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SEMI F79-0703 © SEMI 2003 8 APPENDIX 1 GASES BY CATEGORY NOTICE : The material in this appendix is an official pa rt of SEM I F79 and was approved by full letter bal lot procedur es on April 11 , 2003. SEMI Gas # Chemica…

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SEMI F79-0703 © SEMI 2003 7
8.76 J.M. Harris, et. al. “Etching Characteristics of
Silicon Carbide in Hydrogen.” Jl.E.C.S., 116 (3), Mar.
1969, 380.
8.77 X. Wang, et al. “Gas-Phase Silicon Etching with
Bromine Trifluoride.” Proc.Transducers ’97, 1997
Int.Conf. Solid-State Sensors and Actuators, Vol.2,
Chicago, June 1997, 1505.
8.78 H. F. Winters, et al. “The Role of Chemisorption
in Plasma Etching.” J. Appl. Phys., Vol. 49 (10), 5165,
(1978).
8.79 W. Braker, et al. Matheson Gas Data Book, Sixth
Edition, L of C 80-83159, (1980).
8.80 A. Zdunek, et al. “Corrosive Gas Exposure and
Evaluation of Silicon for MEMS Applications.”
Stainless Steel and Surface Analysis Workshop, SEMI,
July 2002.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
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refer to manufacturer' s instructions, product labels,
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herein. These standards are subject to change without
notice.
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SEMI F79-0703 © SEMI 2003
8
APPENDIX 1
GASES BY CATEGORY
NOTICE: The material in this appendix is an official part of SEMI F79 and was approved by full letter ballot
procedures on April 11, 2003.
SEMI Gas # Chemical Name Category Symbol Formula Synonym
6.1 Inert
4 Argon 1 Ar Ar
1 Helium 1 He He
5 Krypton 1 Kr Kr
2 Neon 1 Ne Ne
3 Radon 1 Rn Rn
6 Xenon 1 Xe Xe
6.2 Hydrogen 2
14 Deuterium 2 D2 H
2
2
D2
7 Hydrogen 2 H2 H
2
159 Tritium 2 T2 H
2
3
T2
6.3 Hydrocarbons 3
345 1,3,5,7-Octatetraene 3 C8H10
CH
2
=CHCH=CHC
H=CHCH=CH
2
343 1,7-Octadiyne 3 C8H10
HC≡C(CH
2
)
4
C≡C
H
344 2,6-Octadiyne 3 C8H10
CH
3
C≡CCH
2
CH
2
C
≡CCH
3
342 3-one-2,5-dimethyl hexadiene 3 C8H10
CH
2
=C(CH
3
)C≡C
C(CH
3
)CH
2
178 4-Methyl, 1-Pentene 3 C6H12
(CH
3
)
2
CHCH
2
CH=
CH
2
331 Acetaldehyde Methoxy 3 C3H6O2 CH
3
OCH
2
CHO
184 Acetone 3 C3H6O CH
3
COCH
3
332 Acetone, Hydroxy 3 C3H6O2 CH
3
COCH2OH Acetol
42 Acetylene 3 C2H2
HC≡CH
Ethyne
66 Allene 3 C3H4 CH
2
=C=CH
2
Propadiene
197 Benzene 3 C6H6 C
6
H
6
100 Butadiene 3 C4H6 CH
2
=C=CHCH
3
Methylallene
117 Butane 3 C4H10 CH
3
(CH
2
)
2
CH
3
271 Butanol-1 3 C4H10O
CH
3
CH
2
CH
2
CH
2
O
H
336 Butanol-2 3 C4H10O
CH
3
CH
2
CH(OH)C
H
3
104 Butene 3 C4H8 CH
3
CH
2
CH=CH
2
1-Butene
107 Cisbutene 3 C4H8 CH
3
CH=CHCH
3
Cis-2-Butene
207 Cyclobutane 3 C4H8 C
4
H
8
Tetramethylene
SEMI F79-0703 © SEMI 2003 9
SEMI Gas # Chemical Name Category Symbol Formula Synonym
61 Cyclopropane 3 C3H6 C
3
H
6
208 Diazomethane 3 CH2N2 CH
2
N
2
Acomethylene
338 Diethyl Ether 3 C4H10O C
2
H
5
OC
2
H
5
73 Dimethyl Ether 3 C2H6O CH
3
OCH
3
Methylether
122 Dimethylpropane 3 C5H12 (CH
3
)
4
C Neopentane
54 Ethane 3 C2H6 CH
3
CH
3
136 Ethanol 3 C2H6O CH
3
CH
2
OH
93 Ethyl Acetylene 3 C4H6
CH
3
CH
2
C≡CH
291 Ethyl Formate 3 C3H6O2 HCO
2
C
2
H
5
Ethyl ester formic acid
174 Ethylbenzene 3 C8H10 C
6
H
5
C
2
H
5
38 Ethylene 3 C2H4 CH
2
=CH
2
Ethene
45 Ethylene Oxide 3 C2H4O C
2
H
4
O Acetaldehyde
169 Ethyleneglycol 3 C2H6O2 HOCH
2
CH
2
OH Ethanediol, Glycol
322 Formaldehyde 3 CH2O CH
2
O H2CO; UN1198; BFV
335 Glycidol 3 C3H6O2 CH
2
CHCH
2
OH 1-Propanol, 2,3 epoxy
333 Glycol Methylene Ether 3 C3H6O2 C
3
H
6
O
2
1,3-Dioxolane
127 Hexane 3 C6H14 CH
3
(CH
2
)
4
CH
3
170 Hexanediol-1,6 3 C6H14O2 HO(CH
2
)
6
OH Hexyleneglycol
111 Isobutane 3 C4H10 (CH
3
)
2
CHCH
3
2-Methylpropane
106 Isobutene 3 C4H8 (CH
3
)
2
C=CH
2
Isobutylene, Methylpropene
341 Isobutyl Alcohol 3 C4H10O (CH
3
)
2
CHCH
2
OH
231 Isopentane 3 C5H12 CH
3
CH
2
CH(CH
3
)
2
2-Methylbutane
187 Isopropal Alcohol 3 C3H8O (CH
3
)
2
CHOH 2-Propanol
28 Methane 3 CH4 CH
4
176 Methanol 3 CH4O CH
3
OH Methyl Alcohol
292 Methyl Acetate 3 C3H6O2 CH
3
CO
2
CH
3
Methyl ester acetic acid; UN
1231
68 Methyl Acetylene 3 C3H4
CH
3
C≡CH
Propyne
340 Methyl Isopropyl Ether 3 C4H10O (CH
3
)
2
CHOCH
3
305 Methyl methacrylate polymer 3 C5H8O2 C
5
H
8
O
2
Poly(methyl methacrylate)
339 Methyl Propyl Ether 3 C4H10O CH
3
OC
3
H
7
81 Methyl Vinyl Ether 3 C3H6O CH
3
OCH=CH
2
120 Methylbutene 3 C5H10 CH
3
CH
2
CCH
3
=CH
2
2-Methyl-1-Butene
177 Methylcyclohexane 3 C7H14 CH
3
C
6
H
11
Hexahydrotoluene
237 Octane 3 C8H18 CH
3
(CH
2
)
6
CH
3
179 o-Xylene 3 C8H10 1,2-(CH
3
)
2
C
6
H
4
1,2-Dimethylbenzene
240 Pentane 3 C5H12 CH
3
(CH
2
)
3
CH
3
180 Phenol 3 C6H6O C
6
H
5
OH
89 Propane 3 C3H8 CH
3
CH
2
CH
3