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SEMI E123.1-0703 © SEMI 2003 1 SEMI E123.1-0703 SPECIFICATION FO R SECS-II PROT OCOL FOR HANDLER SPECIFIC EQUIPMENT MODEL (HSEM) This specification was technically approved by the Globa l Information & Control Commit…

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SEMI E123-0703 © SEMI 2003 18
4. Parameter Control Error — Parameter variation
outside of reasonable control limits — may
indicate an equipment malfunction.
5. Irrecoverable Error — Intervention required
before normal use of equipment can resume.
6. Equipment Status Warning — An unexpected
condition has occurred, but operation can continue.
7. Attention Flags — A signal from a process
program indicating that a particular step has been
reached.
8. Data Integrity — A condition which may cause
loss of data; usually related to Stream 6.
12.3 Some alarm conditions may cause more than one
type of alarm to be issued. For example, a parameter
control error on over temperature may also trip a
protective device that makes the alarm irrecoverable
without some intervention. SEMI E30 constrains the
definition of an alarm to be only categories 1–3.
However this definition does not account for the
modular and parallel nature of modern processing
equipment.
12.4 Relationship to ALARM_PAUSED Process State
12.4.1 The equipment manufacturer should define the
relationship between an exception condition and the
ALARM_PAUSED process state on a case-by-case
basis along these guidelines.
1. An exception is not always an alarm.
2. An exception does not necessarily require a process
state change to ALARM_PAUSED even though it
may ultimately prove to be the root cause of that
transition at a later time.
3. Exceptions that force immediate processing
stoppage for the primary function of the tool
should trigger a transition to ALARM_PAUSED.
4. Exceptions reported with an alarm code with a
category of 1–3 and 5 as defined above should
cause a transition to ALARM_PAUSED.
5. A machine with currently set alarms may PAUSE
instead of transitioning to ALARM_PAUSED if
none of the currently set exception conditions were
the immediate trigger for the transition.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer' s instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E123.1-0703 © SEMI 2003 1
SEMI E123.1-0703
SPECIFICATION FOR SECS-II PROTOCOL FOR HANDLER SPECIFIC
EQUIPMENT MODEL (HSEM)
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on April 11, 2003. Initially available at www.semi.org May
2003; to be published July 2003.
1 Purpose
1.1 This document maps the services and data of SEMI
E123 to SECS-II streams and functions, and data
definitions.
2 Scope
2.1 This is a specification covering equipment
supporting automated communication of the handler
equipment.
2.2 This document applies to all implementations of
SEMI E123 that use the SECS-II message protocol
(SEMI E5). Compliance to this standard requires
compliance to both SEMI E123 and SEMI E5.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This specification applies to semiconductor
equipment that also use SEMI E30 GEM standard.
4 Referenced Standards
4.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and
Control of Manufacturing Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services
(HSMS) Generic Services
SEMI E123 — Standard for Handler Equipment
Specific Equipment Model (HSEM)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Service Message Mapping
5.1 This section shows the specific SECS-II streams
and functions that shall be used for SECS-II
implementation of the services or remote commands
defined in SEMI E123, as well as the parameter
mapping for data attached to services.
5.2 Services Message Mapping
5.2.1 Table 1 defines the relationships between SEMI
E123 services and SECS-II messages. Mapping of
service parameters to the SECS-II data items is
provided in a separate table. Conventions and
definitions of table fields are as described below.
5.2.2 Service Name — Name of the service or remote
command defined in SEMI E123.
5.2.3 Stream, Function — Specifies the SECS-II
stream and function (SxFx) mapped to the service
messages. Following convention of SECS-II, request
and notification messages are mapped to the odd-
numbered functions and response or acknowledgement
messages are mapped to the corresponding even-
numbered functions.
5.2.4 SECS-II Message Name — Name of the SECS-II
message.
Table 1 Services Message Mapping Table
Service Name Stream, Function SECS-II Message Name
ABORT S2,F41/F42 Host Command Send/Acknowledge
BIN-UNITS S2,F49/F50 Enhanced Remote Command Send/Acknowledge
BREAK-CONTACT S2,F49/F50 Enhanced Remote Command Send/Acknowledge
DISABLE-SITE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
ENABLE-SITE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
MAKE-CONTACT S2,F49/F50 Enhanced Remote Command Send/Acknowledge
PAUSE S2,F41/F42 Host Command Send/Acknowledge
SEMI E123.1-0703 © SEMI 2003 2
Service Name Stream, Function SECS-II Message Name
PP-SELECT S2,F41/F42 Host Command Send/Acknowledge
PRELOAD-UNITS S2,F41/F42 Host Command Send/Acknowledge
PURGE S2,F41/F42 Host Command Send/Acknowledge
RECONTACT S2,F49/F50 Enhanced Remote Command Send/Acknowledge
RESET-TOOL-COUNTS S2,F49/F50 Enhanced Remote Command Send/Acknowledge
RESUME S2,F41/F42 Host Command Send/Acknowledge
START S2,F41/F42 Host Command Send/Acknowledge
STOP S2,F41/F42 Host Command Send/Acknowledge
5.3 Event Message Mapping
5.3.1 Table 2 defines the relationships between SEMI E123 collection events and SECS-II messages. Conventions
and table field definitions similar to mapping table for the services, here Event Name specifies the event defined in
SEMI E123.
Table 2 Event Message Mapping Table
Event Name Stream, Function SECS-II Message Name
All events defined in SEMI E123 S6F11/12 Event Report Send/Acknowledge
5.4 Service Parameter Mapping
5.4.1 Table 3 defines the relationships between SEMI E123 service parameters and SECS-II data definitions or
parameter fields in the mapped streams and functions. Parameters for acknowledgements or responses will follow
SECS-II specification for that stream and function, no service specific error codes are defined in this specification.
Descriptions of each table column are described below.
5.4.2 Service — Specifies the service whose parameters are described.
5.4.3 SECS-II Field — Specifies the SECS-II data item or message parameter used by the service. In this
specification, the DATAID and OBJSPEC fields are unspecified for services using the S2F49 SECS-II message.
Their values are to be ignored or used for implementation specific purposes.
5.4.4 Values — Value or SECS II format for the specified field. Formats are specified using the SML notation as
defined in appendices of SEMI E30 (GEM).
5.4.5 Req. — Indicates whether the specified field or parameter is required or not. If an optional CPNAME
parameter is used, the corresponding CPVAL must also be given.
5.4.6 Description — Provides a brief description of the SECS-II field in relation to the service parameters defined
in SEMI E123.
Table 3 Service Parameter to SECS-II Data Items Mapping
Service SECS-II Field Values Req. Description
RCMD “ABORT” Y
CPNAME
1
“PROCESSSITEID” N ProcessSiteID parameter.
CPVAL
1
U4 N ProcessSiteID value. ID of handler process site.
CPNAME
2
“CLEANUP” N Cleanup parameter.
ABORT
CPVAL
2
BOOLEAN N Cleanup value. If TRUE, remove all materials to
outputs.