semi合集-English.pdf - 第1268页
SEMI E5-1104 © SEMI 1982, 2004 210 Stream,Function Name (Mnemonic) Direction S15,F25 Recipe Para meter Update Request M,H<->E,reply Description This message is used to update th e variable parameter definitions for…
SEMI E5-1104 © SEMI 1982, 2004 209
Stream,Function Name (Mnemonic) Direction
S15,F24 Recipe Descriptor Data M,H<->E
Description
This message returns the requested descriptors in the same order as requested.
Structure
L,2
1. L,n (n = number of recipes from request)
1. L,a (descriptors for recipe #1)
1. L,r (r = 0 or 3) (1st component descriptor)
1. <RCPDESCNM
11
>
2. <RCPDESCTIME
11
>
3. <RCPDESCLTH
11
>
.
.
a. L,r (r = 0 or 3)
1. <RCPDESCNM
1a
>
2. <RCPDESCTIME
1a
>
3. <RCPDESCLTH
1a
>
.
.
n. L,b (descriptors for recipe #n)
1. L,r (r = 0 or 3) (1st component descriptor)
1. <RCPDESCNM
n1
>
2. <RCPDESCTIME
n1
>
3. <RCPDESCLTH
n1
>
.
.
b. L,r (r = 0 or 3)
1. <RCPDESCNM
nb
>
2. <RCPDESCTIME
nb
>
3. <RCPDESCLTH
nb
>
2. L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
A zero-length recipe descriptor (r = 0) means that the specified recipe does not exist (could not be located). p = 0 if and only if
RMACK indicates no errors.
SEMI E5-1104 © SEMI 1982, 2004 210
Stream,Function Name (Mnemonic) Direction
S15,F25 Recipe Parameter Update Request M,H<->E,reply
Description
This message is used to update the variable parameter definitions for a specific agent. If multi-block, it must be preceded by the
S15,F1/F2 inquire/grant transaction.
Structure
L,4
1. <DATAID>
2. <RMNSSPEC>
3. <AGENT>
4. L,n
1. L,3
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
3. <RCPPARRULE
1
>
.
.
n. L,3
1. <RCPPARNM
n
>
2. <RCPPARVAL
n
>
3. <RCPPARRULE
n
>
Exception
None
Stream,Function Name (Mnemonic) Direction
S15,F26 Recipe Parameter Update Acknowledge M, H<->E
Description
This message indicates the successful performance of the request or otherwise indicates the nature of error(s) that occurred.
Structure
L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
p = 0 if and only if RMACK indicates no errors.
SEMI E5-1104 © SEMI 1982, 2004 211
Stream,Function Name (Mnemonic) Direction
S15,F27 Recipe Download Request M,H->E,reply
Description
This message is used to send a recipe to a recipe executor. If multi-block, it shall be preceded by the S15,F1/S15,F2
inquire/grant transaction.
Structure
L,5
1. <DATAID>
2. <RCPOWCODE>
3. <RCPSPEC>
4. L,m
1. L,2
1. <RCPATTRID
1
>
2. <RCPATTRDATA
1
>
.
.
m. L,2
1. <RCPATTRID
m
>
2. <RCPATTRDATA
m
>
5. <RCPBODY>
Exception
None
Stream,Function Name (Mnemonic) Direction
S15,F28 Recipe Download Acknowledge M,H<-E
Description
This message is used to acknowledge that a recipe has been received by the recipe executor. If the recipe was successfully
verified, the results are returned to the sender. RCPID contains the identifier of a derived object form recipe if created during
verification.
Structure
L,3
1. <RCPID>
2. L,n (n = # of attributes)
1. L,2
1. <RCPATTRID
1
>
2. <RCPATTRDATA
1
>
.
.
n. L,2
1. <RCPATTRID
n
>
2. <RCPATTRDATA
n
>
3. L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
If item is a zero length item, no derived object form recipe was originated. n = 0 if and only if the recipe was not verified or
failed verification. p = 0 if and only if RMACK indicates no errors.