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SEMI D34-0703 © SEMI 2003 4 NOTICE: SEMI makes no warranties or representations as to the suitability o f the standards set forth herein for any particular application. The determination of the suitability o f the standa…

SEMI D34-0703 © SEMI 2003 3

5.5.3.2 Measurement Conditions

5.5.3.2.1 Equipment: Spectrophotometer

5.5.3.2.2 Measurement Wavelength: 400–700 nm

(10 nm intervals)

5.5.4 Definition and Measurement Method for

Transmittance of each Wavelength

5.5.4.1 Measured value of 1 polarizing film at specific

wavelengths (440 nm, 550 nm, 610 nm)

5.5.4.2 Measurement Conditions

5.5.4.2.1 Equipment: Spectrophotometer

5.5.4.2.2 Measurement Wavelength: 440 nm, 550 nm,

610 nm

5.5.5 Definition and Measurement Method of UV Cut

Performance

5.5.5.1 Transmittance of 1 polarizing film, measured at

380 nm, is defined as UV cut performance.

5.5.5.2 Measurement Conditions

5.5.5.2.1 Equipment: Spectrophotometer

5.5.5.2.2 Measurement Wavelength: 380 nm

5.5.6 Definition and Measurement Method of

Polarization Efficiency (Py)

5.5.6.1 Expressed using the following formula, where

is transmittance (visibility corrected) on the

absorption axis, and T

is transmittance (visibility

corrected) on the transmittance axis.

−

×100 (%)

5.5.6.2 The same value from the above equation can

also be calculated using the below equation, where T

is parallel transmittance and T

⊥

is cross transmittance.

⊥

−

×100 (%)

5.5.6.3 Measurement Conditions

5.5.6.3.1 Equipment: Spectrophotometer

5.5.6.3.2 Measurement Wavelength: 400–700 nm

(10 nm intervals)

5.5.7 Definition and Measurement Method for Hue a*,

5.5.7.1 Polarizing film transmittance value calculated

in accordance with JIS Z8729.

5.5.7.2 Measurement Conditions

5.5.7.2.1 Equipment: Spectrophotometer

5.5.7.2.2 Measurement Wavelength: 400~700 nm (10

nm intervals)

5.5.8 Definition and Measurement Method for Hue a, b

5.5.8.1 Visibility corrected (JIS Z8701) value by

supplementary standard illuminant C (JIS Z8720), 2°

range of view, calculated using the tristimulus values

(X, Y, Z) from the below formula.

(

)

YX02.15.17

−

(

)

Z847.0Y0.7

−

5.5.8.2 Measurement Conditions

5.5.8.2.1 Equipment: Spectrophotometer

5.5.8.2.2 Measurement Wavelength: 400–700 nm

(10 nm intervals)

5.5.9 Definition and Measurement Method for Haze

5.5.9.1 Scattered transmittance and all line

transmittance, measured using integrated sphere light

transmittance measurement equipment, expressed as a

ratio.

H =

×100 (%)

: Scattered Transmittance（%）

: All line transmittance（%）

To be measured in accordance with JIS K7105.

6 Equipment

6.1 Spectrophotometer with the below performance

shall be used.

6.1.1 Optical Wavelength: Sub 10 nm analysis

capability, adjustable between 380–780 mm.

7 Equipment Calibration

7.1 Equipment shall be calibrated in accordance with

the manufacturer’s manual.

7.2 When, due to calibration, there is a change in the

equipment’s performance, for example, linearity, phase

deviation, etc., a record shall be kept.

8 Related Document

8.1 Measurement Method for Optical Characteristics of

Polarizing Films Using Crystal Rotation Method

SEMI D34-0703 © SEMI 2003 4

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer's instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

RELATED INFORMATION 1

MEASUREMENT METHOD FOR OPTICAL CHARACTERISTICS OF

POLARIZING FILMS USING CRYSTAL ROTATION METHOD

NOTICE: This related information is not an official part of SEMI D34 and was derived from Otsuka Electronics

Co., Ltd. This related information was approved for publication by full letter ballot procedures.

R1-1 Outline

R1-1.1 This method is not to use two polarizing film in normal, but to use polarizing prism and one polarizing film,

which can be used for measurement of Single transmittance (Ty), Parallel transmittance (T

), Cross transmittance

⊥

), Transmittance of each wavelength, UV cut performance, Polarizing Efficiency (Py) and Hue a, b.

R1-1.2 Equipments are shown below. Measurement condition is same as standard method.

R1-2 Measurement Equipment

Light Source Lens Polarizing prism Polarizing film Spectrophotometer

R1-3 Formula

R1-3.1 K

(λ) is measured on condition of polarizing prism and polarizing film placed perpendicularly and K

(λ) is

measured on condition of polarizing prism and polarizing film placed parallel, where K

(λ) is transmittance light on

the absorption axis and K

(λ) is transmittance light on the transmittance axis.

(λ) = S

(λ) / R

(λ)

(λ) =S

⊥

(λ) / R

⊥

(λ)

(λ): Light intensity of transmittance on condition of polarizing film and polarizing prism placed parallel with

polarizing film.

(λ): Light intensity of transmittance without polarizing film on same condition of S

(λ).

⊥

(λ): Light intensity of transmittance on condition of polarizing film and polarizing prism placed perpendicularly

with polarizing film.

⊥

(λ): Light intensity of transmittance without polarizing film on same condition of S

⊥

(λ).

R1-3.2 Definition for Single Transmittance (Ty)

Single transmittance light Ts(λ):

Single transmittance Ty: Value of Ts(λ) visibility corrected (JIS Z8701).

)(K)(K

)(

λλ

=Ts