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SEMI E125-0305 © SEMI 2003, 2005 27 10.5.3.3.5 EnumeratedInte ger — Represents a legal val ue for an integer enumeration. 10.5.3.3.6 EnumeratedInteger Attribute Definition Table Table 45 Enumerate d Integer Attribute Def…

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SEMI E125-0305 © SEMI 2003, 2005 26
10.5.3.2.4.2 Field Association Definition Table
Table 42 Field Association Definition
Association Role Name Definition Comments
typeInformation Describes the data type of this field. Structured data, must be one and only one of the
following: any type derived from
ParameterType, or a ParameterTypeDefinition
(can be a recursive reference from within the
same ParameterTypeDefinition).
10.5.3.3 Describing Enumerations
10.5.3.3.1 Enumerations are single-valued types whose possible values are restricted to one of a set of pre-defined
values. Figure 16 shows how to describe the valid settings for an enumeration as an ordered collection of integer or
string values. For both integer and string enumerations, each value in the enumeration represents a legal value for
the type being described.
description
Enu merationTyp e
des cription
value
EnumeratedInteger
des cription
value
En umeratedStrin g
values 1
1..*
values1
1..*
{XOR}
ParameterT ype
Figure 16
Describing an Enumeration
10.5.3.3.2 EnumerationType — Represents an enumeration. EnumerationType may consist of either a set of
integers, described by the EnumeratedInteger class, or a set of strings, described by the EnumeratedString class.
10.5.3.3.3 EnumerationType Attribute Definition Table
Table 43 EnumerationType Attribute Definition
Attribute Name Definition Form
description A description of the meaning or purpose of the
enumeration as a whole.
Text.
10.5.3.3.4 EnumerationType Association Definition Table
Table 44 EnumerationType Association Definition
Association Role Name Definition Comments
values The set of values that comprise this enumeration. One of the following:
ordered list of one or more elements of type
EnumeratedInteger
ordered list of one or more elements of type
EnumeratedString
SEMI E125-0305 © SEMI 2003, 2005 27
10.5.3.3.5 EnumeratedInteger — Represents a legal value for an integer enumeration.
10.5.3.3.6 EnumeratedInteger Attribute Definition Table
Table 45 EnumeratedInteger Attribute Definition
Attribute Name Definition Required Form
value A legal value for the enumeration. Y Integer, must be unique across all
values for this enumeration.
description A description of the meaning or purpose of this
enumeration value.
Y Text.
10.5.3.3.7 EnumeratedString — Represents a legal value for a string enumeration.
10.5.3.3.8 EnumeratedString Attribute Definition Table
Table 46 EnumeratedString Attribute Definition
Attribute Name Definition Required Form
value A legal value for the enumeration. Y Text, must be unique across all values
for this enumeration.
description A description of the meaning or purpose of this
enumeration value.
Y Text.
10.5.4 SEMI Standard Type Mapping
10.5.4.1 The following table describes how to map SEMI type terminology to the various primitive and composite
types defined in this document. This convention shall be followed when describing types that represent types
defined in a SEMI standard that is described by metadata.
Table 47 SEMI Type Mapping
SEMI Type Name Type Description to use Comments
integer, positive integer,
negative integer, non-
negative integer, non-
positive integer
IntegerType
float, floating point, real RealType
binary, bit string, byte BinaryType
boolean BooleanType
text StringType If a limitation on the number of characters is specified, the maxCharacters
attribute of the StringType class shall be set equal to the number of
characters that is supported by the supplier.
enumerated EnumeratedInteger Each enumeration shall start at value 0, and is sequenced in increments of 1
according to the order in which the enumerated values are listed in the
corresponding standard. The description field for each enumerated value
shall be equal to the text name provided for the enumerated value in the
corresponding standard.
structure StructureType Each field within the structure shall be named exactly as written in the
corresponding standard. The type of each field shall be mapped using the
conventions described in this table.
list ArrayType Lists of integers, floats, binaries, enumerateds, or structures are described as
arrays of the corresponding primitives or composite types.
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10.5.5 Parameter Values
10.5.5.1 Any equipment interface used in conjunction with this specification must provide a means to communicate
Parameter values corresponding to the primitive and composite type definitions described in this section. Since this
representation will depend on the technology used, the technology-specific specifications for such systems shall
provide a mapping between the type descriptions supported by this specification and the representation of their
corresponding values.
10.6 Units
10.6.1 Figure 17 shows the Unit class that describes a specific unit used by the equipment. Any unit that can be
used for numeric data can be described with this class. This specification does not define a system of units, though
suppliers shall describe at least one unit that represents pure numbers (a “unit-less” unit).
Figure 17
Describing Units
10.6.2 Unit Attribute Definition Table
Table 48 Unit Attribute Definition
Attribute Name Definition Required Form
id The identifier for this unit. Y Text, unique across all units defined
for this equipment.
name The human-readable name for this unit. Y Text.
description A description of the unit, its dimensionality and/or
conversion factors, etc.
Y Text.
symbol The abbreviation used to represent the unit. N Text.
10.7 Exceptions
10.7.1 Figure 18 shows how to describe implemented exceptions and their associated data. The attributes and
associations of the Parameter class are not shown for clarity (see Section 10.4 for more information about
Parameters).
id
desc ript ion
severity
Exception
setData 1
0..*
clearData0. .1
0..*
Parameter
Figure 18
Describing Exceptions