually.
Table 1 Signals for the Enhanced Carrier Handoff Parallel I/O Interface
Signal Name P/A Description
VALID A -> P Indicates that the interface communication is valid.
ON: the communication is valid
OFF: the communication is not valid
Before this signal is turned ON, the load port must be specified by the signal CS_0 and/or CS_1.
CS_0 A -> P Specifies the load port used for carrier handoff (¶6.1.2, Load Port Assignment Signals).
One PI/O device per load port
ON: Use the load port for carrier handoff
OFF: N/A
One PI/O device per 2 load ports
ON: Use the left load port for handoff
OFF: Do not use the left load port of handoff
CS_1 A -> P Specifies the load port used for carrier handoff (¶6.1.2, Load Port Assignment Signals).
One PI/O device per load port
Not used (OFF)
One PI/O device per 2 load ports
ON: Use the right load port for handoff
OFF: Do not use the right load port of handoff
TR_REQ A -> P Requests the handoff to the passive equipment.
ON: the active equipment has requested the handoff
OFF: the active equipment has not requested the handoff
This signal is turned OFF when the BUSY signal transitions to OFF.
SEMI E84-0305 © SEMI 1999, 2005 7
Signal Name P/A Description
L_REQ P -> A Indicates the load port is assigned to load a carrier. L_REQ always indicates a carrier transfer from
Active to Passive equipment.
ON: The load port is assigned to load a carrier
OFF: The load port is not assigned to load a carrier
This signal is turned ON when the load port is specified by CS_0 and/or CS_1 and the VALID signal
is turned ON. This signal is turned OFF when the load port detects the carrier in the correct position.
In simultaneous handoff, the carrier on both load ports shall not be present when this signal is turned
ON, and the carriers shall be present in correct position on both load ports when this signal is turned
OFF.
U_REQ P -> A Indicates the load port is assigned to unload a carrier. U_REQ always indicates a carrier transfer from
Passive to Active equipment.
ON: The load port is assigned to unload a carrier
OFF: The load port is not assigned to unload a carrier
This signal is turned ON when the load port is specified by CS_0 and/or CS_1, and the VALID signal
is turned ON. This signal is turned OFF when the carrier on the load port is removed.
In simultaneous handoff, the carrier on both load ports shall be present in correct position when this
signal is turned ON, and the carriers shall not be present on both load ports when this signal is turned
OFF.
READY P -> A Indicates the passive equipment has accepted the transfer request from the active equipment.
ON: the passive equipment is ready for the handoff
OFF: the passive equipment is not ready for the handoff
This signal is turned ON when the passive equipment accepts the transfer request, and it is turned OFF
when the COMPT signal is turned ON.
BUSY A -> P Indicates the handoff is in progress by the active equipment.
ON: the handoff is in progress
OFF: no handoff is in progress
This signal is turned ON when the active equipment starts handoff operation. READY must be ON
when BUSY is turned ON. It must be turned OFF after the active equipment has completed the handoff
and the active equipment resource position is outside the handoff conflict area. The passive equipment
must not perform any mechanical action in the handoff conflict area while this signal is ON. The active
equipment turns the BUSY OFF after confirming the L_REQ or U_REQ OFF.
COMPT A -> P Indicates the active equipment has completed the handoff operation.
ON: the handoff is completed
OFF: the handoff is not completed
This signal is turned ON when the active equipment has completed the handoff (BUSY OFF), and it is
turned OFF after the passive equipment has completed the handoff operation (READY OFF).
CONT A -> P Specifies the handoff is continuous handoff.
ON: continuous handoff
OFF: not continuous handoff
This signal is turned ON by BUSY ON for the first carrier handoff, and it is turned OFF by BUSY ON
for the last carrier handoff operation.
If the passive equipment has a mechanism that interferes with the handoff (such as a shutter door), that
mechanism must be held in the non-interfering state (the door must remain open) during the
continuous handoff.
SEMI E84-0305 © SEMI 1999, 2005 8
Signal Name P/A Description
HO_AVBL P -> A Indicates the passive equipment is not available for the handoff. It may also indicate error in the
passive equipment.
ON: handoff is available
OFF: handoff is unavailable with any error
This signal is ON while the passive equipment’s operation is normal. This signal shall be turned OFF
when the passive equipment detects an exception for the handoff. This signal might be kept OFF, when
other load ports of the passive equipment detect exceptions. The exceptions include:
- Carrier detection is not correct.
- The passive equipment has been changed to manual access mode.
- The passive equipment is in handoff unavailable state.
Examples of exceptions involving HO_AVBL are included in the Application’s notes.
This signal indicates the state of the passive equipment to the active equipment before the start of the
handoff.
See SEMI E87 for additional information and requirements about loadport access modes and
availability states.
ES P -> A Request to stop active equipment activity immediately.
ON: normal operation
OFF: request to stop
Normally active equipment may monitor the ES signal from VALID ON to VALID OFF.
This signal is turned OFF to stop the handoff operation immediately when a hazardous situation is
detected by the passive equipment. Hazardous situations include possible harm to material, product, or
operation. This signal is ON while the passive equipment’s operation is normal. It turns OFF when the
passive equipment needs to stop the activity of the active equipment. The passive equipment may turn
the ES signal off when the ES button is pressed or, a handoff interlock abnormal has occurred.
VA P -> A Notifies active entity of passive OHS vehicle arrival.
Indicates that the interface communication is valid when the vehicle has arrived at the load port.
ON: Vehicle has arrived and communication is valid.
OFF: Vehicle has not arrived and communication is not valid.
Before this signal is turned ON, the load port must be specified by the signal VS_0 and/or VS_1.
Note: This signal is for interbay passive OHS vehicle use only.
AM_AVBL A -> P Notifies passive OHS vehicle of handling arm availability.
Indicates the active stocker is not available for handoff operation.
It may also indicate error in the active stocker.
ON: Handoff is available.
OFF: Handoff is unavailable with any error.
This signal is ON while active stocker’s operation is normal. This signal is turned OFF, when the
active stocker detects some exceptions. This signal might be kept OFF, when loader’s of the active
stocker detects exceptions. The exceptions include:
- The active stocker has been changed to manual access mode.
- The active stocker is in handoff unavailable state.
- When the active stocker detected off the HO_AVBL signal of passive OHS.
This signal indicates the state of the active stocker to the passive OHS vehicle before the start of
handoff operation.
Note: This signal is for interbay passive OHS vehicle use only.
VS_0 P -> A Signal for the passive OHS vehicle to notify the active of the load or unload position.
Specifies the load port used for carrier handoff.
One PI/O device per Load Port.
ON: Use the load port for carrier handoff.
OFF: N/A
One PI/O device per 2 load ports; but vehicle does not move when accessing to 2 load ports.
ON: Use the left load port for handoff.
OFF: Do not use the left load port for handoff.
Note: This signal is for interbay passive OHS vehicle use only.
VS_1 P -> A Signal for the passive OHS vehicle to notify the active of the load or unload position.