semi合集-English.pdf - 第916页
SEMI E118-1104 E © SEMI 2002, 2004 10 Parameter Form Description Wafer ID Text User data comp liances with SEMI Standard. Head ID Number 0–31. Identifies either an indivi dual head (non-zero) or the WIDR subsystem itself…
SEMI E118-1104
E
© SEMI 2002, 2004 9
# Previous State Trigger New State Actions Comments
13 IDLE Request to perform a
service.
BUSY None
14 BUSY Completion of service. IDLE None
15 OPERATING An alarm condition is
detected.
NOT OPERATING None
16 NOT OPERATING Self-Diagnostic Service. OPERATING None All alarm conditions
are clear.
10 Alarm Conditions
10.1 An alarm condition exists whenever one or more faults or exceptions that interfere with normal read
operations is detected. A maintenance condition exists when the WIDR determines the need for either maintenance
(repair) or preventive maintenance activities.
10.2 The WIDR is able to detect and report alarm conditions through its status attributes (when queried by the
upstream controller). It may additionally report changes in alarm conditions asynchronously through alarm or event
reports.
11 Services
11.1 To be compliant with this standard, the WIDR shall support all services that are indicated as required. In
addition, if the WIDR provides other services that have the same or similar functionality as services defined in this
document, then compliance to this standard requires they shall satisfy the requirements of the service as defined.
11.2 List of Services
11.2.1 Table 7 lists the services defined by this standard and indicates which are optional and which are required.
Table 7 List of Services
Service Name Description
Fundamental Requirements
GetAttributes Get specified information about the WIDR.
GetStatus Get the current status of the WIDR.
ReadWID Read WID.
Optional Capabilities
ChangeState Change to MAINTENANCE state or to OPERATING state.
PerformDiagnostics Perform diagnostic tests.
Reset Reset WIDR hardware and software.
SetAttributes Write specified information.
ReadWIDC Read WID with 2D Code Read Condition.
11.3 Parameter Definitions
11.3.1 Table 8 defines the parameters that are used in one or more services, including individual items within
parameter structures. Parameters are listed in alphabetical order.
Table 8 Parameter Definitions
Parameter Form Description
Action Protocol-specific. Specifies diagnostic action to perform.
Attribute ID Text Attribute identifier. Name of attribute.
Attribute Value Varies with attribute. Attribute value.
SEMI E118-1104
E
© SEMI 2002, 2004 10
Parameter Form Description
Wafer ID Text User data compliances with SEMI Standard.
Head ID Number 0–31. Identifies either an individual head (non-zero) or the WIDR subsystem itself
(zero).
PM Information Enumerated:
-Normal execution
-Maintenance required
Preventive Maintenance Information.
Result Status Enumerated:
-Normal operation
-Execution Error
-Communication Error
-Hardware Error
Result information on the status of the request concerning the service request.
Execution Error: Cannot Read ID sequence. But equipment is normal.
Communication Error: syntax error of Message or Message format or Value.
Hardware Error: ID reader head fault, ID reader head is powered off.
Status Structure Information about the status of the WIDR. Consists of PM Information and
the current values of the WIDR attributes AlarmStatus, OperationalStatus, and
HeadStatus.
2D Code Read
Condition
Structure
2D Code Condition for Preventive Maintenance.
Cell Size: Number of Pixels in a Cell.
Contrast: Contrast Percentage of Dark / Light.
Damage Percent: Percentage of Damage Cell.
Number Error Bits: Number of the Damage Cell
Read Time: Time for Readout.
Matrix Style: Normal Mode or Mirror Mode.
Matrix Polarity : Dark on Light or Light on Dark.
11.4 Service Definitions
11.4.1 This section defines the parameters used for each WIDR service.
11.4.2 ChangeState
11.4.2.1 ChangeState is an optional service that requests the WIDR to change its operational substate to
MAINTENANCE or to OPERATING. Table 9 defines the parameters used for the ChangeState service.
Table 9 ChangeState Service Definition
Parameter Req/Ind Rsp/Conf Description
StateRequest M - Specifies either MAINTENANCE or OPERATING substate.
Result Status - M Result information on the status of the request.
Status - M Status information.
11.4.3 Get Attributes
11.4.3.1 Get Attributes is a required service used to request the attributes of the WIDR.
Table 10 Get Attributes Service Definition
Parameter Req/Ind Rsp/Conf Description
Head ID M M Specifies Head or Subsystem.
(list of) Attribute ID M - Identifiers of one or more attributes.
(list of) Attribute Value - M Attribute Values in order as requested.
Result Status - M Result information on the status of the request.
SEMI E118-1104
E
© SEMI 2002, 2004 11
11.4.4 Get Status
11.4.4.1 Get Status is a required service used to get the current status of the WIDR. The upstream controller may
request current status at any time.
Table 11 Get Status Service Definition
Parameter Req/Ind Rsp/Conf Description
Head ID M M Specifies Head or Subsystem.
Result Status - M Result information on the status of the request.
Status - M Status information.
11.4.5 Perform Diagnostics
11.4.5.1 Perform Diagnostics is an optional service used to request the WIDR perform its internal diagnostics. The
supplier shall document the specific diagnostics performed.
Table 12 Perform Diagnostics Service Definition
Parameter Req/Ind Rsp/Conf Description
Head ID M M Specifies Head or Subsystem.
Action C Specifies diagnostic action to perform.
Result Status - M Result information on the status of the request.
Status - M Status information.
11.4.6 Read WID
11.4.6.1 Read WID is used to request the WID be read by an ID Reader Head. This service is a fundamental
requirement.
Table 13 Read WID Service Message Parameter Definition
Parameter Req/Ind Rsp/Conf Description
Head ID M M Specifies Head.
Wafer ID - M Wafer ID.
Result Status - M Result information on the status of the request.
Status - M Status information.
11.4.7 Reset
11.4.7.1 Reset is used to re-initialize the WIDR.
Table 14 Reset Service Definition
Parameter Req/Ind Rsp/Conf Description
Result Status - M Result information on the status of the request.
11.4.8 Set Attributes
11.4.8.1 Set Attributes is used to set attributes of the WIDR. This is an optional service. Attempts to set attributes
with read-only (RO) access shall be denied. Attribute values returned are those as read following the set operation.
Table 15 Set Attributes Service Definition
Parameter Req/Ind Rsp/Conf Description
Head ID M M Specifies Head or Subsystem.
Attribute ID M - AttributeIDs.