semi合集-English.pdf - 第6909页
SEMI S8-0705 © SEMI 1995, 2005 6 6.5 Highest priority should be placed on issue s which have the potential of resulting i n injury to personnel. Secondary priority should be placed on issues which have the potential of r…
SEMI S8-0705 © SEMI 1995, 2005 5
5.2.40 static posture — a fixed position, with minimal movement of the particular body parts.
5.2.41 stooping — bending the head and shoulders, or the general body, forward and downward from an erect
position.
5.2.42 task — a group of related job elements performed within the work cycle and directed toward a specific
objective.
5.2.43 task analysis — an analytical process employed to determine the specific actions required of the user when
operating, maintaining, or servicing equipment, or doing work on single or multiple tools. Within each task, steps
are described in terms of the perception, decision-making, memory storage, posture, and biomechanical
requirements, as well as the expected errors.
5.2.44 tip pinch — grip in which the object is held between the tips of the thumb and index finger.
5.2.45 user — person interacting with the equipment. Users may include operators, maintainers, service personnel,
and others.
5.2.46 user population — a specific cross section of persons that may reasonably be expected to interact with the
equipment to perform operation, maintenance, or service tasks.
5.2.47 validation testing — testing to confirm effectiveness of design. An item’s “effectiveness” is viewed in terms
of its functional design, specific to SEMI S8.
5.2.48 WIP nest — a storage structure for Work in Process (WIP).
5.2.49 work environment — the location where semiconductor devices and associated support processes are
designed, developed, manufactured, assembled, measured, and tested.
5.2.50 workplace layout — the physical arrangement of equipment in the facility.
5.2.51 workspace — the available area where the user is expected to operate, maintain, and service the equipment.
5.2.52 workstation — the location where equipment controls and displays are found or the location of
loading/unloading of material.
6 General Guidelines
6.1 Ergonomics-Related Safety Issues — Ergonomics-related safety issues may exist whenever equipment design,
installation, operation, service, or maintenance factors result in task demands that exceed the information processing
or physical capabilities of properly trained users. For example, ergonomics-related safety issues may result from:
6.1.1 Static or awkward postures,
6.1.2 Repetitive motion,
6.1.3 Poor access, inadequate clearance, and excessive reach,
6.1.4 Lifting of heavy or bulky components,
6.1.5 Displays that are difficult to read or understand,
6.1.6 Controls that are confusing to operate or require too much force, and
6.1.7
Use of non-specific warnings or faults to communicate machine problems.
6.2 Safety-related issues should be designed out or otherwise reduced to an acceptable level prior to production.
Ergonomics-related safety issues are reduced by implementing sound ergonomics engineering principles in design,
and structuring job requirements around human performance capabilities and limitations.
6.3 Equipment should be designed to reduce or eliminate the potential types of error caused by human-machine or
human-task mismatch (e.g., inadvertent actuation, errors of omission or commission).
6.4 Engineering controls are the preferred means to reduce hazards. Where an engineering approach to ergonomic
hazard control is not feasible, the user should implement administrative controls to mitigate hazards by reducing the
duration, frequency, or severity of exposure.
SEMI S8-0705 © SEMI 1995, 2005 6
6.5 Highest priority should be placed on issues which have the potential of resulting in injury to personnel.
Secondary priority should be placed on issues which have the potential of resulting in significant damage to
equipment.
6.6 Information exchange between equipment suppliers and users regarding human-machine interface issues is
encouraged during the development stage, as part of beta site testing, after equipment is in full production, and
throughout the life cycle of the equipment.
6.7 Ergonomics evaluation should be performed throughout the conception, design, build, and install phases to
determine whether ergonomics guidelines have been met. The examination should yield a completed SESC
document (see Appendix 1).
6.7.1 Equipment evaluation should identify risk factors associated with equipment design that affect operation,
training, installation, maintenance, or service tasks.
6.7.2 Use of mock-ups and simulations are beneficial to identify and resolve ergonomic issues before the design is
finalized. Testing should be performed with individuals who are representative of the user population under
anticipated working conditions.
6.7.3 The evaluation should include consideration of multiple pieces of equipment under the control of one
individual, resulting in an operation being repeated several times sequentially. The supplier should state the criteria
for this scenario and include it in the report.
6.8 The overall objective is to provide for equipment effectiveness and for worker safety, convenience, and comfort
when operating and maintaining the equipment.
6.9 Damage or undue deterioration of required garments or PPE should not occur as a result of equipment
operation. Controls, such as knobs and switches, should be designed to be compatible with gloves worn by users for
contamination control or personal protection. For example, cleanroom gloves typically reduce grip strength by 15%.
Equipment displays should consider the potential for impaired vision and hearing that may occur with the use of
cleanroom hoods, chemical goggles, or face shields.
6.10 Technical documentation (e.g., manuals) and on-equipment instructions (e.g., labels, indicators and screen
menus) should be consistent in action, terminology, symbols, and format.
6.11 Equipment customized to meet specific customer requirements should not increase the level of ergonomic risk.
6.12 For recommendations on human interface design, see SEMI E95.
NOTE 2: SEMI E95 provides information on human computer interface. It is not the intent of SEMI S8 to incorporate the
requirements of SEMI E95 by reference.
7 Documentation
7.1 The supplier should provide an evaluation of the equipment to SEMI S8 using Appendix 1, “Supplier
Ergonomic Success Criteria” for measurable criteria. The evaluation should include a determination of the level of
risk associated with non-conformance items. Evaluation of risk should be compatible with the SEMI S10 severity
categories; catastrophic, severe, moderate, and minor.
7.1.1 For each item in Appendix 1 which does not meet the criteria, the evaluation report should include the
measured actual dimensions, and state any supporting rationale for non-compliance. Supporting rationale may
include test data or documented engineering judgment. EXCEPTION: For Section 1, the manual material handling
analysis, the evaluation report should provide documented calculations regardless of the outcome of the analysis.
7.1.2 The evaluation report should also include the following information: manufacturer’s model number, serial
number of unit evaluated, date the equipment was evaluated, a list of all tasks which were evaluated as part of the
analysis and the name of the person performing the evaluation.
7.2 Supplier provided documentation should include administrative controls intended by the supplier to mitigate
ergonomic risks.
7.3 Supplier provided documentation should illustrate any installation requirement necessary to meet SEMI S8
guidelines (e.g., Diagram should show clearance area required for opening hinged panels, operator working area,
allowable range of vertical foot adjustment to keep ergonomic measurements within SESC acceptable limits, etc.).
SEMI S8-0705 © SEMI 1995, 2005 7
7.4 The evaluation should specify an installation reference point for each independently adjustable section of the
equipment for vertical measures. If there is a supplier recommended installation height, the reference for the
evaluation should be the same. This installation height should be included in the supplier’s installation
documentation.
NOTE 3: Installation documentation may include installation manuals and other information provided by supplier addressing
installation concerns.
8 Related Documents
8.1 SEMI Standard
SEMI S13 — Safety Guidelines for Operation and Maintenance Manuals Used with Semiconductor Manufacturing
Equipment
8.2 ANSI Documents
ANSI Z535.4 — Product Safety Signs and Labels
8.3 CEN/CENELEC Standards
6
EN 614-1 — Safety of Machinery — Ergonomic Design Principles, Part 1. Terminology and General Principles
EN 894-1 — Safety/Ergonomics for Operator Interaction
EN 50099-2 — Safety/Marking Principles
8.4 NIOSH Documents
7
NIOSH Publication No. 81-122 — Work Practices Guide for Manual Lifting, National Institute for Occupational
Safety and Health, 1981.
Revised NIOSH Equation, Ergonomics, Vol. 36, No. 7, 1993.
8.5 SAE Document
8
SAE J833 — Human Physical Dimensions
8.6 SEMATECH Documents
9
Preventing User-Hostile Interfaces in IC-Fab Equipment — Ergonomic Approaches for Preventing Ten Frequent
Interface Problems, Miller, Dwight P. and Whitehurst, Hugh,
SEMATECH Technology Transfer #92091299NA-
ENG, Nov. 1992.
SEMATECH SCC User interface Style Guide, 1.0. 92061179A-ENG, August 21, 1992.
8.7 Other Documents
Bailey, Robert W., Human Performance Engineering, Prentice Hall, 1989.
Eastman Kodak Company, Ergonomic Design for People at Work, Vols. 1 and 2, Van Nostrand-Reinhold, 1983.
EN ISO 7250 — Basic human body measurements for technological design
EN ISO 14738 — Safety of Machinery, Anthropometric requirements for the design of workstations at machinery
Grandjean, E., Fitting the Task to the Man: A Textbook of Occupational Ergonomics (4th Ed.), Taylor & Francis,
1988.
6 European Committee for Standardization (CEN)/European Committee for Electrotechnical Standardization (CENELEC), Central Secretariat,
rue de Stassart 35, B-1050 Brussels, Belgium, Website: www.cenelec.com.
7 National Institute for Occupational Safety and Health, Technical Information Branch, 4676 Columbia Pkwy, Cincinnati, OH 45226. Website:
www.niosh.com.my.
8 Society of Automotive Engineers, 400 Commonwealth Drive, Warrendale, PA 15096 USA. Website: www.sae.org.
9 International SEMATECH, 2706 Montopolis Drive, Austin, TX 78741, USA., Website: www.sematech.org