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SEMI S22-1103a © SEMI 2003, 2005 35 use pulleys or ot her means t o adjust the angle of force a pplied to the strain relief on the equipm ent. Apply the force gradually by slowly sus pending the weight on the cord and m …
SEMI S22-1103a © SEMI 2003, 2005 34
22.5.2 Procedure — Measure the input current to the equipment under the maximum normal operating load
conditions (i.e., with all motors, heaters, etc. running at manufacturer’s specified maximum loading conditions).
22.5.3 Acceptable Results The measured current does not exceed 110 percent of the rated full load current value
specified on the equipment nameplate.
22.6 Dielectric Test
22.6.1 Test Equipment Timer with accuracy of 5 seconds. Dielectric Withstand Tester with means of
indicating test potential, as well as an audible or visual indicator of dielectric breakdown, or an automatic-reject
feature for any unacceptable unit. In an alternating current test, the test equipment should include a transformer
having sinusoidal output. This transformer should have a rating of 500 VA or greater unless it is provided with a
voltmeter that directly measures the applied output potential.
22.6.2 Procedure — With the equipment disconnected from its supply, apply a dielectric withstand potential of
1500 Volts AC or 2121 Volts DC between energized metal parts of the primary circuit(s) and dead metal parts.
Surge suppression components and devices, and electronic components certified by an accredited testing laboratory
that may be damaged may be disconnected from the circuit for this test. For this test, the following conditions need
to be set:
a) the equipment should be at its maximum operating temperature;
b) switches should be placed in the “on” position; and
c) circuits through contactors should be completed by manually engaging the contacts or bypassing the contactor
terminals.
22.6.2.1 Achieve the test potential gradually, starting from zero and holding at the maximum value for a period of
one minute.
EXCEPTION: Where line-to-earth filter components are installed in the equipment, the DC dielectric potential
specified above may be used as an equivalent.
NOTE 62: An earthed conductor (neutral), if used in the circuit, is considered to be an energized conductor.
22.6.3 Acceptable Results The equipment does not have a dielectric breakdown.
NOTE 63: Breakdown is often indicated by an abrupt decrease or nonlinear advance of voltage as the voltage is increased.
Similarly, a breakdown is often indicated by an abrupt increase in current. Partial discharge (corona) and similar phenomena are
disregarded during application of the test voltage.
22.7 Strain Relief Test Either Procedure One or Procedure Two may be used to demonstrate compliance to this
test.
22.7.1 Test Equipment Timer with accuracy of 5 seconds. A calibrated weight to apply a force of 156
Newtons (35 lb) 1.56 Newtons (0.35 lb). A supporting surface on which to secure the equipment.
22.7.2 Procedure One
22.7.2.1 For cord-and-plug connected equipment, strain relief is provided to prevent mechanical stress such as a
pull or twist being transmitted to terminals, splices or interior wiring. Support the equipment on a surface so it will
not move when the force is applied to the cord. Apply a direct pull of 156 N (35 pounds) to the equipment supply
cord from the least favorable angle. If necessary, use pulleys or other means to adjust the angle of force applied to
the strain relief on the equipment. Apply the force gradually by slowly suspending the weight on the cord and
maintain the applied force for a period of one minute.
22.7.2.2 Acceptable Results For Procedure One The equipment supply cord does not displace to the extent that
stress could be applied to the internal connections.
22.7.3 Procedure Two
22.7.3.1 Support the equipment on a surface so it will not move when the force is applied to the cord. Disconnect
the internal connections for the cord. Mark the external portion of the cord with tape where it meets the strain relief.
Apply a direct pull of 156 N (35 pounds) to the equipment supply cord from the least favorable angle. If necessary,
SEMI S22-1103a © SEMI 2003, 2005 35
use pulleys or other means to adjust the angle of force applied to the strain relief on the equipment. Apply the force
gradually by slowly suspending the weight on the cord and maintain the applied force for a period of one minute.
22.7.3.2 Acceptable Results For Procedure Two — No displacement of the tape demonstrates an acceptable result.
22.8 Transformer Output Short Circuit Test
22.8.1 Test Equipment Timer with accuracy of 5 minutes. A substantial conductor suitable for carrying the
short circuit current.
22.8.2 Procedure — With the equipment in its standby condition, short circuit the output of each power
transformer.
NOTE 64: If overcurrent protection is connected to the output of the transformer under test, connect the short-circuit jumper
after this protective device.
EXCEPTION 1: Where the overcurrent protective devices on the input or output of the transformer are rated at not
more than 125 percent of the rated current of the transformer respectively and the overcurrent protective devices are
certified by an accredited testing laboratory, the transformer need not be subjected to this test.
EXCEPTION 2: A thermally-protected or impedance-protected transformer that is certified by an accredited testing
laboratory need not be subjected to this test.
22.8.3 Acceptable Results A hazardous condition (e.g., smoke, fire, or molten material) does not exist within 8
hours or before activation of overcurrent protection, thermal protection, or other protective circuit/device, whichever
occurs first.
22.9 Power Supply Output Short Circuit Test
22.9.1 Test Equipment Timer with accuracy of 5 minutes. A substantial conductor suitable for carrying the
short circuit current.
22.9.2 Procedure — With the equipment in its standby condition, short circuit the output of each power supply, one
at a time.
NOTE 65: If overcurrent protection is connected to the output of the power supply under test, connect the short circuit jumper
after this protective device.
EXCEPTION: A power supply that is certified by an accredited testing laboratory and used in accordance with its
certification and the manufacturer’s instructions need not be subjected to this test.
22.9.3 Acceptable Results A hazardous condition (e.g., smoke, fire, or molten material) does not exist within 8
hours or before activation of overcurrent protection, thermal protection, or other protective circuit/device, whichever
occurs first.
22.10 Safety Circuit Function Test
22.10.1 Test Equipment Contingent on safety devices being tested.
22.10.2 Procedure Functionally test each safety circuit by actuation and resetting.
22.10.3 Acceptable Results The following sections provide the acceptable results for the applicable safety
systems:
a) When the EMO is actuated, all hazardous voltage and all power greater than 240 volt-amps in the equipment
beyond the main power enclosure should be de-energized, except where permitted by ¶13.3.3.
b) Actuation of the emergency stop and safety interlocks causes the equipment, or relevant parts of the
equipment, to be automatically brought to a safe condition.
c) Resetting of the safety circuit should not cause the system to resume operation.
NOTE 66: This test documents the electrical functionality of the safety circuit(s). It is not intended to determine or document
the appropriateness of the shutdown actions taken.
22.11 Safety Circuit Conductor Disconnection Test
SEMI S22-1103a © SEMI 2003, 2005 36
22.11.1 Test Equipment None.
22.11.2 Procedure — For each independent safety interlock circuit (such as door safety interlock), EMO, and safety
sensor (e.g., exhaust sensor, low fluid level sensor), disconnect each safety interlock circuit one conductor at a time.
22.11.3 Acceptable Results The following sections provide the acceptable results for the applicable safety
circuits:
22.11.3.1 The opening of the safety circuit causes the equipment to be placed in a safe condition as if the safety
device had been actuated.
22.11.3.2 Reconnecting the conductor should not cause the system to resume operation.
22.12 Capacitor Stored Energy Discharge Test
22.12.1 Test Equipment Timer with accuracy of 1 seconds. DC voltmeter with sensitivity of 1.0 percent.
22.12.2 Procedure — Test each capacitor that stores a hazardous energy (20 Joules or more). Monitor the voltage
across the capacitor terminals continuously. Disconnect the equipment from the supply. Record the voltage across
the capacitor terminals after 10 seconds.
22.12.3 Acceptable Results The capacitor is discharged to less than 20 Joules within 10 seconds of equipment
disconnection from the supply.
NOTE 67: The following formula is provided to calculate the energy:
J = 1/2 CV
2
where: J is the energy in joules
C is the capacitance in farads
V is the potential in volts
EXCEPTION: This criterion does not apply if a tool is necessary to remove a panel to reach the capacitor and the
equipment is marked specifying the discharge time—5 minutes maximum—that is required for the capacitor to
discharge to less than 20 Joules.
22.13 Temperature Test
22.13.1 Test Equipment Timer with accuracy of 5 seconds. A thermometer with a full range of resolution and
an accuracy of 0.1C.
22.13.2 Procedure — The equipment is to be operated at the manufacturer’s maximum design load for 8 hours or
until thermal equilibrium is reached (whichever occurs first). Measure and record the ambient room temperature.
Measure and record the temperatures of the various components and devices for comparison with Appendix 1, Table
A1-11.
NOTE 68: Thermal equilibrium is attained when three successive readings taken at five minute intervals indicate that there is no
temperature change of the part exceeding 1.0C.
22.13.3 Acceptable Results The ambient temperature should be subtracted from 40°C or the maximum ambient
temperature specified in the manufacturer’s documentation, whichever is greater. This difference should be added
to all the measured temperatures and these results should not exceed the values listed in Appendix 1, Table A1-11.
22.14 Strength of Electrical Enclosures Test
22.14.1 30N Steady Force Test — This test applies to mechanical strength of enclosures.
22.14.1.1 Test Equipment — Force gauge.
22.14.1.2 Procedure — The enclosure walls and covers are to be subjected to a steady force of 30 N ± 3 N for a
period of 5 seconds applied by means of a straight un-jointed version of a test finger to the part, on or within the
complete equipment, or on a separate sub-assembly.
22.14.1.3 Acceptable Results — If the straight un-jointed version of the test finger penetrates the material or
opening, it should not be possible to touch any hazardous energized parts inside the enclosure with the jointed or un-
jointed test finger.