semi合集-English.pdf - 第37页
SEMI E1.9-0701 E2 © SEMI 1994, 2004 17 Symbol Used Figure Number Value Specified Datum Measured from Boundary or Feature Measured to z 2* 5, 8 , 12 2 mm (0.08 in.) maximum horizontal datum plane bottom of carrier sensing…
SEMI E1.9-0701
E2
© SEMI 1994, 2004 16
Symbol
Used
Figure
Number
Value Specified Datum Measured from Boundary or Feature Measured to
y4 1, 2, 6 85 mm (3.35 in.)
maximum
facial datum plane rear of front cassette side domains and the
part of the cassette top domain above them
y5† 1, 6 120 mm (4.72 in.)
minimum
facial datum plane front of rear cassette side domains
y6 1, 6 152 mm (5.98 in.)
maximum
facial datum plane rear of rear cassette side domains
y7‡ 2, 7 2 ± 0.5 mm
(0.08 ± 0.02 in.)
facial datum plane rear side of top robotic handling flange
supports
y8‡ 2, 7 2 ± 0.5 mm
(0.08 ± 0.02 in.)
facial datum plane front side of top robotic handling flange
supports
y9* 5 92.5 mm (3.64 in.) facial datum plane front end of the line segment along center of
rear carrier sensing pads and origin of
radius r17 at center of info pads C and D
y10* 5 123.5 mm (4.86 in.) facial datum plane rear end of the line segment along center of
rear carrier sensing pads and origin of
radius r14 at center of info pads A and B
y11† 1, 6 85 mm (3.35 in.)
maximum
facial datum plane front of front cassette side domains
y14‡ None 142 mm (5.59 in.)
maximum
facial datum plane front of the cassette top
y15 2, 4, 6 95 mm (3.74 in.)
maximum
facial datum plane encroachment of cassette top and bottom
domains on vertical optical wafer sensing
paths
y16 2, 4, 6, 16 155 ± 1 mm
(6.10 ± 0.04 in.)
facial datum plane rear end of cassette top and bottom domains
y17* 5 27.5 mm (1.08 in.) facial datum plane line segment along center of center cassette
sensing pad
y18 5 40.2 mm (1.58 in.) facial datum plane near end of line segment along center of
front cassette sensing pads
y19* 5 61.1 mm (2.41 in.) facial datum plane far end of line segment along center of front
cassette sensing pads
y20‡ None 158 mm (6.22 in.) facial datum plane maximum protrusion of wafers toward the
front of the cassette
y21 14 136 mm (5.35 in.)
facial datum plane recommended center of label on top
cassette identification tag area
y22 16 145 mm (5.71 in.)
facial datum plane recommended center of label on bottom
cassette identification tag area
y23 4, 6 140 mm (5.51 in.)
maximum
facial datum plane rear of cassette bottom domain outside of x5
y24‡ 16 136 mm (5.35 in.)
maximum
facial datum plane near side of bottom cassette identification
tag area
y25‡ 14 127 mm (5.00 in.)
maximum
facial datum plane near side of top cassette identification tag
area
y26‡ 14 145 mm (5.71 in.)
minimum
facial datum plane far side of top cassette identification tag
area
y27‡ 15 9 mm (0.35 in.)
minimum
facial datum plane front side of side cassette identification tag
area
y28‡ 15 9 mm (0.35 in.)
minimum
facial datum plane rear side of side cassette identification tag
area
y29 13 89 mm (3.50 in.) facial datum plane axis of rotation of fork-lift area
z1 8, 12 0 mm (0 in.) minimum horizontal datum plane bottom of cassette bottom domain
SEMI E1.9-0701
E2
© SEMI 1994, 2004 17
Symbol
Used
Figure
Number
Value Specified Datum Measured from Boundary or Feature Measured to
z2* 5, 8, 12 2 mm (0.08 in.)
maximum
horizontal datum plane bottom of carrier sensing pads and info pads
(when down) and advancing box sensing
pads (on FOUP only, see SEMI E47.1)
z3 8, 12 7 ± 1 mm
(0.28 ± 0.04 in.)
horizontal datum plane bottom of conveyor rail between x15 and
x16
z4 8, 12 15 ± 1 mm
(0.59 ± 0.04 in.)
horizontal datum plane cassette bottom outside of x16
z5 8, 9 10 mm (0.39 in.)
minimum)
horizontal datum plane top of pod latch-pin hole
z6† 6, 8, 9, 12 21 mm (0.83 in.)
maximum
horizontal datum plane top of cassette bottom domain
z7‡ 8, 12 35 ± 1 mm
(1.38 ± 0.04 in.)
horizontal datum plane bottom point of bottom side grip pits
z8† 6, 9, 12 33 mm (1.30 in.) horizontal datum plane bottom nominal wafer seating plane
z9‡ 8, 12 45 ± 1 mm
(1.77 ± 0.04 in.)
horizontal datum plane bottom of vertical sides of bottom side grip
pits
z10† 10, 11 0 ± 0.5 mm
(0.00 ± 0.02 in.)
each nominal wafer
seating plane
entire bottom of the wafer
z11† 10, 11 see Table 2 each nominal wafer
seating plane
encroachment of cassette side domains on
clearance above the wafer
z12† 6, 9, 10,
11, 12
see Table 2 each nominal wafer
seating plane
adjacent nominal wafer seating planes
z13‡ 7, 10 24 ± 1 mm
(0.94 ± 0.04 in.)
top nominal wafer
seating plane
bottom wall of top side grip pits
z14‡ 7, 10 1 ± 1 mm
(0.04 ± 0.04 in.)
top nominal wafer
seating plane
top point of top side grip pits
z15† 6, 9, 10 13 mm (0.51 in.)
minimum
top nominal wafer
seating plane
bottom of cassette top domain
z16‡ 7, 10 9 ± 1 mm
(0.35 ± 0.04 in.)
lowest point of underside
of top robotic flange
encroachment of cassette top domain on
space underneath robotic handling flange
z17‡ 7, 10 26 ± 1 mm
(1.02 ± 0.04 in.)
top nominal wafer
seating plane
bottom of top robotic handling flanges
z18 6, 7, 9, 10 30 mm (1.18 in.)
maximum
top nominal wafer
seating plane
top of cassette top domain
z19 8, 12 24 mm (0.94 in.) horizontal datum plane origin of radius of cassette sensing hole
z20‡ 8, 12 60 ± 1 mm
(2.36 ± 0.04 in.)
top nominal wafer
seating plane
top wall of bottom side grip pits
z21‡ 7, 10 9 ± 1 mm
(0.35 ± 0.04 in.)
top nominal wafer
seating plane
top of vertical sides of top side grip pits
z22 8, 12 20 mm (0.79 in.)
minimum
horizontal datum plane top of fork-lift pin hole and upper limit of
volume bounded by r10
z23† 10 3 mm (0.12 in.)
maximum
each nominal wafer
seating plane
bottom of wafer extraction volume
z24‡ 7, 10 4 ± 1 mm
(0.16 ± 0.04 in.)
lowest point of underside
of top robotic flange
top of top robotic handling flange
z25‡ None ± 1 mm (± 0.04 in.)
flatness over tag area
horizontal datum plane surface of top and bottom cassette
identification tag areas
z26* 5 9 mm (0.35 in.)
minimum
horizontal datum plane bottom of info pads (when up)
z27‡ 15 64.5 mm (2.54 in.)
maximum
horizontal datum plane bottom end of side cassette identification tag
area
SEMI E1.9-0701
E2
© SEMI 1994, 2004 18
Symbol
Used
Figure
Number
Value Specified Datum Measured from Boundary or Feature Measured to
z28‡ 15 124.5 mm (4.90 in.)
minimum
horizontal datum plane top end of side cassette identification tag
area
z29 11 0.7 mm (0.028 in.)
maximum
each nominal wafer
seating plane
encroachment of cassette side domains
under wafer extraction volume
z99 15 94.5 mm (3.72 in.)
horizontal datum plane recommended center of label on side
cassette identification tag area
* These dimensions define external features that are also required for boxes.
† These dimensions define internal features that are also required for boxes with non-removable cassettes.
‡ These dimensions define optional features.
Table 2 Pitch and Capacity Options
Option
Number
Cassette Capacity
(c)
Wafer Pitch
(z12)
Wafer Clearance
(z11)
Resulting Cassette Height
(z8 – z1 + z12* (c – 1) + z18)
1 13 wafers 10 mm
(0.39 in.)
6 mm (0.24 in.)
minimum
183 mm (7.20 in.) maximum
2 25 wafers 10 mm
(0.39 in.)
6 mm (0.24 in.)
minimum
303 mm (11.93 in.) maximum
3 not yet defined
4 not yet defined