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SEMI F97-0305 © SEMI 2005 7 8.6 Parameter Definitions 8.6.1 When calling an operation, param eters can be passed and returned. Parame ters to be passed and retur ned depend upon t he operation that is cal led. By using a…

SEMI F97-0305 © SEMI 2005 6

7 Ordering Information

7.1 When integrating FPUs into a FMCS, suppliers and purchasers have to agree on details on how the integration

will be performed. This includes a number of items such as the information to be exchanged between FMCS and

FPUs, the communication protocol to be used

, or details of the available FPU subcontrol level. Other parties such

as fab planners or system integrators may be involved in this information exchange. Related Information 2 provides

a template for the ordering information and examples for its use.

8 Conventions

8.1 This standard follows the conventions for state model methodology and service definitions as defined by other

SEMI standards supplemented by specific extensions. The conventions used in this standard are described in the

following paragraphs.

8.2 State Model Methodology

8.2.1 This document uses the state model methodology as defined within SEMI E30 to describe the behavior of

FPUs. A state model is comprised of the following elements:

 definitions of each state and sub state,

 a diagram of the states and the transition between states, and

 a state transition table.

8.2.2 The diagram of the state model uses the Harel State Chart notation

8.3 Notion of Alarm-Mode, Warning-Mode, Error-Mode — Signifies the importance of the situation that occurred at

the FPU to draw attention at the FMCS. Error-Mode is generally used to signify an error. This error may be

persistent for some time until the error situation is corrected. Warning-Mode may be used to signal a higher

awareness that is to be raised at the FMCS. Again, attention may be needed to correct the problem. Alarm-Mode

signals the highest awareness required and may again need some attention for correction. The use of which mode is

used when and where is intentionally left to the agreement between the purchaser and the supplier. It is

recommended to use always the same philosophy for use of these three modes for the entire facility when possible.

8.4 Transition Tables

8.4.1 Transition Tables are provided in conjunction with the state diagrams to explicitly describe the nature of each

state transition. A transition table contains columns for transition number, previous state, trigger, new state, actions

and a remark. The trigger for the transition occurs while in the previous state. The actions include a combination of

actions taken upon exit of the previous state and actions taken upon entry into the new state.

Number Previous

State

Trigger New

State

Actions Remark

8.5 Operation Representation

8.5.1 Operations are used to describe interfaces between different resources (e.g. interfaces between FMCS and

FPUs). An operation definition table defines the specific set of operations for a specific resource as shown in the

following table:

Operation Description

8.5.2 Operation — Defines the operation name. The operation name has to be unique for each given resource.

8.5.3 Description — Gives a short comprehensive description of the operation with regard to functionality.

2 As an example, OPC Data Access combined with the agreed communications protocol may be used for interconnecting FMCS and FPUs.

3 Harel, D., "Statecharts: A Visual Formalism for Complex Systems", Science of Computer Programming 8 (1987), p. 231-274

SEMI F97-0305 © SEMI 2005 7

8.6 Parameter Definitions

8.6.1 When calling an operation, parameters can be passed and returned. Parameters to be passed and returned

depend upon the operation that is called. By using a parameter definition table the parameters passed and returned

by an operation are defined.

Parameter Description Direction Data Type

8.6.2 Parameter — Within the parameter column the name of the specific parameter is given.

8.6.3 Description — Contains a description of a parameter.

8.6.4 Direction — Defines the direction:

 FMCS -> FPU: originated by FMCS and received by FPU

 FPU -> FMCS: originated by FPU and received by FMCS

8.6.5 Data Type — Defines the format of a parameter.

8.7 Field Definitions

8.7.1 A parameter can consist of different fields that define the contents of a parameter. A field definition table

defines the format of the fields maintained within a specific parameter.

Field Bit Meaning Mandatory/optional

8.7.2 Field — A parameter can consist of different fields representing the contents of a parameter. Within the field

column the name of the specific field is given.

8.7.3 Bit — In case a field is stored within a bitwise-formatted parameter, the bit column defines the bit number or

bit range where the field value is stored.

8.7.4 Meaning — Defines the meaning of the one or several field values.

8.7.5 Mandatory/Optional — Defines if setting the value of a field is either mandatory or optional.

9 Requirements

9.1 Interconnection between FMCS and FPUs

9.1.1 The interconnection between the FMCS and the FPUs may be made by any type of bus system specified by

SEMI (e.g. SEMI E54 series) as well as industrial ethernet based networks. It is the purpose of this standard:

 to specify the semantics of the services that are exchanged between the FMCS and the FPUs, and

 to model the status information of the state machines that are maintained by the FPUs.

9.1.2 As introduced in §7, state models are used to represent the current state of a FPU. The FMCS may use this

state information in order to display the state of all FPUs. In addition, the FMCS may decide based on the state of a

FPU whether remote operations on a FPU are advisable or not.

FMCS

FPU 1 FPU 2 FPU n

FMCS

FPU 1 FPU 2 FPU n

Figure 3

Interconnection Between FMCS and FPUs

9.2 FPU Requirements

9.2.1 The FPU shall be able to run without a FMCS and shall communicate a minimal amount of status information

to FMCS via the network as described in the next section.

9.3 FMCS Requirements

9.3.1 The FMCS shall be able to support the interface to the FPU and to make the information of this interface

available through the Data Cache of the FMCS. The FMCS shall be able to either monitor and/or control the FPU

depending on the application.

9.4 State Models of Facility Package Unit

9.4.1 State Models are used to describe the status of the FPU. For the definition of the status models see §8. In the

following all status values are specified together with their transitions.

9.4.2 Watchdog-Toggle

9.4.2.1 The Watchdog-toggle shall be used to signal that a FPU still is capable to perform its processing function

and is able to notify this to the FMCS. As long as the toggle mechanism alternates between “on” and “off” the

processing function of the FPU is assumed to be functional. The processing function is assumed to be a

programmed function, e.g. for a PLC. The toggle mechanism shall be linked into the processing function of the FPU

so that if the processing function stops, the toggle mechanism will stop as well. Watchdog-toggle represents a

variable that toggles its value between “0” and “1” within a specified time window. The maximum required cycle

time shall not exceed one minute. The Watchdog-toggle is used to realize a “life-beat monitoring function”.

9.4.2.2 The Watchdog-toggle is always required except

 in the case that the underlying communication system of the FPU and the FMCS already provides an integrated

life-beat function, or

 the FPU is a very simple device which does not provide any processing function (e.g., a valve, electrical engine