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SEMI E54.##-0705 © SEMI 2005 11 Information Value := Attribute Value Status := Res ponse Information NOTE 9: The item of Information Name ID for the response message is optional (conditiona l) information. Representation…

SEMI E54.##-0705 © SEMI 2005 10
7.6.2.1.3 Get_Attribute Protocol
7.6.2.1.3.1 The Service Request message for the Get-Attribute is sent to a device using reading capability for
following service functions of A-LINK: Unite Inventory service, Unite State service, Data Exchange service or DP
Facility service. Using service function is dependent on attribute and object class as well. The dependency is given
by Object Service Identifier tables in following subsections of ¶7.6.
7.6.2.1.3.2 The service request message with Unite Inventory service function of A-LINK has an information item.
Information items for the request and its response are given below respectively:
(Request)
Location := Object ID :optional
Data Name ID := Attribute ID
(Response)
Location := Object ID :optional
Data Name ID := Attribute ID
Data Value := Attribute Value
Status := Response Information
NOTE 6: The item of Data Name ID for the response message is optional (conditional) information. Representation of the Status
information is implementation specific. The Response Information is dependent on attribute and/or device. However if the first
item of the response information, i.e. Response Code, is zero, it always means successful. Additional data may follow.
7.6.2.1.3.3 The service request message with Unite State service function of A-LINK has an information item.
Information items for the request and its response are given below respectively:
(Request)
Top State Name ID := Object ID
(Response)
Top State Name ID := Object ID
Data Value := Attribute Value
Status := Response Information
NOTE 7: The item of Top State Name ID for the response message is optional (conditional) information. Representation of the
Status information is implementation specific. The Response Information is dependent on attribute and/or device. However if the
first item of the response information, i.e. Response Code, is zero, it always means successful. Additional data may follow.
7.6.2.1.3.4 The service request message with Data Exchange service function of A-LINK has a couple of
information items. Information items for the request and its response are given below respectively:
(Request)
Location := Object ID
Data Name ID := Attribute ID
(Response)
Location := Object ID
Data Name ID := Attribute ID
Data Value := Attribute Value
Status := Response Information
NOTE 8: The items of Location and Data Name ID for the response message are optional (conditional) information.
Representation of the Status information is implementation specific. The Response Information is dependent on attribute and/or
class. However if the first item of the response information, i.e. Response Code, is zero, it always means successful. Additional
data may follow.
7.6.2.1.3.5 The service request message with DP Facility service function of A-LINK has an information item.
Information items for the request and its response are given below respectively:
(Request)
Information Name ID := Attribute ID
(Response)
Information Name ID := Attribute ID

SEMI E54.##-0705 © SEMI 2005 11
Information Value := Attribute Value
Status := Response Information
NOTE 9: The item of Information Name ID for the response message is optional (conditional) information. Representation of
the Status information is implementation specific. The Response Information is dependent on attribute and/or device. However if
the first item of the response information, i.e. Response Code, is zero, it always means successful. Additional data may follow.
7.6.2.2 Service Identifiers — The A-LINK services are mapped for CDM as following tables.
7.6.2.2.1 Device Manager (DM) Object –– Services of the DM object are mapped as shown in Table 10.
Table 10 DM Object Service Identifiers for A-LINK
Service ID
CDM A-LINK
Service Name Alternative Instruction
DmS1 1 Reset Directive
DmS2 2 Abort Directive
DmS3 3 Recover Directive
DmS4 4 GetAttribute Unite Inventory / Unite States
DmS5 5 SetAttribute Unite Inventory
DmS6 6 Execute Directive
DmS7 7 PerformDiagnostics Directive
DmS8 8 PublishAttribute Directive
DmS9 9 Lock Directive
DmS10 10 Unlock Directive
DmS11 11 Get Exception Queue Directive
DmA12 12 Clear Exception Queue Directive
7.6.2.2.2 Sensor Actuator Controller (SAC) Object –– Services of the SAC object are mapped as shown in Table 11.
Table 11 SAC Object Service Identifiers for A-LINK
Service ID
CDM A-LINK
Service Name Alternative Instruction
SacS1 1 Reset Directive
SacS2 2 Abort Directive
SacS3 3 Recover Directive
SacS4 4 GetAttribute Unite Inventory / Unite States
SacS5 5 SetAttribute Unite Inventory
SacS6 6 Operate Directive
SacS7 7 Restore Default Directive
SacS8 8 Publish Attribute Directive
7.6.2.2.3 Active Element (AE) Object –– Services of the AE object are mapped as shown in Table 12.
7.6.2.2.3.1 Because AE class is inherited to any sensor, actuator or controller objects such as Sensor-AI and
Actuator-BO, these services are equipped by such objects.
Table 12 AE Object Service Identifiers for A-LINK
Service ID
CDM A-LINK
Service Name Alternative Instruction
nS1 1 Reset Directive
nS2 2 Abort Directive
nS3 3 Recover Directive
nS4 4 Operate Directive
nS5 5 GetAttribute Data Exchange

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Service ID
CDM A-LINK
Service Name Alternative Instruction
nS6 6 SetAttribute Data Exchange
nS7 7 Restore Default Directive
#1
Prefix n in CDM service ID represents one of Sai, Sei, Sbi, Sbith, Aao, Aeo, Abo and C.
8 Protocol Compliance
8.1 A method to testing protocol compliance is required to verify implementation conformance to this standard. A-
LINK User Forum (AUF) has established a qualified certification mechanism of conformance testing and
interoperability testing. The first laboratory is constituted in Japan. A-LINK conformance test information can be
found at http://www.a-linkuf.com.
9 Specific Device Model Mappings
9.1 Every type of device must have an identifier number. Vendors must apply for an identifier number from the A-
LINK User Organization for every Device Type.
9.1.1 The Device Profile must specify the identifiers for Objects, Attributes and Services for CDM and SDM
components, including data formats and bit mappings for specified parameters, as represented in this document.
9.1.2 The following sections specify mappings for Sensor Actuator Network Specific Device Models.
9.2 Mass Flow Device
9.2.1 MFD Device
Reference SEMI E54.3 for a complete specification of the SDM for Mass Flow Devices.
Accordingly, the following mapping rules apply to the identification tags for the Objects, Attributes and Services of
this model.
9.2.2 Objects
Consistent with SEMI E54.3 and ¶7.4 above, the DM and SAC objects are identified as Object
9.2.2.1 Mapping
Table 13 shows the mapping of the SDM Object specified in SEMI E54.3.
Table 13 MFD Object Identifiers
SDM Object Name SDM Object ID ID Instance
Device Manager (DM) MFD1 1 1
Sensor Actuator Contriller (SAC) MFD2 2 1
Sensor-AI-MF MFD3 34 1 or supplier specific
Sensor-AI-AT MFD4 35 0 / 0 or supplier specific
Assembly-MFM MFD5 32 0 or 1
Sensor-AI-Aux MFD6 36 0 / 0 or supplier specific
Actuator-AO-MF MFD7 37 0 / 1 or supplier specific
Controller MFD8 24 0 / 1
Local Link MFD9 4 0 / 2 or supplier specific
SISO MFD10 38 0 / 0 or supplier specific
SISO-Setpoint MFD11 39 0 / 0 or supplier specific
Assembly-MFC MFD12 33 0 / 0 or supplier specific
#1
/ = numbers for MFM / MFC
9.2.3 Attributes and Services
9.2.3.1 Attributes
The mapping of Attribute tags and Identifiers is defined in ¶7.5.3.2 for the CDM. Basically the
same definitions are applied for attributes in the Mass Flow Device SDM.
9.2.3.2 Services
The mapping of Service tags and Identifiers is defined in ¶7.6.2.2 for the CDM. Basically the
same definitions are applied for attributes in the Mass Flow Device SDM.