semi合集-English.pdf - 第2386页

SEMI E84-0305 © SEMI 1999, 2005 30 6.4.2 Power and signal specifi cations are as follows: Table 10 Input /Output Spe cifications On State Off State Active/Passive Current Voltage Current Voltage Input Max. 10mA Max.1.8 V…

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SEMI E84-0305 © SEMI 1999, 2005 29
Production
Equipment
AGV/RGV
OHT
Controller
Controller
Controller
p
hoto
p
hoto*
Passive SideActive Side
Passive
Side
Active
Side
Active Internal
Wiring
Active Internal
Wiring
: Photo Coupled
PI/O Unit
: Connector A
specified by this standard
: Connector B
specified by this standard
: Other connector
not specified by this standard
*
example
implementation
case 1
case 2
Figure 30
Connector Locations
Stocker
Controller
Point of Interface
: Photo Coupled
PI/O Unit
: Connector A
specified by this standard
: Connector B
specified by this standard
: Other connector
not specified by this standard
Internal Wiring
OHS
Controller
p
hoto*
*
example
implementation
Case 3
Case 4
N
OTE
N
OTE
N
OTE
:
Connected with Case 3 or Case 4
Figure 31
Connector Location Schematic for Interbay AMHS (i.e., OHS and STOKER)
SEMI E84-0305 © SEMI 1999, 2005 30
6.4.2 Power and signal specifications are as follows:
Table 10 Input/Output Specifications
On State Off State
Active/Passive
Current Voltage Current Voltage
Input Max. 10mA Max.1.8 Vdc
Max. 200A
Max. 30 Vdc
Output Min. 25mA Sink Max 1.8 Vdc
Max. 100A Source
Max. 30 Vdc
6.4.2.1 Power Supply Voltage: +24 Vdc Nominal (Min. +18 Vdc, Max. +30 Vdc) from no load to full load
(100mA).
6.4.2.2
For hardwired applications the power and power common of the passive must be isolated from the power
and power common of the active. Also, internally to either the active or passive equipment, the power and power
common must be isolated from the signal common.
6.4.3
Bit assignments are specified in Figure 34.
6.4.4 Connector pin assignments where required in ¶6.4.1 and Figures 30 and 31 are specified in Figures 35 and 36
and Table 11.
6.4.5 All configurations will include signal optoisolation within each equipment conforming to this standard to
allow for optical transmission or hardwired configuration to coexist. See Figures 32 and 33 below.
6.4.6
Timing diagram signal state of Off corresponds to no current flow for the hardwired configuration or no
optical signal transmitted for the optical transmitter configurations.
6.5
Interface Sensor Unit Size
6.5.1 The maximum dimensions in millimeters of the interface sensor are indicated in Figure 37. This size includes
volume needed for rigid portions of the sensor’s electrical connector and cable. For systems which are designed to
handle 300 mm wafer carriers, the interface sensor unit must be designed in a way that allows mounting of the unit
within the exclusion volume as defined per SEMI E15.1 with the optical axis centered in this exclusion volume.
A
ct i ve
Figure 32
Optoisolated Implementation Using an Optical Transmission Device
SEMI E84-0305 © SEMI 1999, 2005 31
Figure 33
Optoisolated Implementation Using Hardwired Connection
Input
Output
Output
Input
VA L I D
CS_0
CS_1
AM_AVBL*
TR_REQ
BUSY
COMPT
CONT
L_REQ
U_REQ
VA *
READY
VS_0*
VS_1*
HO_AVBL
ES
3
4
5
1
2
6
7
8
2
3
4
5
6
7
8
1
3
4
5
3
4
5
1
2
6
7
8
2
3
4
5
6
7
8
1
3
4
5
VA L I D
CS_0
CS_1
TR_REQ
BUSY
COMPT
CONT
L_REQ
U_REQ
READY
HO_AVBL
ES
Active Passive
AM_AVBL*
VA *
VS_0*
VS_1*
* This signal is for interbay passive OHS vehicle use only.
Figure 34
Bit Assignments for Interlock Signal between Passive and Active