semi合集-English.pdf - 第2334页

SEMI E82-0705 © SEMI 1999, 2005 30 STEP COMMENTS HOST TSC COMMENTS 30. <-S6,F11 Event Report Send (ERS) TransferCompleted . CommandName = “TRANSFER” . CommandID = “111111” . Priority = 5 . Replace = 0 . ResultCode = 0…

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SEMI E82-0705 © SEMI 1999, 2005 29
STEP COMMENTS HOST TSC COMMENTS
18. <-S6,F11 Event Report Send (ERS)
VehicleDeparted
. VehicleID = “CARXX”
. TransferPortList -
L,1
1. TransferPort =
“PORTXX”
19. Event Report Acknowledge
(ERA)
S6,F12->
20. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “CARXX”
. TransferPortList -
L,1
1. TransferPort =
“PORTYY”
21. Event Report Acknowledge
(ERA)
S6,F12->
22. <-S6,F11 Event Report Send (ERS)
VehicleDepositStarted
. VehicleID = “CARXX”
. TransferPort =
“PORTYY”
. CarrierID = “123456”
23. Event Report Acknowledge
(ERA)
S6,F12->
24. <-S6,F11 Event Report Send (ERS)
CarrierRemoved
. VehicleID = “CARXX”
. CarrierID = “123456”
. CarrierLoc = “LOC1”
25. Event Report Acknowledge
(ERA)
S6,F12->
26. <-S6,F11 Event Report Send (ERS)
VehicleDeposit-Completed
. VehicleID = “CARXX”
. TransferPort =
“PORTYY”
. CarrierID = “123456”
27. Event Report Acknowledge
(ERA)
S6,F12->
28. <-S6,F11 Event Report Send (ERS)
VehicleUnassigned
. VehicleID = “CARXX”
. CommandID = “111111”
29. Event Report Acknowledge
(ERA)
S6,F12->
SEMI E82-0705 © SEMI 1999, 2005 30
STEP COMMENTS HOST TSC COMMENTS
30. <-S6,F11 Event Report Send (ERS)
TransferCompleted
. CommandName =
“TRANSFER”
. CommandID = “111111”
. Priority = 5
. Replace = 0
. ResultCode = 0
. CarrierLoc = “PORTYY”
. TransferInfo
1
- L,3
1. CarrierID = “123456”
2. SourcePort = “PORTXX”
3. DestPort = “PORTYY”
31. Event Report Acknowledge
(ERA)
S6,F12->
12.2.2 Simultaneous Multiple Carrier Transfer — Transfer Unit Size is Equal to 2 Carriers
12.2.2.1 Two carriers are transported from 2 source ports (e.g., L-Shaped stocker output ports) to 2 destination ports
(e.g., process equipment ports). The transport vehicle is capable of acquiring and depositing 2 carriers at the same
time (e.g., forking type vehicle). It is assumed that the source and destination ports must be the same equipment.
STEP COMMENTS HOST TSC COMMENTS
1. Both carriers are prepared
for a TRANSFER command at
the source ports.
2. Enhanced Remote Command
(ERC)
. TRANSFER
. COMMANDID = “111111”
. PRIORITY = 5
. REPLACE = 0
. TRANSFERINFO
1
– L,3
1. CARRIERID = “123456”
2. SOURCEPORT = “PORTX1”
3. DESTPORT = “PORTY1”
. TRANSFERINFO
2
– L,3
4. CARRIERID = “654321”
5. SOURCEPORT = “PORTX2”
6. DESTPORT = “PORTY2”
S2,F49->
3. <-S2,F50 Enhanced Remote Command
Acknowledge (ERCA)
4. <-S6,F11 Event Report Send (ERS)
TransferInitiated
. CommandID = “111111”
5. Event Report Acknowledge
(ERA)
S6,F12->
6. <-S6,F11 Event Report Send (ERS)
VehicleAssigned
. VehicleID = “AGVXX”
. CommandID = “111111”
7. Event Report Acknowledge
(ERA)
S6,F12->
SEMI E82-0705 © SEMI 1999, 2005 31
STEP COMMENTS HOST TSC COMMENTS
8. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “AGVXX”
. TransferPortList – L,2
1. TransferPort
1
=
“PORTX1”
2. TransferPort
2
=
“PORTX2”
9. Event Report Acknowledge
(ERA)
S6,F12->
10. <-S6,F11 Event Report Send (ERS)
Transferring
. CommandID = “111111”
11. Event Report Acknowledge
(ERA)
S6,F12->
12. <-S6,F11 Event Report Send (ERS)
VehicleAcquireStarted
. VehicleID = “AGVXX”
13. Event Report Acknowledge
(ERA)
S6,F12->
14. <-S6,F11 Event Report Send (ERS)
CarrierInstalled
. VehicleID = “AGVXX”
. CarrierID = “123456”
. CarrierLoc = “LOC1”
15. Event Report Acknowledge
(ERA)
S6,F12->
16. <-S6,F11 Event Report Send (ERS)
CarrierInstalled
. VehicleID = “AGVXX”
. CarrierID = “654321”
. CarrierLoc = “LOC2”
17. Event Report Acknowledge
(ERA)
S6,F12->
18. <-S6,F11 Event Report Send (ERS)
VehicleAcquireCompleted
. VehicleID = “AGVXX”
19. Event Report Acknowledge
(ERA)
S6,F12->
20. <-S6,F11 Event Report Send (ERS)
VehicleDeparted
. VehicleID = “AGVXX”
. TransferPortList – L,2
1. TransferPort
1
=
“PORTX1”
2. TransferPort
2
=
“PORTX2”
21. Event Report Acknowledge
(ERA)
S6,F12->
22. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “AGVXX”
. TransferPortList – L,2
1. TransferPort
1
=
“PORTY1”
2. TransferPort
2
=
“PORTY2”