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SEMI E40.1-0705 © SEMI 1996, 2005 3 8 Implementation Details 8.1 Use of Object Services — Several capabilities of the Processing Ma nagement Services are accessed through the Object Services Standard. Whan a Proce ss Job…

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SEMI E40.1-0705 © SEMI 1996, 2005 2
Service Message Name Stream, Function SECS-II Name
PRJobDequeue S16F17/F18 PRJobDequeue
PRGetAllJobs S16F19/F20 PRGetAllJobs
PRGetSpace S16F21/F22 PRGetSpace
PRJobSetRecipeVariable S16F23/F24 PRJobSetRecipeVariable
PRJobSetStartMethod S16F25/F26 PRJobSetStartMethod
6 Mapping of Processing Parameter
Table 2 Data Item Mapping
Service Parameter SECS-II Data Item
PrJobID PRJOBID
PRMtlType MF
PRMtlName MID
PRAck ACKA
PRRecipeMethod PRRECIPEMETHOD
RecID RCPSPEC
RecipeVarName RCPPARNM
RecipeVarValue RCPPARVAL
PRProcessStart PRPROCESSSTART
PRCmdName PRCMDNAME
PRJobMilestone If E30 style events:
CEID
If E40 style alerts:
PRJOBMILESTONE
If E53 style events:
CEID
PRJobState PRSTATE
Timestamp TIMESTAMP
PREventID If E30 style events:
CEID
If E40 style events:
PREVENTID
If E53 style events:
CEID
CmdParmName CPNAME
CmdParmVal CPVAL
PRMtrlOrder PRMTRLORDER
ErrorCode ERRCODE
ErrorText ERRTEXT
PREventData V (SV, ECV, DVVAL)
PRJobSpace PRJOBSPACE
PRPauseEvent PRPAUSEEVENT
7 Variable Data Item Mapping
7.1 This section shows the specific SECS-II data classes, and formats needed for SECS-II implementations of
SEMI E40 variable data. According to SEMI E40 §11, all ProcessJob object attributes are to be available as
variables for Process Job state transition events. These variables will be of SEMI E5 data item DVVAL.
SEMI E40.1-0705 © SEMI 1996, 2005 3
8 Implementation Details
8.1 Use of Object Services — Several capabilities of the Processing Management Services are accessed through the
Object Services Standard. Whan a Process Job has been created, (PRJOBID is valid), then its attributes can be read
and written using the Object Services GetAttr and SetAttr messages.
8.1.1 E39 Object Services shall be used for access to ProcessJob attributes. The GetAttr service may be used for all
ProcessJob attributes and the SetAttr service may be used on only those attributes whose Access is set to RW.
8.2 Multi-Block Messages — Processing Management Services is protocol independent and therefore, makes no
mention of SECS-II multi-block access and grant messages. When these Service use the SECS-II protocol, then
S16F3,F5 shall be preceded by an S16F1/S16F2 access request/grant message exchange when the message will be
multi-block.
9 SECS-II Attribute Definitions
9.1 Process Job Object SECS-II Attributes Definitions — The following are the SECS-II structure definitions for
the E40 ProcessJob object.
Table 3 Process Job SECS-II Attribute Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“ObjID” <PRJOBID> (Conforms to the restrictions of ObjID as specified in SEMI E39.1, §6.)
“ObjType” “ProcessJob”
“PauseEvent” L,n n=number of collection events
1. <CEID
1
>
…
n. <CEID
n
>
CEID restricted to format U()
“PRJobState” <PRSTATE> PRJobState
PRSTATE enumerated as follows:
51 (U1)
Enumerations:
0 – QUEUED/POOLED
1 – SETTING UP
2 – WAITING FOR START
3 – PROCESSING
4 – PROCESS COMPLETE
5 – (Reserved)
6 – PAUSING
7 – PAUSED
8 – STOPPING
9 – ABORTING
10 – STOPPED
11 – ABORTED
SEMI E40.1-0705 © SEMI 1996, 2005 4
Attribute Name Attribute Data Form: SECS-II Structure
“PRMtlNameList” When MF = 13 (0x0d) (carriers)
L,n n=number of carriers
1. L,2
1. <CARRIERID
1
>
2. L,j j=number of slots
1. <SLOTID
1
>
:
j. <SLOTID
j
>
:
n. L,2
1. <CARRIERID
n
>
2. L,k k=number of slots
1. <SLOTID
1
>
:
k. <SLOTID
k
>
When MF = 14 (0x0e) (substrate)
L,n n=number of material (substrate)
1. <MID
1
> substrate ID
…
n. <MID
n
>
MID restricted to format A
“PRMtlType” <MF>
MF restricted to format B
MF Value Description
13 (0x0d) carriers (e.g. FOUP, SMIF pod, cassette)
14 (0x0e) substrate (e.g. wafer, mask, flat panel)
other not valid for E40 material
“PRProcessStart” <PRPROCESSSTART>
“PRRecipeMethod” <PRRECIPEMETHOD>
“RecID” <RCPSPEC>
“RecVariableList” L,n n=number of recipe variables
1. L,2
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
…
n. L,2
1. <RCPPARNM
n
>
2. <RCPPARVAL
n
>
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