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SEMI E73-0301 © SEMI 1998 , 2001 1 SEMI E73-0301 SPECIFIC A TI ON FOR VACUUM PUMP INTERFACES - DRY PU M PS This specific ation was techn ically appr oved by the Glob al Physical Interfaces & Carri ers Committee an d …

SEMI E72-0600 © SEMI 1998, 2005 5

RELATED INFORMATION 1

APPLICATION NOTES

NOTICE: This related information is not an official part of SEMI E72 but was approved for publication by full letter

ballot procedures.

R1-1 The maximum height of equipment in the main fab was set so that the equipment could be installed in

existing fabs with ceilings just above the equipment height of 3.5 m (11 ft. 5 in) or in fabs with ceiling heights of

3.66 m (12 ft. 0 in.) where more clearance is provided for such things as parts of some overhead carrier transport

systems, fire sprinkler systems at the ceiling, and/or extra room for installation of equipment.

R1-2 The maximum height of equipment in the sub-fab was set so that no part of the equipment (other than

connections to the main fab area) sticks up into the piping and duct-work immediately under the waffle slab. In

those cases where a part of the equipment must be taller than 2 m (6 ft. 6 in.), it is recommended that it not be taller

than 2.5 m (8 ft. 2 in.) to stay under the waffle slab.

R1-3 If equipment must have easement space on the side, it is recommended that they be designed in mirror-image

configurations with easement space needed on only one side or the other, so that half of the total easement space on

the sides can be deleted. However, it is recommended that the resulting increase in equipment cost, complexity, and

spare parts inventory be taken into account.

R1-4 Equipment that conforms to the limits given in this standard may be too large or heavy to fit into buildings

that were originally designed for equipment that processes smaller wafers.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E73-0301 © SEMI 1998, 20011

SEMI E73-0301

SPECIFICATION FOR VACUUM PUMP INTERFACES - DRY PUMPS

This specification was technically approved by the Global Physical Interfaces & Carriers Committee and is

the direct responsibility of the Japanese Physical Interfaces & Carriers Committee. Current edition approved

by the Japanese Regional Standards Committee on December 1, 2000. Initially available at www.semi.org

January 2001; to be published March 2001. Originally published June 1998; previously published February

1999.

1 Purpose

1.1 This standard specifies the physical and electrical

interfaces for dry pump (DRP) type vacuum pumps.

Standardization of pump interfaces will allow for

interchangeability of pumps. Device manufacturers use

this standard when procuring processing equipment to

specify to the equipment supplier the interface required

for interchangeability of pumps. This document is also

used by semiconductor processing equipment suppliers

to specify standardized interfaces to pump suppliers.

2 Scope

2.1 This standard applies to vacuu m pumps supplied

with 300 mm semiconductor processing equipment.

2.2 The standard specifies the mec hanical and

electrical interfaces for dry pumps including the

following.

• Mechanical connectors

• Control signals and connector

• Power supply and connector

2.3 Figure 1 shows the scope of the standardized

interface.

Tool

Physical interface

Electrical interface

Signals for

centralized supervisory

Outlet

Range of

standardized

items

Utilities

Figure 1

Scope of Standardized Interface

2.4 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 This guide is not intended to d ictate how to build a

vacuum pump but to specify interfaces that will allow

for interchangeabilty of individual pumps.

3.2 This standard does not include specifications for

sensor-bus compliant interfaces.

3.3 This standard is not intended t o address design

issues related to safety considerations and containment

issues which are addressed elsewhere in the SEMI

guidelines.

3.4 International, national, and loc al codes, laws, and

regulations should be consulted to ensure that the

equipment meets regulatory requirements in each

location of use.

4 Referenced Standards

NOTE 1: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

4.1 SEMI Documents

SEMI S2 — Environmental, Health, and Safety

Guideline for Semiconductor Manufacturing Equipment

4.2 ISO Documents

ISO 7-1 — Pipe threads where pressure-tight joints are

made on the threads - Part 1: Dimensions, tolerances

and designation

ISO 1609 — Vacuum Technology - Flange dimensions

ISO 2861-1 — Vacuum technology - Quick-release

couplings - Dimensions - Part 1: Clamped type

5 Terminology

5.1 dry pump (DRP)  Dry pumps are a type of

mechanical vacuum pump. Dry pumps can work at

1 International Organization for Standardization, C.P. 56 CH-1211

Geneva 20, Switzerland

SEMI E73-0301 © SEMI 1998, 2001 2

atmospheric pressure. They are called dry pumps

because no liquid sealing materials are used on any

surface contacted by gases. Hereafter, the term “DRP”

is substituted for “dry pump”.

5.2 pump alarm  A cautionary s ignal that the pump

has stopped.

5.3 pump warning  A state of an abnormal or

extraordinary event during pump operation which

means there is a probability the pump will stop.

5.4 vacuum pump  A pumping a pparatus which

exhausts gas or air from an enclosed space to achieve a

desired degree of vacuum.

6 Requirements

6.1 Mechanical Interfaces — Table 1 specifies the

required DRP connector type and size by flange/port.

Table 1 Mechanical Connectors

No. Items Connector Type Connector Size

Referenced

Standard

Remarks

Nominal

bore 50 mm

or less

ISO KF flange ≤ 50 mm

Connector dimensions

should be based on the

referenced standard

ISO 2861-1

1Inlet

flange

Nominal

bore over

63 mm size

ISO clamped flange ≥ 63 mm

Connector dimensions

should be based on the

referenced standard

ISO 1609

A port flange which connects the

pump to a process tool to evacuate

gases.

2 Outlet flange ISO KF flange Connector dimensions

should be based on the

referenced standard

ISO 2861-1 A port flange which connects the

pump to the facility evacuation

system.

3 Duct port (Option) Not specified 50 mm or 100 mm

diameter port

Port to connect duct for evacuating

flames inside the pump.

4 Purge gas port Compression type* 1/4" Connector A connection port used to supply

inert gas, typically N

, to the pump.

The purge gas protects the inside of

the pump from corrosion due to

process gases.

5 Cooling water port ISO taper pipe thread

(female on pump side)

1/4" or 3/8" ISO 7-1 A connection port to supply water

used to keep the pump cool.

* For example Swagelock

6.2 Electrical Interfaces

6.2.1 Control Signals

6.2.1.1 Table 2 specifies the required DRP control signals. Table 3 and Figure 2 specify the required response time

for DRP control signals. Table 4 specifies the required power and contacts for DPR control signals. Tables 5 and 6

and Figure 3 specify the required connector and pin assignments for DRP control signals.

Table 2 I/O Signals

No. Signal Name Direction Type Remarks

1 Start (Run)/Stop Input signal to Pump Alternate Pump runs when closed

2 Start (Run)/Stop Output signal from Pump Alternate Close on pump start

3 Remote/Local Output signal from Pump Alternate Close during remote

operation

4 Pump Warning Output signal from Pump Alternate Open at warning

5 Pump Alarm Output signal from Pump Alternate Open at alarm

Running status signals

When input power is OFF,

output status signals should

become open (normally

open).