semi合集-English.pdf - 第401页
SEMI E52-0703 © SEMI 1995, 2003 37 MIXED GAS NAME SYMBOL CODE 134A)/44% PENTAFLUOROETHANE (FREON -125)/ ETHANE,1,1,1- TRIFLUORO-(HFC-143a) 30% PROPANE/BUTANE 30% C3H8/C4H10 0885 .01% PHOSPHINE/ARGON .01% PH3/Ar 0886 .1% …
SEMI E52-0703 © SEMI 1995, 2003 36
MIXED GAS NAME SYMBOL CODE
33.3%HYDROGEN/CARBON MONOXIDE 33.3%H2/CO 0840
35%PHOSPHINE/SILANE 35%PH3/SiH4 0841
4%SILANE/NITROGEN 4%SiH4/N2 0842
5%AMMONIA/NITROGEN 5%NH3/N2 0843
5%CARBON MONOXIDE/ARGON 5%CO/Ar 0844
5%ETHENE/NITROGEN 5%C2H4/N2 0845
5%HELIUM/ARGON 5%He/Ar 0846
5%SILANE/HYDROGEN 5%SiH4/H2 0847
50%CARBON DIOXIDE/NITROGEN 50%CO2/N2 0848
50%HELIUM/ARGON 50%He/Ar 0849
50%HYDROGEN/NITROGEN 50%H2/N2 0850
50%NITROGEN DIOXIDE/AMMONIA 50%NO2/NH3 0851
50%NITROGEN/HELIUM 50%N2/He 0852
50%SULFUR DIOXIDE/NITRIC OXIDE 50%SO2/NO 0853
6%CARBON DIOXIDE/NITROGEN 6%CO2/N2 0854
6%HYDROGEN CHLORIDE/OXYGEN 6%HCl/O2 0855
6%HYDROGEN/NITROGEN 6%H2/N2 0856
6%OZONE/OXYGEN 6%O3/O2 0857
6.5%DIBORANE/NITROGEN 6.5%B2H6/N2 0858
7%HYDROGEN/ARGON 7%H2/Ar 0859
8%DIBORANE/ARGON 8%B2H6/Ar 0860
8%DIBORANE/NITROGEN 8%B2H6/N2 0861
5%CARBON MONOXIDE/NITROGEN 5%CO/N2 0862
2%OXYGEN/ARGON 2%O2/Ar 0863
15%SILANE/HELIUM 15%SiH4/He 0864
5%CARBON DIOXIDE/5%OXYGEN/NITROGEN 5%CO2/5%O2/N2 0865
2.5%OXYGEN/5%CARBON DIOXIDE/NITROGEN 2.5%O2/5%CO2/N2 0866
5%CARBON DIOXIDE/10%OXYGEN/NITROGEN 5%CO2/10%O2/N2 0867
11%OZONE/OXYGEN 11%O3/O2 0868
20%OZONE/OXYGEN 20%O3/O2 0869
3%SILANE/HYDROGEN 3%SiH4/H2 0870
1%NITROGEN/HYDROGEN 1%N2/H2 0871
3%PROPANE/HYDROGEN 3%C3H8/H2 0872
1.65%ACETYLENE/70%ETHYLENE/NITROGEN 1.65%C2H2/70%C2H4/N2 0873
30%TRIMETHYLSILANE/HYDROGEN 30%(CH3)3SiH/H2 0874
20%OXYGEN/ARGON 20%O2/Ar 0875
5%DIBORANE/5%SILANE/NITROGEN 5%B2H6/5%SiH4/N2 0876
30%TRICHLOROSILANE/HYDROGEN 30%SiHCl3/H2 0877
3%ETHYLENE/HELIUM 3%C2H4/He 0878
.1%HYDROGEN/.25%CARBON MONOXIDE/1%OXYGEN/NITROGEN .1%H2/.25%CO/1%O2/N2 0879
20%NITROGEN/HYDROGEN 20%N2/H2 0880
10%DIBORANE/ARGON 10%B2H6/Ar 0881
21.6%CARBON DIOXIDE/32.4%NITROGEN/HYDROGEN 21.6%CO2/32.4%N2/H2 0882
7%HYDROGEN/HELIUM 7%H2/He 0883
4%TETRAFLUOROETHANE
(
FREON- 4%C2H2F4/44%C2HF5/C2H3F3 0884
SEMI E52-0703 © SEMI 1995, 2003 37
MIXED GAS NAME SYMBOL CODE
134A)/44%PENTAFLUOROETHANE (FREON-125)/ ETHANE,1,1,1-
TRIFLUORO-(HFC-143a)
30%PROPANE/BUTANE 30%C3H8/C4H10 0885
.01%PHOSPHINE/ARGON .01%PH3/Ar 0886
.1%PHOSPHINE/ARGON .1%PH3/Ar 0887
.1%DIBORANE/ARGON .1%B2H6/Ar 0888
.5%PHOSPHINE/HELIUM .5%PH3/He 0889
5.5%ARSENIC TRICHLORIDE/HYDROGEN 5.5%AsCl3/H2 0890
17.4%GERMANIUM TETRACHLORIDE/HYDROGEN 17.4%GeCl4/H2 0891
32%SILICON TETRACHLORIDE/HYDROGEN 32%SiCl4/O2 0892
18.4%PHOSPHORUS OXYCHLORIDE/OXYGEN 18.4%POCl3/O2 0893
13%DISELENIUM DICHLORIDE/HYDROGEN 13%Se2Cl2/H2 0894
40%GERMANE/NITROGEN 40%GeH4/N2 0895
30%PHOSPHINE/SILANE 30%PH3/SiH4 0896
2.7%ETHYLENE/HELIUM 2.7%C2H4/He 0897
1%GERMANE/HYDROGEN 1%GeH4/H2 0898
1%METHYLSILANE (MONO)/HYDROGEN 1%CH6Si/H2 0899
.48%NITROGEN TRIFLUORIDE/NITROGEN .48%NF3/N2 0900
7%OZONE/OXYGEN 7%O3/O2 0901
.2%HYDROGEN SULFIDE/NITROGEN .2%H2S/N2 0902
2%HYDROGEN SULFIDE/NITROGEN 2%H2S/N2 0903
2%NITROGEN DIOXIDE/NITROGEN 2%NO2/N2 0904
.4%CHLORINE/NITROGEN .4%Cl2/N2 0905
4.6%SULFUR DIOXIDE/NITROGEN 4.6%SO2/N2 0906
10%ARSINE/NITROGEN 10%AsH3/N2 0907
20%DIBORANE/HELIUM 20%B2H6/He 0908
10 Mixed Gas Table Sorted by Percentage
Table 5 Mixed Gases Sorted by Percentage
MIXED GAS NAME SYMBOL CODE
.01%DIBORANE/HYDROGEN .01%B2H6/H2 0547
.01%PHOSPHINE/ARGON .01%PH3/Ar 0886
.01%SILANE/HYDROGEN .01%SiH4/H2 0548
.02%CARBON MONOXIDE/NITROGEN .02%CO/N2 0784
.05%DIBORANE/HYDROGEN .05%B2H6/H2 0690
.06%ARSINE/HYDROGEN .06%AsH3/H2 0708
.1%CARBON MONOXIDE/NITROGEN .1%CO/N2 0786
.1%DIBORANE/ARGON .1%B2H6/Ar 0888
.1%HYDROGEN CHLORIDE/NITROGEN .1%HCl/N2 0790
.1%HYDROGEN/.25%CARBON MONOXIDE/1%OXYGEN/NITROGEN .1%H2/.25%CO/1%O2/N2 0879
.1%NITROGEN DIOXIDE/AIR .1%NO2/Air 0791
.1%NITROGEN DIOXIDE/NITROGEN .1%NO2/N2 0792
.1%PHOSPHINE/ARGON .1%PH3/Ar 0887
.1%PHOSPHINE/HYDROGEN .1%PH3/H2 0793
SEMI E52-0703 © SEMI 1995, 2003 38
MIXED GAS NAME SYMBOL CODE
.1%PHOSPHINE/NITROGEN .1%PH3/N2 0789
.2%HYDROGEN SULFIDE/NITROGEN .2%H2S/N2 0902
.2%SULFUR DIOXIDE/AIR .2%SO2/Air 0794
.25%CARBON MONOXIDE/.1%HYDROGEN/1%OXYGEN/NITROGEN .25%CO/.1%H2/1%O2/N2 0795
.25%DIBORANE/HYDROGEN .25%B2H6/H2 0796
.25%OXYGEN/.5%HYDROGEN/1.5%CA RBON MONOXIDE/NITROGEN .25%O2/.5%H2/1.5%CO/N2 0797
.3%PHOSPHINE/SILANE .3%PH3/SiH4 0660
.4%CHLORINE/NITROGEN .4%Cl2/N2 0905
.4%HYDROGEN CHLORIDE/AIR .4%HCl/Air 0798
.48%NITROGEN TRIFLUORIDE/NITROGEN .48%NF3/N2 0900
.5%ARSINE/SILANE .5%AsH3/SiH4 0799
.5%BORON TRICHLORIDE/HYDROGEN .5%BCI3/H2 0655
.5%DIBORANE/ARGON .5%B2H6/Ar 0549
.5%PHOSPHINE/HELIUM .5%PH3/He 0889
.5%PHOSPHINE/HYDROGEN .5%PH3/H2 0656
.5%PHOSPHINE/NITROGEN .5%PH3/N2 0550
.5%SILANE/HYDROGEN .5%SiH4/H2 0551
.7%ARSINE/HELIUM .7%AsH3/He 0721
.7%ARSINE/HYDROGEN .7%AsH3/H2 0673
.7%GERMANIUM/HYDROGEN .7%GeH4/H2 0771
.8%ARSINE/HYDROGEN .8%AsH3/H2 0741
.8%CO/.8%O2/20%CO2/32%N2/H2 SELOX GAS MIX 0774
.8%DIBORANE/HYDROGEN .8%B2H6/H2 0743
.8%DIBORANE/NITROGEN .8%B2H6/N2 0662
.8%GERMANIUM TETRAFLUORIDE/HYDROGEN .8%GeF4/H2 0742
.8%PHOSPHINE/DISILANE .8%PH3/Si2H6 0681
.8%PHOSPHINE/HELIUM .8%PH3/He 0675
.8%PHOSPHINE/HYDROGEN .8%PH3/H2 0707
.8%PHOSPHINE/NITROGEN .8%PH3/N2 0552
.8%PHOSPHINE/SILANE .8%PH3/SiH4 0553
.9%ARSINE/HYDROGEN .9%AsH3/H2 0554
1%ACETYLENE/ETHYLENE 1%C2H2/C2H4 0772
1%ARSINE/HYDROGEN 1%AsH3/H2 0724
1%ARSINE/NITROGEN 1%AsH3/N2 0555
1%ARSINE/SILANE 1%AsH3/SiH4 0556
1%BORON TRICHLORIDE/HYDROGEN 1%BCI3/H2 0559
1%BORON TRICHLORIDE/NITROGEN 1%BCI3/N2 0560
1%BUTADIENE/BUTENE 1%C4H6-e)/C4H8-i) 0750
1%CARBON DIOXIDE/NITROGEN 1%CO2/N2 0800
1%CARBON MONOXIDE/19% NITROGEN/30%OXYGEN/CARBON
DIOXIDE 1%CO/19%N2/30%O2/CO2 0801
1%CARBON MONOXIDE/AIR 1%CO/Air 0802
1%CARBON MONOXIDE/CARBON DIOXIDE 1%CO/CO2 0803
1%CHLORINE/NITROGEN 1%Cl2/N2 0804
1%DIBORANE/ARGON 1%B2H6/Ar 0805