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SEMI F87-0304 © SEMI 2004 5 R1-2 Design Example 2 R1-2.1 Seal Design — See Figure R 1-2. R1-2.2 Surface Hardness — The sea ling surface (the bottom of the counterbore ) has a m inimum hardness of 300 Vickers. The hardnes…
SEMI F87-0304 © SEMI 2004 4
RELATED INFORMATION 1
EXAMPLES OF SEAL DESIGNS FOR 1.125 INCH TYPE SURFACE
MOUNT COMPONENTS
NOTICE: This related information is not an official part of SEMI F87 and was derived from the work of the
originating task force. This related information was approved for publication by full ballot procedures.
Determination of the suitability of the material is solely the responsibility of the user.
R1-1 Design Example 1
R1-1.1 Seal Design — See Figure R1-1.
R1-1.2 Surface Hardness — The sealing surface (the bottom of the counterbore) has a minimum hardness of 170
Vickers. The hardness may be tested per ISO 6507.
R1-1.3 Surface Roughness — The sealing surface (the bottom of the counterbore) has a surface roughness of 0.25
micrometers Ra max. The surface roughness may be tested per SEMI F37-0299.
R1-1.4 Surface Scratches — The sealing surface (the bottom of the counterbore) is without any lateral scratches
which are visible to non-magnified normal vision.
Figure R1-1
Design Example 1
SEMI F87-0304 © SEMI 2004 5
R1-2 Design Example 2
R1-2.1 Seal Design — See Figure R1-2.
R1-2.2 Surface Hardness — The sealing surface (the bottom of the counterbore) has a minimum hardness of 300
Vickers. The hardness may be tested per ISO 6507.
R1-2.3 Surface Roughness — The sealing surface (the bottom of the counterbore) has a surface roughness of 0.04
micrometers Ra max. The surface roughness may be tested per SEMI F37-0299.
R1-2.4 Surface Scratches — The sealing surface (the bottom of the counterbore) is without any lateral scratches
which are visible to non-magnified normal vision.
Figure R1-2
Design Example 2
SEMI F87-0304 © SEMI 2004 6
R1-3 Design Example 3
R1-3.1 Seal Design — See Figure R1-3.
R1-3.2 Surface Hardness — The sealing surface (the bottom of the counterbore) has a minimum hardness of 300
Vickers. The hardness may be tested per ISO 6507.
R1-3.3 Surface Roughness — The sealing surface (the bottom of the counterbore) has a surface roughness of 0.1
micrometers Ra max. The surface roughness may be tested per SEMI F37-0299.
R1-3.4 Surface Scratches — The sealing surface (the bottom of the counterbore) is without any lateral scratches
which are visible to non-magnified normal vision.
Figure R1-3
Design Example 3
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