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SEMI E49.2-1104 © SEMI 1995, 2004 4 7 Utility Recommendations NOTE 3: These are minim um utility recommendations for the media used during qualification of an Assembly. 7.1 Ni trogen  Nitrogen qual ity should meet requi…

SEMI E49.2-1104 © SEMI 1995, 2004 3

6 Performance Guidelines

Table 1 Overview of Recommended Tests

Test Frequency Performance Guideline Test Method/Reporting

of Results

Hydrostatic Pressure Every Assembly shipped to

the end user

No visible leakage & < 5% pressure

decay

Section 9.1

Section 9.2

Ultrapure Water Flush Every Assembly shipped to

the end user

Resistivity: > 18 meg ohm-cm @

25°C (77°F)

Allowable TOC adders (ppb): <

7.5

Section 9.1

Section 9.3

Particle Periodic testing – see Section

10.7 and 10.8

Allowable Particle adders

(particles/L >

0.1 µm) : < 120

Section 9.1

Section 9.4

Ionic Contamination Periodic testing – see Sections

10.7 and 10.8

Allowable ionic adders (ppb):

F-: <

7.5

Cl-: <

0.40

-, Br-, NO

-, HPO

=, SO

0.05

Section 9.1

Section 9.5

Metallic Contamination Periodic testing – see Sections

10.7 and 10.8

Allowable metallic adders (ppb):

Al, Ba, B, Ca, Cr, Cu, Fe, Pb, Li, Mg,

Mn, Ni, K, Na, Sr, and Zn:

0.02

Section 9.1

Section 9.5

NOTE 2: Table 1 provides an overview of the tests recommended within this document and associated performance criteria. For

detailed explanations of testing frequency, test methods, and some examples of tests, refer to the sections identified within the

table.

SEMI E49.2-1104 © SEMI 1995, 2004 4

7 Utility Recommendations

NOTE 3: These are minimum utility recommendations for

the media used during qualification of an Assembly.

7.1 Nitrogen

 Nitrogen quality should meet requirements of

SEMI C59.

 Particle filtration should be 99.99999% removal of

.003 micron particles.

7.2 Ultrapure Water

 Resistivity  18 Mohm-cm @ 25°C (77°F)

 TOC — < 10 ppb

 Silica — < 5 ppb

 Particles — (>

0.1 µm) < 500 particles/L

 Anions (F-, Cl-, NO2-, Br-, NO3-, HPO4-, SO4-) <

0.10 ppb

 Metals (Al, Ba, B, Ca, Cr, Cu, Fe, K, Li, Mg, Mn,

Na, Ni, Pb, Sr, Zn) < 0.05 ppb

 Bacteria — < 10 colonies/100 milliliter

NOTE 4: If testing requirements dictate, access to higher

quality Ultrapure Water may be appropriate. Additional

information related to Ultrapure Water facility design and

terminology may be obtained in SEMI F61, Guide for

Ultrapure Water System Used in Semiconductor Processing.

7.3 Clean Dry Air (CDA) or Oil Free Air — Uses

include pneumatic control and air actuation. CDA is

not recommended for use on cleaned wetted surfaces.

Nitrogen is recommended for drying cleaned wetted

surfaces because the purity level is clearly defined and

controlled.

8 Related Documents

8.1 International SEMATECH Documents

SEMASPEC 92010936B — Provisional Test Method

for Determining Leachable Trace Inorganics in Ultra

Pure Water Distribution System Components

SEMASPEC 92010937B — Provisional Test Method

for the Evaluation of Bulk Polymer Samples of Ultra

Pure Water Distribution System Components

SEMASPEC 92010949B — Provisional Test Method

for Determining Particle Contribution and Retention by

Ultra Pure Water Distribution System Components

3 International SEMATECH, 2706 Montopolis Drive, Austin, TX

78741, USA, Website: www.sematech.org

SEMASPEC 92010955B — Provisional Test Method

for Analyzing Plastic Surface Condition of Ultra Pure

Water Distribution System Components (SEM Method)

8.2 ASTM Documents

ASTM D5173-97  Standard Test Method for On-

Line Monitoring of Carbon Compounds in Water by

Chemical Oxidation, by UV Light Oxidation, by Both,

or by High Temperature Combustion Followed by

NDIR or by Electrolytic Conductivity

9 Sampling and Analysis Methodology

9.1 General Recommendations for all Tests

9.1.1 All test reports should include:

 Confidence intervals and detection or reporting

limits,

 All units of measure,

 As detailed a description as possible of the

Assembly tested including part number and

manufacturing date,

 Date of test and initials of person performing test,

 Additional information as specified in the specific

test recommendations within this document,

 Any and all relevant data collected during testing

should be summarized and included,

 Recording of Ultrapure Water and Nitrogen quality

used to perform test, and

 For Sections 9.3 through 9.5 inlet and outlet water

quality.

9.1.2 Trained and qualified personnel should perform

all sampling and testing.

9.1.3 All instrumentation shall be calibrated with

standards traceable to NIST or the equivalent national

standard where those standards exist. The type of

instrument(s) manufacturer, model #, serial # or I.D #,

and most recent calibration date should be available.

9.1.4 If using two separate online instruments for inlet

and outlet testing, determine any difference in the two

readings and include that in the final calculations.

9.1.5 Incoming and outgoing water should be sampled

as close as possible to the Assembly’s liquid supply

point and the Assembly’s delivery point respectively.

Where there are multiple inlets and/or outlets for an

Assembly, a single representative inlet and outlet

should be selected for this testing. However, all inlets

and outlets should be flushed in a consistent manner

SEMI E49.2-1104 © SEMI 1995, 2004 5

such that the tests are representative of the Assembly

performance.

9.1.6 For optimum results, the distance between a

sample port and an instrument should be minimized.

is recommended that components comply with SEMI

F57 and the assembly and design should be in

accordance with SEMI E49.7.

9.1.7 Operate valves to ensure there is no entrapment

and to displace any air prior to beginning a test.

9.1.8 Filter elements contained within the Assembly

under test should not be included during a test as they

may mask results and will need to be replaced

following the test.

9.1.9 Assemblies

should be dried with Nitrogen and

capped following any testing with ultrapure water and

prior to shipment.

9.2 Hydrostatic Pressure Test – This test is required

for every Assembly shipped directly to an end user.

This test may also be required periodically at other

points in the supply chain.

9.2.1 The intent of this test is to eliminate Assembly

leaks when an assembly is initially exposed to pressure

and temperature (up to and including the

manufacturer’s maximum recommended operating

pressure and temperature) at the end user’s facility.

The user of this test is encouraged to review

“Hydrostatic Pressure and Leak Testing of Polymer

Piping Systems Used in High-purity Water

Applications” (Mayer, Burkhart, Rydzewski) for a

thorough discussion of standards, and how the physical

properties of polymers impact testing practices.

9.2.2 The Hydrostatic Pressure Test conditions are the

manufacturer’s maximum recommended pressure at

ambient temperature. However, it is incumbent upon

the manufacturer to ensure that the assembly will be

leak free when exposed to maximum pressure and

maximum temperature at the end user’s facility. If the

test conditions recommended here do not result in

initial leak free operation for the end user, it is

incumbent upon the end user and manufacturer to agree

on appropriate corrective action(s) to comply with the

intent of this Hydrostatic Pressure Test. This may

include testing at elevated media temperatures.

9.2.3 Test Method

9.2.3.1 Test Media — Ultrapure Water at ambient

temperature.

9.2.3.2 Test Pressure — Manufacturer’s maximum

recommended operating pressure.

9.2.3.3 Test Procedure

 Flush system at maximum rated flow to remove

entrapped air.

 Keep assembly at constant temperature during test.

 Pressurize to the Manufacturer’s maximum

recommended operating pressure and wait 15

minutes.

 Repressurize to Manufacturer’s maximum

recommended operating pressure and wait 15

minutes.

 Repressurize to Manufacturer’s maximum

recommended operating pressure and wait 30

minutes.

 Repressurize to Manufacturer’s maximum

recommended operating pressure.

 Monitor the pressure for 15 minutes to ensure

compliance with Table 1 requirement of <

decay in pressure.

 Record pressure readings at the beginning and end

of each waiting period.

9.2.4 Hydrostatic Pressure Test Example

Hydrostatic Pressure Test Example

0 1530456075

Time (minutes)

Pressure (psig)

Figure 1

Hydrostatic Pressure Test Example

 Test Media: Ultrapure Water

 Test Media Temperature: 20C

 Manufacturer’s maximum recommended operating

pressure: 40 psig.

 Assembly is pressurized to 40 psig for 15 minutes.

 Assembly is repressurized to 40 psig for 15

minutes.

 Assembly is repressurized to 40 psig for 30

minutes.