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SEMI E73-0301 © SEMI 1998 , 2001 5 DC Vol tage DC Vol tage Tool DRP (+) (-) (+) (-) DRP Tool b ) a ) Figure 4 Schematic Exa mple of DRP Input Signals
SEMI E73-0301 © SEMI 1998, 2001 4
Table 5 Control Signal Connector (pump side)
No. Items Connector Type Referenced Standard Pin Assignments Remarks
1
Control and running
status signals
15 pin
D sub-miniature
Female receptacle
See Table 6 and
Figure 3
See Related Documents for an
example of the specifications
for this connector type.
Table 6 Pin Assignment for Control Signal Connector
No. Pin No. Signal item (polarity) Remarks
1 1 DRP start input ( + )
2 2 (MBP start input) ( + ) An upper pump, such as mechanical booster pump (MBP), to be used with
dry pump systems.
3 3 DRP start/stop status ( + )
4 4 (MBP start/stop status) ( + ) An upper pump, such as mechanical booster pump (MBP), to be used with
dry pump systems.
5 5 Warning status ( + )
6 6 Alarm status ( + )
7 7 Remote/Local status ( + )
88
9 9 DRP start input ( - )
10 10 (MBP start input) ( - ) An upper pump, such as mechanical booster pump (MBP), to be used with
dry pump systems.
11 11 DRP start/stop status ( - )
12 12 (MBP start/stop status) ( - ) An upper pump, such as mechanical booster pump (MBP), to be used with
dry pump systems.
13 13 Warning status ( - )
14 14 Alarm status ( - )
15 15 Remote/Local status ( - )
16 -
MAX. 45.1 mm
MAX. 18.0 mm
Screw lock size : M2.6
Contact pin surface : Au
8
1
9
15
Figure 3
15 pin D Sub-Miniature Female Receptacle
SEMI E73-0301 © SEMI 1998, 20015
DC Voltage
DC Voltage
ToolDRP
(+)
(-)
(+)
(-)
DRP Tool
b
)
a
)
Figure 4
Schematic Example of DRP Input Signals
SEMI E73-0301 © SEMI 1998, 2001 6
ToolDRP
DC Voltage
DC Voltage
DC Voltage
(+)
(-)
(+)
(-)
(+)
(-)
a
)
ToolDRP
ToolDRP
b
)
c
)
Figure 5
Schematic Example of DRP Output Signals
6.3 Incoming Power Supply
6.3.1 Tables 7 and 8 specify the required DRP incoming AC power supply connector and pin assignments.
Table 7 Incoming AC Power Supply Connector (Pump Side)
No. Items Connector Type Referenced Standard Pin Assignments Remarks
1 Three phase:
200V
AC
− 230V
AC
± 10%
50/60 Hz
Receptacle (male) SEMI S2 See Table 8