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SEMI E88-1104 E © SEMI 1999, 2004 13 8.5.4 Stocker Crane State Transition Table Table 4 Stocker Crane State Tran sition Table Transition # Previous State Trigger New State Actions Comments 1 IDLE Crane is requested to pe…

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Transition
#
Previous State Trigger New State Action Comments
15 None 1. Carrier created
directly on the crane
(as the result of
duplicate ID
recovery).
2. Transfer
Command received
from host with the
source being a port
with no SC
controlled sensors
(e.g.directly
connected process
equipment).
TRANSFERRING S6F11 Carrier-
Transferring
It is also
permissible to use
state transitions #1
and #2 for the
scenario in trigger
#2 especially when
the transfer
command is
queued. This
transition may not
be required in all
configurations.
16 TRANSFERRING Carrier has arrived at
an Output port and is
removed from the
stocker domain.
None S6F11
CarrierRemoved
This generally
occurs when
delivering directly
to process
equipment at a port
with no sensors
controlled by the
SC.
8.5 Stocker Crane State Model
8.5.1 Stocker Crane State Model Requirements
8.5.1.1 The purpose of the stocker crane state model is to provide information to the host for use of stocker crane
information and metric tracking (i.e., the Host will not control the stocker crane). If it is possible for the stocker to
continue operation while the stocker crane is not operational then the Stocker Crane State Model will retain its
current state and the SC State Model will be ALARM. When the stocker crane becomes operational again, the state
of the Stocker Crane State Model will transition to the new state. Whether it is possible to continue operation while
the stocker crane is not operational is specific to the stocker SEM equipment supplier. If a single stocker contains
multiple stocker cranes, each stocker crane must comply with the stocker crane state model. Compliance with the
stocker crane state model is only required for devices that contain a crane. The Host should not be dependent on any
events from the stocker crane state model.
8.5.2 Stocker Crane State Model
ACTIVEIDLE
1
2
Figure 6
Generic Stocker SEM Stocker Crane State Model Diagram
8.5.3 Stocker Crane State Definitions
8.5.3.1 IDLE — The stocker crane is not performing Host or SC initiated work.
8.5.3.2 ACTIVE — The stocker crane is busy performing Host or SC initiated work.
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8.5.4 Stocker Crane State Transition Table
Table 4 Stocker Crane State Transition Table
Transition # Previous State Trigger New State Actions Comments
1 IDLE Crane is requested to perform
host or SC initiated work.
ACTIVE
S6F11
CraneActive
2 ACTIVE
Crane completes host or SC
initiated work.
IDLE S6F11
CraneIdle
8.6 Port Transfer State Model
8.6.1 Port Transfer State Model Requirements
8.6.1.1 The purpose of the port state model is to provided information to the host for the use in accessing ports.
This may permit the host and stocker to utilize ports that are in service while avoiding the use of ports that are not in
service.
8.6.2 Port Transfer State Model
IN SERVICE
C
READY TO
LOAD
READY TO
UNLOAD
TRANSFER
BLOCKED
5
6
7
8
4
C
1
OUT OF
SERVICE
2 3
Figure 7
Port State Model Diagram
A-1.1.1.1
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8.6.3 Port Transfer State Definitions
8.6.3.1 OUT OF SERVICE — Transfer to/from this port is disabled and the port should not be used in any Transfer
command issued by the host. If the SC State is “Alarm” and the port cannot be accessed normally, the port transfer
state shall be “Out Of Service”. This includes situations where the “Alarm” may not be directly related to the port.
For example, the alarm may be associated with the crane and since the crane cannot function, the port cannot be
serviced normally. If any port on a multi-position conveyor with a single LP position is “Out Of Service”, then all
ports on the conveyor shall be “Out Of Service”. If a command is issued by the host which uses this port, it will not
be rejected simply because the port is in this state.
8.6.3.2 IN SERVICE — Transfer to/from this port is enabled.
8.6.3.3 The following are optional sub-states of the IN SERVICE state to provide information to the host for the
use in accessing ports. The information is generally obtained by the SC via a low-level interface with the connected
equipment (generally inline process tools). The connected equipment should generally, though not required, follow
the Load Port Transfer State Model defined in SEMI E87. If these states are implemented, they are not required
for every port.
8.6.3.3.1 TRANSFER BLOCKED — The state is neither READY TO LOAD nor READY TO UNLOAD.
8.6.3.3.2 READY TO LOAD — The port is able to accept (be loaded with) a carrier from the Stocker SEM
equipment.
8.6.3.3.3 READY TO UNLOAD — The port is able to have a carrier removed (unloaded) by the Stocker SEM
equipment.
8.6.3.4 Port Transfer State Transition Table
Table 5 Port Transfer State Transition Table
Transition # Previous State Trigger New State Action Comments
1 None System reset. OUT OF
SERVICE
Or
IN SERVICE
S6F11
PortOutOfService
Or
S6F11 PortInService
The new state is based
on the current status of
the port or the state
prior to system reset.
2 OUT OF
SERVICE
The equipment has
determined that the port can
be utilized for transfers.
IN SERVICE S6F11 PortInService
3 IN SERVICE The equipment has
determined that the port
should not be used for
transfers.
OUT OF
SERVICE
S6F11
PortOutOfService
This could be the result
of an alarm condition
that affects only the
port, the entire device,
or a portion of the
device which includes
the port.
4 None System Reset. TRANSFER
BLOCKED
READY TO
LOAD
READY TO
UNLOAD
S6F11
PortTransferBlocked
S6F11
PortReadyToLoad
S6F11
PortReadyToUnload
The new state is based
on the current status of
the port.
5 TRANSFER
BLOCKED
Port ready for carrier
delivery.
READY TO
LOAD
S6F11
PortReadyToLoad
6 TRANSFER
BLOCKED
Port ready for carrier
removal.
READY TO
UNLOAD
S6F11
PortReadyToUnload
7 READY TO
LOAD
No carrier transfer allowed. TRANSFER
BLOCKED
S6F11
PortTransferBlocked
8 READY TO
UNLOAD
No carrier transfer allowed. TRANSFER
BLOCKED
S6F11
PortTransferBlocked