semi合集-English.pdf - 第1193页
SEMI E5-1104 © SEMI 1982, 2004 135 Stream,Function Name (Mnemonic) Direction S7,F11 M/P M Update Send (UMS) S,H->E,[reply] Description This message is used b y the host to add to the M/PM in the equipment. Structure L…

SEMI E5-1104 © SEMI 1982, 2004 134
Stream,Function Name (Mnemonic) Direction
S7,F10 M/P M Data (MMD) M,H<->E
Description
In the response to S7,F9, the equipment will transmit the current matrix it contains. The matrix will be the sum of all matrix
updates transmitted since initialization less the completed material whose linkages have been deleted. Programs with no pending
material will be deleted from the matrix but not from the equipment program directory.
Structure
L,n number of process programs
1. L,2
1. <PPID
1
>
2. L,a (number of MID for this PPID)
1. <MID
1
>
.
.
a. <MID
a
>
2. L,2
.
.
n. L,2
1. <PPID
n
>
2. L,b
1. <MID
1
>
.
.
b. <MID
b
>
Function 10 Example 2 process programs (1 and 3 MID, respectively)
L,2
L,2
1. <PPID
1
>
2. L,1
1. <MID
a
>
L,2
1. <PPID
2
>
2. L,3
1. <MID
b
>
2. <MID
c
>
3. <MID
d
>
Exception
a = 0 indicates that this PPID will be used for all material processed. The last default transmitted will be the one used; all other
entries will be deleted from the active matrix. A zero-length list returned means no such matrix.

SEMI E5-1104 © SEMI 1982, 2004 135
Stream,Function Name (Mnemonic) Direction
S7,F11 M/P M Update Send (UMS) S,H->E,[reply]
Description
This message is used by the host to add to the M/PM in the equipment.
Structure
L,n (number of process programs)
1. L,2
1. <PPID
1
>
2. L,a (number of MID's using PPID1)
1. <MID
1
>
.
.
a. <MID
a
>
2. L,2
.
.
n. L,2
1. <PPID
n
>
2. L,b
1. <MID
1
>
.
.
b. <MID
b
>
Exception
If a = 0, then the preceding PPID is to be used for all material processed. All other entries will be deleted from the active matrix.
Stream,Function Name (Mnemonic) Direction
S7,F12 M/P M Update Acknowledge (UMA) S,H<-E
Description
Acknowledge or error
Structure
<ACKC7>
Exception
None

SEMI E5-1104 © SEMI 1982, 2004 136
Stream,Function Name (Mnemonic) Direction
S7,F13 Delete M/P M Entry Send (DES) S,H->E,[reply]
Description
This message is used to delete program to material linkages in the M/PM of the equipment.
Structure
L,n (number of process programs)
1. L,2
1. <PPID
1
>
L,a (number of MID's using PPID)
1. <MID
1
>
.
.
a. <MID
a
>
2. L,2
.
.
n. L,2
1. <PPID
n
>
2. L,b
1. <MID
1
>
.
.
b. <MID
b
>
Exception
A delete consisting of a zero-length means delete all entries and generate a S7,F9 request to initialize matrix.
Stream,Function Name (Mnemonic) Direction
S7,F14 Delete M/P M Entry Acknowledge (DEA) S,H<-E
Description
Acknowledge or error
Structure
<ACKC7>
Exception
None
Stream,Function Name (Mnemonic) Direction
S7,F15 Matrix Mode Select Send (MMS) S,H->E,reply
Description
This message is used by the host to change the method of process program selection in the equipment which might not support
all modes.
Structure
<MMODE>
Exception
None