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SEMI E95-1101 © SEMI 2000 , 2001 2 5.2 Basic Display Objects Description 5.2.1 T his section s pecifies the general appearance an d behavi or of basic display obj ects us ed throughout the interface, i ncluding buttons, …
SEMI E95-1101 © SEMI 2000, 20011
SEMI E95-1101
SPECIFICATION FOR HUMAN INTERFACE FOR SEMICONDUCTOR
MANUFACTURING EQUIPMENT
This specification was technically approved by the Global Information and Control Committee and is the
direct responsibility of the North American Information and Control Committee. Current edition approved
by the North American Regional Standards Committee on August 27, 2001. Initially available at
www.semi.org September 2001; to be published November 2001. Originally published February 2000.
1 Purpose
1.1 This standard addresses the area of processing
content with the direct intention of developing common
software standards, so that problems involving operator
training, operation specifications, and efficient develop-
ment can be resolved more easily.
1.2 This standard is written to be “tool-neutral” without
reference to, or reliance on, specific capabilities of
platforms or operating systems. Neither is it intended
that choices of software tools or detailed implement-
ation strategies be dictated.
1.3 Note that all figures in this standard are schematic,
are not drawn to scale, and unless otherwise specified,
are not intended to provide implementation details
about number of buttons, button sizes, panel sizes, etc.
2 Scope
2.1 This standard specification applies to
manufacturing equipment used in the production of
semiconductors.
2.2 This standard may be applicable to other areas such
as the manufacture of flat panel displays, but specific
application to these areas is outside the scope of this
document.
2.3 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Referenced Standards
None.
4 Terminology
4.1 condition — a property of a displayed object or
value (textual or numeric) that visually indicates, if
applicable, whether the current state of an object or the
current value violates the defined bounds of normal
operational states or parameters, whether that violation
is categorized as a minor exception (a caution) or a
severe exception (an alarm), and provides no visual
indication if no exception has occurred.
4.2 display objects — user interface elements
displayed on the screen, such as function selection
buttons, keyboard input buttons, graphics representing
the equipment, etc.
4.3 functional area — a grouping of one or more views
presenting information and control capabilities to the
user.
4.4 icon — an icon (diagrammatic image) is a bitmap
or other image used in GUI environments such as
windowing systems to show different types of objects,
improve operability, and help the user better understand
the functionality underlying buttons.
4.5 navigation model — the navigation model
determines how a user interacts with a system to access
functionality and information.
4.6 salience — a salience is a solid (or textured),
colored border shown around a display object to
indicate an alarm, caution, or other condition, or to
draw the user’s attention to the display object.
5 Requirements
5.1 Each of the following sections is designated with
one of the following labels:
5.1.1 Sections designated:
Description
provide background information and set
the context for subsequent specifica-
tions;
Mandatory provide a specification of a requirement
which shall both be present and imple-
mented as specified;
Conditional
provide a specification of a requirement
which shall be implemented as specified
if such a feature is implemented on the
tool;
Recommended
provide a recommended capability and
implementation of that capability, but
neither their presence nor their imple-
mentation is required.
SEMI E95-1101 © SEMI 2000, 2001 2
5.2 Basic Display Objects Description
5.2.1 This section specifies the general appearance and
behavior of basic display objects used throughout the
interface, including buttons, saliences, and dialog
boxes. It is intended that the use of other types of
display objects (choose lists, data display and data entry
fields, scroll-bars, etc.) is specifically allowed, and their
use is at the discretion of the implementers.
5.2.1.1 There are two types of display objects;
selectable and non-selectable. Some are selectable by
the user to initiate or execute an action. Non-selectable
graphics and user interface elements (such as pipes and
text field labels, respectively) are read only, and no
action is initiated or executed.
5.2.2 Buttons
5.2.2.1 Button Size Mandatory
5.2.2.1.1 When a touchscreen device is used, button
sizes must be large enough to ensure selection on the
targeted display.
5.2.2.2 Button Dimensions Recommended
5.2.2.2.1 It is recommended that buttons shall have a
minimum dimension of approximately 1.5 cm on the
shortest side. If a smaller size is used, the space
between buttons must be increased to avoid selection
errors. For installations where a keyboard and a mouse,
light pen or other pointing device is available, button
sizes in the navigation panel and the command panel
may be made somewhat smaller (approximately 1–1.25
cm), and the size of the information panel increased
proportionally.
5.2.2.3 Button Behavior Mandatory
5.2.2.3.1 One type of button behavior is momentary;
that is, user selection of a button causes a brief display
of the down (selected) state of the button, followed
immediately by a display of the up (unselected) state.
The other button behavior is two-state; the button
remains in the down state after user selection. User re-
selection of the button, and/or selection of another
button, and/or selection of another display object
restores the display of the up state. In some cases, the
software will control the display of the down state or
restore the up state, without direct user interaction.
5.2.2.3.2 For 2-D buttons, the down state shall be
indicated by hatching, cross-hatching, or otherwise
texturing the button in such a manner that does not
obscure the button label.
5.2.2.4 Button Text Mandatory
5.2.2.4.1 Text for all button labels shall have the first
letter of words capitalized unless it is an article or pre-
position not occurring at the beginning or end of the
label, or unless the word’s conventional usage is not
capitalized. Button labels that are all capital letters are
harder to read than mixed case labels. Additionally, text
in all capitals appears larger, and the user may attach
more importance to the button than necessary simply
because the label is visually distracting.
5.2.3 Saliences Conditional
5.2.3.1 Saliences, colored, textured, or both shall be
displayed around buttons and other display objects to
indicate their condition, which may include caution,
alarm, user attention required or requested, processing,
unfinished task notification, and other conditions.
5.2.3.2 A salience is displayed to draw the user’s
attention to a display object when its condition is not
normal or OK (in this case, the absence of a displayed
salience shall indicate a normal or OK condition), or
when the salience provides information that benefits the
user in the performance of tasks or the monitoring of
equipment functions and operations.
5.2.3.3 A salience shall not hide the display object it
surrounds. Saliences shall not be used to indicate the
state (open, closed, on, off, etc.) of display objects.
5.2.3.4 On color displays, alarm saliences shall appear
bright red, caution saliences shall appear bright yellow,
and processing and unfinished task saliences shall
appear medium blue. User attention required or
requested saliences, (for example, “Ready to Load,” or
“Ready to Unload”) shall appear medium green.
5.2.4 Dialog Boxes Description
5.2.4.1 Dialog boxes are secondary windows used to
display supplemental information, solicit information
from the user, or report errors.
5.2.4.2 Dialog boxes are used to provide additional
information to the user; to display detailed information
not shown on the information panel for controlling the
system, and to display detailed information for
monitoring system operation.
5.2.5 Dialog Boxes Mandatory
5.2.5.1 Dialog boxes (which are always temporary) are
displayed in response to some action initiated by the
user. When displayed, a dialog box shall overlay a
portion of the information panel, and shall not obscure
the title panel. If invoked by user selection of a display
object on the information or command panels, all the
display objects on those two panels shall be disabled
until the dialog box is dismissed. The title and
navigation panels remain enabled. At the explicit
request of the user, the dialog box is dismissed, and the
underlying information is refreshed.
SEMI E95-1101 © SEMI 2000, 20013
5.2.5.2 Dialog boxes contain a title bar at the top, a
display (free use) area, and one or more dialog box
window control buttons arranged horizontally at the
bottom. The title bar text reflects the command or the
nature of the event that invoked the dialog box. Dialog
box window control buttons are centered on the width
of the dialog box, with any other buttons (Apply, Log-
out, etc.) right-aligned and visually separated from the
window control buttons. If the underlying operating
system will not allow this alignment, then it is allowed
that other alignments may be used, but only if the align-
ment is consistent across all dialog boxes.
5.2.5.2.1 User selection of a dialog box control button
controls the dismissal of the dialog box and, when
applicable, controls whether the user accepts or rejects
information or choices displayed, or desires no action
be performed.
5.2.5.2.1.1 An “OK” dialog box control button, when
selected by the user, indicates acceptance of any
choices or user inputs made, if any, and causes the
dismissal of the dialog box. If no choices or user inputs
were made, selecting this button indicates acceptance of
any default values displayed. If user choices or inputs
are required, this button shall be disabled until the
choices or inputs are made.
5.2.5.2.1.2 A “Cancel” dialog box control button, when
selected by the user, indicates no action should be
taken, causes the dismissal of the dialog box, and
returns the user to the state that existed prior to the
invocation of the dialog box.
5.2.5.2.1.3 A “Yes” dialog box control button is
displayed when the dialog box message is in the form
of a question. User selection indicates a positive
response to the question asked and causes the dismissal
of the dialog box.
5.2.5.2.1.4 A “No” dialog box control button is
displayed when the dialog box message is in the form
of a question. User selection indicates no action should
be taken, causes the dismissal of the dialog box, and
returns the user to the state that existed prior to the
invocation of the dialog box.
5.2.5.2.1.5 A “Close” dialog box control button is
displayed (often as the only dialog box control button)
when the dialog box message contains only information
and does not require the user to make or accept choices,
and shall be used instead of an “OK” dialog box control
button in this case. The “Close” dialog box control
button shall also be used instead of a “Cancel” dialog
box control button when the user cannot be returned to
the state that existed prior to the invocation of the
dialog box. User selection indicates no action should be
taken and causes the dismissal of the dialog box.
5.2.5.2.1.6 An “Apply” dialog box control button,
when selected by the user, indicates acceptance of any
choices or user inputs made, if any, but does not
dismiss the dialog box. This button shall be disabled
until one or more user choices or inputs are made. After
user selection of this button, it shall be disabled until
additional choices or user inputs are made, if any.
5.2.5.3 Dialog boxes may not be resized or moved, but
may display a button equivalent to the Cancel button in
the title bar.
Dialog Title
Display (Free Use) Area
Dialog Window Control Buttons (OK, Cancel, etc.)
Figure 1
Dialog Box
5.2.5.4 Dialog boxes are classified into the following
three types:
• Information dialog box
• Data input/selection dialog box
• Message dialog box
5.2.5.5 To be compliant with this specification, at least
one of these dialog box types shall be supported.
5.2.6 Information Dialog Box Conditional
5.2.6.1 This dialog box type is used to provide addi-
tional information to the user about some display object
or topic addressed by the information panel. User
selection of a display object on the information panel
invokes an information dialog box, if appropriate for
the display object selected. The window control button
to dismiss the dialog box shall be the Close button. Use
of an OK button in this case is not allowed.
5.2.6.2 Implementation of this dialog box type shall be
conditional on the equipment having the capability of
providing the required information.