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SEMI D23-0999 © SEM I 1999 5 Item Unit Value Definition & Formula Notes Expenditures (to external) for maintena nce. (48) C onsum ables ($/month) Monthly cost f or scheduled replac e me nt parts. (49) Sche duled Main…

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SEMI D23-0999 © SEMI 1999 4
Item Unit Value Definition & Formula Notes
Power/
Utilities
Normal use and
maximum use values
entered by equipment
manufacturer.
Normal
Use [Unit]
Maximum
Use [Unit]
(32) Electricity ($/month) Monthly cost of electricity
necessary to operate equipment.
[ ] [ ]
(33) Cooling Water ($/month) Monthly cost of cooling water
necessary to operate equipment.
[ ] [ ]
(34) Air ($/month) Monthly cost of air conditioning
necessary to operate equipment.
[ ] [ ]
(35) Gas Exhaust
Processing
($/month) Monthly cost of gas exhaust
processing necessary to operate
equipment.
[ ] [ ]
(36) Liquid Waste
Processing
($/month) Monthly cost of liquid waste
processing necessary to operate
equipment.
[ ] [ ]
(37) Vacuum Line ($/month) Monthly cost of vacuum
volume necessary to operate
equipment.
[ ] [ ]
(38) Nitrogen Gas ($/month) Monthly cost of nitrogen gas
necessary to operate equipment.
[ ] [ ]
(39) Dry Gas ($/month) Monthly cost of dry gas
necessary to operate equipment.
[ ] [ ]
(40) Other ($/month) Other monthly power & utilities
costs necessary to operate
equipment.
(41) Power/Utilities
Subtotal
($/month) Subtotal of monthly power &
utilities costs necessary to
operate equipment; sum of (32)
through (40).
Cost of materials necessary for
processing.
Example: Resist,
chemicals, process
gases, cleaning gas,
sputter target, etc. Enter
by equipment in (42) to
(46).
(42) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
(43) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
(44) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
(45) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
(46) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
Process
Materials
Costs
(47) Process Materials
Subtotal
($/month) Subtotal of monthly costs for
process materials; sum of (42)
through (46).
SEMI D23-0999 © SEMI 19995
Item Unit Value Definition & Formula Notes
Expenditures (to external) for
maintenance.
(48) Consumables ($/month) Monthly cost for scheduled
replacement parts.
(49) Scheduled
Maintenance
($/month) Monthly cost for scheduled
maintenance.
Forecast maintenance
Maintenance
Costs
(50) Other ($/month) Monthly maintenance costs not
included in above items.
(51) Maintenance
Subtotal
($/month) Subtotal of monthly
expenditures (to external) for
maintenance; sum of (48)
through (50).
(52) Running Cost
Subtotal
($/month) Monthly running cost total:
(41) + (47) + (51).
E. Labor
Costs
In-house labor costs
(53) Operator ($/month) Equipment operator monthly
labor cost
(54) In-house
maintenance
($/month) Equipment maintenance
monthly labor cost
(55) Labor Cost
Subtotal
($/month) Subtotal of above costs (53) +
(54).
Managers and engineers
not included.
F. Cost Total
(56) Cost ($/month) Total monthly costs necessary
for operation of equipment: (11)
+ (16) + (22) + (28) + (31) +
(52) + (55).
G. Runtime
(57) Operating time (hr/month) Hours per month of factory
operation
(58) 1-Item process
time
(hr/
process)
Process recipe exchange time
(59) Number of
processes/month
(process/
month)
Number of process recipe
exchanges per month
(60) Process time (hr/month) Hour per month of process
recipe exchange (58) × (59)
(61) Scheduled
maintenance time
(hr/month) Monthly scheduled maintenance
time
(62) Start-up
inspection time
(hr/month) Time necessary, per month, for
start-up.
(63) Down time
(mc failure)
(hr/month) Down time, per month, for
machine failure.
(64) Other down time (hr/month) Down time, per month, not
included in above items.
Product wait time not
included.
(65) Run time (hr/month) Monthly operation time (57) –
[Σ (60) through (64)].
H. Process
Capacity
(66) Sheets/hour (sheets/hr) Number of sheets processed per
hour
(67) Process capacity (sheets/
month)
Number of sheets processed per
month (65) × (66)
SEMI D23-0999 © SEMI 1999 6
Item Unit Value Definition & Formula Notes
I. C.E.O. Cost
of Equipment
Ownership
(68) Cost per
Substrate
($/sheet) (56)/(67)
7 Related Documents
7.1 SEMI Standards
SEMI E35 — Cost of Ownership for Semiconductor
Manufacturing Equipment Metrics
SEMI E35.1 — Guide for Cost of Equipment
Ownership Comparison Metric
7.2 STEP ‘95 COO & RAM Textbook
FPD Expo ‘95 Tutorial Seminar Textbook — a-Si TFT-
LCD Front End Manufacturing Technology – Cost
Reduction Seen from a Production Technology
Viewpoint
NOTE 1: As listed or revised, all documents cited shall be the
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