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SEMI E119-1104 © SEMI 2002, 2004 15 Symbol Used Figure Number Value Specified Datum Measured from Feature Measured to x 47 #1 9 58 mm (2.28 in.) minimum bilateral datum plane end of the top robotic handling flange front …
SEMI E119-1104 © SEMI 2002, 2004 14
Table 2 External FOBIT Dimensions (Figures 612)
Symbol
Used
Figure
Number
Value Specified Datum Measured from Feature Measured to
#1
9 60° bilateral datum plane centerline of the right and left kinematic
grooves in the top robotic handling flange
#1
9 45 ± 1° nominal wafer centerline surface of the center hole in the top robotic
handling flange
#1
9 52 ± 1° bilateral datum plane or
vertical plane rotated
away from it about
nominal wafer centerline
angled surface of the kinematic grooves in
the top robotic handling flange
#1
9 45 ± 0.5° either vertical datum
plane
sides of position and orientation notches in
the top robotic handling flange
11
30 0.5
horizontal line on
bilateral datum plane
ramp of front retaining feature
d63‡ 9 35 ± 0.1 mm
(1.378 ± 0.004 in.)
diameter centered on the
nominal wafer centerline
sides the center hole in the top robotic
handling flange at height z47
d65
#1
6, 7, 10 10 ± 0.5 mm
(0.39 ± 0.02 in.)
diameter centered on the
intersection of x65 and
the facial datum plane
surface of cylindrical fork-lift pin holes in
left and right bottom conveyor rails
f60 None
175 N (39.3 lbf.)
minimum
not applicable force in any direction which both retaining
features are able to withstand
r59
#1
9 6 mm (0.24 in.)
maximum
not applicable radius on peak of kinematic grooves in the
top robotic handling flange
r60
10, 11
16 ± 0.5 mm
(0.63 ± 0.02 in.)
nominal wafer center line ends of slot for center retaining feature
r61
10, 11
16 mm (0.63 in.)
minimum
nominal wafer center line walls of chamber above slot in center
retaining feature
r63
#1
9 66 mm (2.60 in.)
maximum
nominal wafer centerline near end of the right and left kinematic
grooves in the top robotic handling flange
r64 10
9.5 mm (0.37 in.)
maximum
not applicable corners of front retaining feature
r65 None 1 mm (0.04 in.)
maximum
not applicable all required concave features (radius)
r66 None 2 mm (0.08 in.)
maximum
not applicable all required convex features (radius)
r67 8, 10 240 mm (9.45 in.)
maximum
y67 in front of nominal
wafer centerline
any part of FOBIT
r69 None 10 mm (0.39 in.)
minimum (required)
15 mm (0.59 in.)
(recommended for
ergonomic reasons)
not applicable correctable FOBIT misalignment in any
horizontal direction
x41
#1
9 30 ± 1 mm
(1.18 ± 0.04 in.)
bilateral datum plane front right orientation notch on the top
robotic handling flange
x42
#1
9 50 ± 1 mm
(1.97 ± 0.04 in.)
bilateral datum plane front left orientation notch on the top robotic
handling flange
x43
#1
9 50 ± 1 mm
(1.97 ± 0.04 in.)
bilateral datum plane rear orientation notch on the top robotic
handling flange
x44
#1
7, 9 53 mm (2.09 in.)
maximum
bilateral datum plane encroachment of supports under the outer
edge of the top robotic handling flange
x45
#1
9 65.3 ± 1 mm
(2.57 ± 0.04 in.)
bilateral datum plane nearest point of side position and orientation
notches on the top robotic handling flange
x46
#1
7, 9 71 ± 1 mm
(2.80 ± 0.04 in.)
bilateral datum plane outside edge (right & left sides) of the top
robotic handling flange
SEMI E119-1104 © SEMI 2002, 2004 15
Symbol
Used
Figure
Number
Value Specified Datum Measured from Feature Measured to
x47
#1
9 58 mm (2.28 in.)
minimum
bilateral datum plane end of the top robotic handling flange front
and rear
x50
#1
7, 8, 10 215 mm (8.46 in.)
maximum
bilateral datum plane furthest reach of human handles
x53 7, 8, 10 195 mm (7.68 in.)
maximum
bilateral datum plane FOBIT sides (apart from human handles)
x56
#1
7, 10 194.75 ± 0.25 mm
(7.667 ± 0.010 in.)
bilateral datum plane outside edge of bottom conveyor rails
x57
#1
7, 10 180 mm (7.09 in.)
maximum
bilateral datum plane FOBIT sides underneath bottom conveyor
rails
x60 10
8 ± 0.5 mm
(0.31 ± 0.02 in.)
bilateral datum plane sides of slot for center retaining feature
x64 10
35 mm (1.38 in.)
minimum
bilateral datum plane sides of front retaining feature
x65
#1
7, 10 187.5 mm (7.38 in.) bilateral datum plane vertical axis of cylindrical fork-lift pin holes
in left and right bottom conveyor rails
x66
12
31 mm (1.22 in.)
maximum
bilateral datum plane near side of advancing box sensing pads
x67 12
34 mm (1.34 in.)
minimum
bilateral datum plane far side of advancing box sensing pads
x68 10
25 mm (0.98 in.)
minimum
bilateral datum plane sides of volume above ramp on front
retaining feature
x69
#1
9 7.6 ± 0.1 mm
(0.299 ± 0.004 in.)
bilateral datum plane or
vertical plane rotated
away from it about
nominal wafer centerline
beginning of angled surface of the kinematic
grooves in the top robotic handling flange
y40
#1
6, 8 116 mm (4.57 in.)
maximum
facial datum plane furthest extent of human handles toward the
front
y41
#1
9 30 ± 1 mm
(1.18 ± 0.04 in.)
facial datum plane left orientation notch on robotic handling
flange
y42 None ± 0.5 mm (± 0.02 in.)
flatness over each area
facial datum plane surfaces that mate with the seal zones
y44
#1
6, 9 53 mm (2.09 in.)
maximum
facial datum plane encroachment of supports under the outer
edge of the top robotic handling flange
y45
#1
9 65.3 ± 1 mm
(2.57 ± 0.04 in.)
facial datum plane nearest point of front and rear position and
orientation notches on the top robotic
handling flange
y46
#1
6, 9 71 ± 1 mm
(2.80 ± 0.04 in.)
facial datum plane outside edge (front & rear) of the top robotic
handling flange
y47
#1
9 58 mm (2.28 in.)
minimum
facial datum plane end of robotic handling flange sides
y50 6, 8 130 mm (5.12 in.)
minimum
facial datum plane rear of upper door frame volume
y52 1, 6, 8, 10 165.5 ± 0.5 mm (6.52 ±
0.02 in.) at door and
frame seal zones and at
reserved spaces for
vacuum application and
166 mm (6.54 in.)
maximum elsewhere on
door or box shell
facial datum plane FOBIT front
y53 6, 8, 10 190 mm (7.48 in.)
maximum
facial datum plane FOBIT rear
SEMI E119-1104 © SEMI 2002, 2004 16
Symbol
Used
Figure
Number
Value Specified Datum Measured from Feature Measured to
y58
#1
6, 10 75 mm (2.95 in.)
minimum
facial datum plane end of left and right conveyor rails
y62 10, 11
28 mm (1.10 in.)
maximum
facial datum plane rear of front retaining feature
y63 10, 11
37.3 ± 0.5 mm
(1.47 ± 0.02 in.)
facial datum plane rear of ramp on front retaining feature
y64 10, 11, 12
42.1 ± 0.5 mm
(1.66 ± 0.02 in.)
facial datum plane front of ramp on front retaining feature and
front side of advancing box sensing pads
y65 10, 11
104 mm (4.09 in.)
minimum
facial datum plane front of front retaining feature
y66 12
50 mm (1.97 in.)
minimum
facial datum plane rear side of advancing box sensing pads
y67 8, 10 25 mm (0.98 in.) facial datum plane origin of r67 on bilateral datum plane
y68
#1
9 55 mm (2.17 in.)
maximum
facial datum plane near end of the front kinematic groove in the
top robotic handling flange
z2 None 2 mm (0.08 in.)
maximum
horizontal datum plane bottom of carrier sensing pads and info pads
(when down)
z41 6, 7 0 mm (0 in.)
minimum
external horizontal datum
plane
bottom of FOBIT
z43
#1
6, 7 2 ± 1 mm
(0.08 ± 0.04 in.)
external horizontal datum
plane
bottom conveyor rails
z47
#1
6, 7, 9 221 ± 1 mm
(8.70 ± 0.04 in.)
external horizontal datum
plane
bottom surface of the top robotic handling
flange
z48
#1
6, 7, 9 15 mm (0.59 in.)
minimum
bottom of robotic
handling flange
encroachment of FOBIT top underneath
robotic handling flange
z49
#1
6, 7, 9 8 mm (0.31 in.)
maximum
bottom of robotic
handling flange
top of robotic handling flange and upper door
frame volume
z50
#1
9 5 mm (0.20 in.)
minimum
bottom of robotic
handling flange
encroachment of FOBIT top underneath the
center hole in the top robotic handling flange
z60 11
8.0 ± 0.5 mm
(0.31 ± 0.02 in.)
external horizontal datum
plane
top of slot in center retaining feature
z61 11
15 mm (0.59 in.)
minimum
external horizontal datum
plane
top of chamber above slot in center retaining
feature
z62 11
18 mm (0.71 in.)
minimum
external horizontal datum
plane
top of front retaining feature
z63 11
7.5 ± 0.5 mm
(0.30 ± 0.02 in.)
external horizontal datum
plane
top of ramp on front retaining feature
z65
#1
6, 7 7 mm (0.28 in.)
minimum
horizontal datum plane upper boundary of cylindrical fork-lift pin
holes in left and right bottom conveyor rails
#1
These dimensions are for optional features.
6 Related Documents
6.1 SEMI Standards
SEMI E22.1 — Cluster Tool Module Interface 300
mm: Transport Module End Effector Exclusion Volume
Standard
SEMI E63 — Mechanical Specification for 300 mm
Box Opener/Loader to Tool Standard (BOLTS-M)
Interface
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.