semi合集-English.pdf - 第75页
SEMI E6-0303 © SEMI 1982, 2003 21 Data Sheet 800 – Gases (See SEMI E6 Section 16) 800 Gases A B C D E F 1 Equipment Component Gas Connection Number Connection Label on Equipment Utility Type Line Source Gas State 2 text …
SEMI E6-0303 © SEMI 1982, 2003 20
line comes from a facilities source enter facilities
system. For example: 803 or facilities system.
16.2.6 Gas State (800F) — Enter information
regarding the gases properties such as liquefied gas,
pure gas, or gas mixture.
16.2.7 Purity Requirements (800G) — List minimum
purity requirements and basis of purity. For example:
ppm, vol.%, wt.%. If applicable indicate SEMI Gas
Standards.
16.2.8 Contaminants (800H) — Enter the type and
value of significant impurities. For example: CH4 < 2
ppm.
16.2.9 Filtration (800I) — If a filter is required prior to
the equipment point of connection enter the filter
specification (% removal at maximum particle size).
For example: 100% at 0.02 micron. If not enter n/a.
16.2.10 Minimum Pressure (800J) — Enter the
minimum supply pressure necessary for the equipment
to operate correctly.
16.2.11 Maximum Pressure (800K) — Enter the
highest supply pressure that can be used to operate the
equipment correctly.
16.2.12 External Regulator (800L) — If a regulator is
required prior to the equipment point of connection
enter the regulator specification. If not enter n/a.
16.2.13 Idle Average Flow (800M) — Enter the
average flow rate when equipment is in idle condition.
16.2.14 Process Average Rate (800N) — Enter the
average flow rate for the processing cycle.
16.2.15 Maximum Flow (800O) — Enter the maximum
flow rate (for equipment processing cycle or idle
condition, whichever is greater).
16.2.16 Equipment Component Fitting Size (800P) —
Enter the line or fitting size of the connection provided
on the equipment component. For double containment
this would be the inner fitting. Use the units indicated
by the fitting manufacturer. For example: 6 or 0.25. In
row 2 enter or select the units of measure for the
specified fitting size. For example: mm or inches.
16.2.17 Equipment Component Fitting Material
(800Q) — Enter a general description of the fitting
material of the connection provided on the equipment
component. For example: 316 Stainless Steel or Brass.
16.2.18 Equipment Component Fitting Type (800R) —
Enter the generic style of fitting of the connection
provided on the equipment component. Be sure to
include type and gender of the fitting. For example:
Face Seal or Female Pipe Thread (FPT).
16.2.19 Double Containment (800S) — Enter yes if
double containment is necessary for utility type
supplied through the connection, enter no if not
necessary.
16.2.20 Equipment Component Double Containment
Fitting Size (800T) — Enter the line or fitting size of the
double containment connection on the equipment. This
would be the outer fitting. Use the units indicated by
the fitting manufacturer. For example: 12 or 0.50. In
row 2 enter or select the units of measure for the
specified fitting size. For example: mm.
16.2.21 Equipment Component Double Containment
Fitting Material (800U) — Enter a general description
of the fitting material of the double containment
connection the equipment. For example: 316 Stainless
Steel or Monel.
16.2.22 Equipment Component Fitting Type (800V) —
Enter the generic style of fitting of the double
containment connection on the equipment. Be sure to
include the type and gender of fitting provided on
equipment. For example: Flare or Female Pipe Thread
(FPT).
16.2.23 Drawing References (800W) — Enter
references, such as drawing numbers, for any drawings,
schematics, instructions, jigs or fixtures showing this
connection. For example: connection template XXXXX
and P&ID YYYYYY. Submit referenced material to
equipment purchaser with this data sheet.
16.2.24 Gases Comments (800X) — Enter any
comments necessary to clarify data provided for this
connection. For example: Enter any important
information about the character of the gas, gas line, or
connection that is not indicated in any of the other cells
related to this connection.
SEMI E6-0303 © SEMI 1982, 2003 21
Data Sheet 800 – Gases (See SEMI E6 Section 16)
800 Gases
A B C D E F
1
Equipment
Component
Gas Connection
Number
Connection
Label on
Equipment
Utility
Type
Line
Source
Gas
State
2
text text text text text text
3
4
5
6
800 Gases
G H I J K L
1
Purity
Requirements
Contaminants Filtration Minimum
Pressure
Maximum
Pressure
External
Regulator
2
text text text Pa Pa text
3
4
5
6
800 Gases
M N O P Q R
1
Idle
Average Flow
Process
Average Flow
Maximum
Flow
Equipment
Component Fitting
Size
Equipment
Component
Fitting
Material
Equipment
Component
Fitting
Type
2
lpm lpm lpm mm or inches text text
3
4
5
6
800 Gases
S T U V W X
1
Double
Containment
Equipment
Component
Double
Containment
Fitting
Size
Equipment
Component
Double
Containment
Fitting
Material
Equipment
Component
Double
Containment
Fitting
Type
Drawing References Gases Comments
2
yes or no mm or inches text text text
text
3
4
5
6
SEMI E6-0303 © SEMI 1982, 2003 22
17 Vacuum Data Sheet
17.1 Include in the Vacuum Data Sheet the requested
information for equipment connections to centralized
process vacuum systems and local vacuum pump
systems.
17.2 Data Sheet 900, Vacuum contains the following
items.
17.3 Equipment Component (900A) — Enter the name
of the equipment component where the connection is
located. The name should be the same name used in
Data Sheet 200 and 300. For example: Mainframe,
Vacuum Pump, or Chiller.
17.3.1 Vacuum Connection Number (900B) — Enter a
unique connection number for every vacuum
connection. For example: 901, 902, 903, and so on.
17.3.2 Connection Label on Equipment (800C) —
Enter the name found on the label that identifies this
physical connection on the equipment. For example
Process Vac.
17.3.3 Utility Type (900D) — Enter the name of
vacuum service to be provided through the connection.
For example: Process Vacuum System or Local
Vacuum Pump.
17.3.4 Line Source (900E) — Identify the source of the
vacuum line for this connection. If the line comes from
a provided component covered in the data sheets enter
the connection number(s) at the other end of the line. If
the line comes from a facilities source enter facilities
system. For example: 903 or facilities system.
17.3.5 Vacuum Conveyed Process Wastes (900F) —
Enter the specific chemical(s) of any potential
byproducts that may come through the referenced
vacuum connection. In particular, identify any
discharge that might be regulated by the semiconductor
manufacturers’ discharge permit. For example:
tungsten-fluorine-oxygen precipitates or
pyrophosphoric acid condensates.
17.3.6 Minimum Vacuum (900G) — Enter the
minimum vacuum for the equipment to operate
correctly.
17.3.7 Maximum Vacuum (900H) — Enter the highest
vacuum that can be used to operate the equipment
correctly.
17.3.8 Maximum Vacuum Fluctuation (900I) — Enter
the maximum vacuum change during the processing
cycle for the equipment to operate correctly.
17.3.9 Maximum Flow (900J) — Enter the maximum
flow rate (for the equipment processing cycle or idle
condition whichever is greater).
17.3.10 Heating and Insulating (900K) — Enter any
foreline heating and insulating requirements.
17.3.11 Equipment Component Fitting Size (900L) —
Enter the fitting size of the connection provided on the
equipment component. In row 2 enter or select the units
of measure for the specified fitting size. For example:
mm or inches.
17.3.12 Equipment Component Fitting Material
(900M) — Enter a general description of the fitting
material of the connection provided on the equipment
component. For example: 316 SS.
17.3.13 Equipment Component Fitting Type (900N) —
Enter the generic style of fitting of the connection
provided on the equipment component. Be sure to
include type and gender of the fitting. For example: ISO
KF Flange.
NOTE 7: SEMI E73 specifies the physical and electrical
interfaces for dry pump and SEMI E74 specifies the physical
and electrical interfaces for turbomolecular pumps.
17.3.14 Drawing References (900O) — Enter
references, such as drawing numbers, for any drawings,
schematics, instructions, jigs or fixtures showing this
connection. For example: connection template XXXXX
and P&ID YYYYY. Submit referenced material to
equipment purchaser with this data sheet.
17.3.15 Vacuum Comments (900P) — Enter any
comments necessary to clarify data provided for this
connection. For example: vacuum switch will initiate
tool alarm if vacuum falls below 10
-4
Torr (1.33 x 10
-2
Pa), maximum allowed foreline length, maximum
number of bends or condensate cleaning requirements.