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TRIMETHYLBOR ATE SEMI C49-0699 © SEMI 1 995, 1999 1 SEMI C49-0699 GUIDELINE FOR TRIMETHYLBORAT E This guideline wa s technically approved by the Global Process Che micals Committee and is the direct responsi bility of th…

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1,1,1-TRICHLOROETHANE, FURNACE GRADE SEMI C48-0699
E
© SEMI 1988, 2000 3
Table 1 Impurity Limits and Other Requirements for
1,1,1-Trichloroethane, Furnace Grade
Previous SEMI Reference # C1.26-92 C7.15-91
Grade 1 Tier A
(Specification) (Guideline)
Assay (CCl
3
,CH
3
) 99.9% min 99.95% min
Color (APHA) 10 max 5 max
Water (H
2
O) 25 ppm max 15 ppm max
Acidity
0.3 µeg/g max
--
Acidity ( as HCl) -- 10 ppm max
Phosphate (PO
4
) 0.01 ppm max --
Residue after Evaporation 5 ppm max --
Aluminum (Al) 0.005 ppm max 1 ppb max
Antimony (Sb) 0.01 ppm max 1 ppb max
Arsenic (As) 0.01 ppm max 2 ppb max
Barium (Ba) 0.01 ppm max 1 ppb max
Bismuth (Bi) 0.005 ppm max 1 ppb max
Boron (B) 0.001 ppm max 1 ppb max
Cadmium (Cd) 0.005 ppm max 1 ppb max
Calcium (Ca) 0.01 ppm max 1 ppb max
Chromium (Cr) 0.005 ppm max 1 ppb max
Cobalt (Co) 0.005 ppm max 1 ppb max
Copper (Cu) 0.005 ppm max 1 ppb max
Gallium (Ga) 0.01 ppm max 1 ppb max
Gold (Au) 0.005 ppm max 1 ppb max
Iron (Fe) 0.01 ppm max 1 ppb max
Lead (Pb) 0.005 ppm max 1 ppb max
Lithium (Li) 0.005 ppm max 1 ppb max
Magnesium (Mg) 0.005 ppm max 1 ppb max
Manganese (Mn) 0.005 ppm max 1 ppb max
Mercury (Hg) 0.005 ppm max 1 ppb max
Nickel (Ni) 0.01 ppm max 1 ppb max
Phosphorous (P) -- 1 ppb max
Potassium (K) 0.005 ppm max 1 ppb max
Silicon (Si) 0.01 ppm max --
Silver (Ag) 0.005 ppm max 1 ppb max
Sodium (Na) 0.005 ppm max 1 ppb max
Strontium (Sr) 0.01 ppm max 1 ppb max
Tin (Sn) 0.005 ppm max 1 ppb max
Titantium (Ti) 0.01 ppm max 1 ppb max
Zinc (Zn) 0.005 ppm max 1 ppb max
Particles in bottles:
size, #/mL
--
≥ 0.2 µm, 5 max
≥ 0.1 µm, 30 max
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
the contents in whole or in part is forbidden without express written
consent of SEMI.
TRIMETHYLBORATE SEMI C49-0699 © SEMI 1995, 19991
SEMI C49-0699
GUIDELINE FOR TRIMETHYLBORATE
This guideline was technically approved by the Global Process Chemicals Committee and is the direct
responsibility of the North American Process Chemicals Committee. Current edition approved by the North
American Regional Standards Committee on April 23, 1999. Initially available on SEMI OnLine May 1999;
to be published June 1999. This document replaces SEMI C7.21 in its entirety. Originally published in
1995.
1 Purpose
1.1 The purpose of this document is to standardize
requirements for trimethylborate used in the
semiconductor industry and testing procedures to
support those standards. Test methods have been shown
to give statistically valid results. This document also
provides guidelines for grades of trimethylborate for
which a need has been identified. In the case of the
guidelines, the test methods may not have been
statistically validated yet.
2 Scope
2.1 The scope of this document is all grades of
trimethylborate used in the semiconductor industry.
3 Limitations
3.1 None.
4 Referenced Documents
4.1 None.
5 Terminology
5.1 None.
6 Physical Property (for information only)
Density at 20°C 0.915 g/mL
Boiling Point 68.7°C
7 Requirements
7.1 The requirements for trimethylborate for Tier A
are listed in Table 1.
8 Grade 1 Procedures
8.1 This section does not apply to this chemical.
9 Grade 2 Procedures
9.1 This section does not apply to this chemical.
10 Grade 3 Procedures
10.1 This section does not apply to this chemical.
11 Grade 4 Procedures
11.1 This section does not apply to this chemical.
12 Grade 5 Procedures
12.1 This section does not apply to this chemical.
13 VLSI Grade Procedures
13.1 This section does not apply to this chemical.
14 Tier A Procedures
14.1 Standardized test methods are being developed
for all parameters at the purity levels indicated. Until
standardized test methods are published, test
methodology shall be determined by user and producer.
The Process Chemicals Committee considers a test
method to be valid only if there is a documented
recovery study showing a recovery of 75 - 125%.
Recovery is for a known sample spike at 50% of the
specified level.
15 Tier B Procedures
15.1 This section does not apply to this chemical.
16 Tier C Procedures
16.1 This section does not apply to this chemical.
17 Tier D Procedures
17.1 This section does not apply to this chemical.
SEMI C49-0699 © SEMI 1995, 1999 2
Table 1 Impurity Limits and Other Requirements for Trimethylborate
Previous SEMI Reference # C7.21-95
Tier A
(Guideline)
Assay (B(CH
3
O)
3
) 99.95% min
Water (H
2
O) 25 ppm max
Aluminum (Al) 5 ppb max
Arsenic (As) 5 ppb max
Barium (Ba) 5 ppb max
Bismuth (Bi) 5 ppb max
Calcium (Ca) 10 ppb max
Chromium (Cr) 5 ppb max
Cobalt (Co) 5 ppb max
Copper (Cu) 5 ppb max
Gallium (Ga) 5 ppb max
Gold (Au) 5 ppb max
Iron (Fe) 5 ppb max
Lead (Pb) 5 ppb max
Lithium (Li) 5 ppb max
Magnesium (Mg) 5 ppb max
Manganese (Mn) 5 ppb max
Nickel (Ni) 5 ppb max
Potassium (K) 5 ppb max
Silver (Ag) 5 ppb max
Sodium (Na) 5 ppb max
Strontium (Sr) 5 ppb max
Tin (Sn) 5 ppb max
Zinc (Zn) 5 ppb max
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.