semi合集-English.pdf - 第5130页
SEMI M29-1296 © SEMI 1996, 2003 10 Unit: mm Standardized Dimension Location 13 Wafers 25 Wafers B27 45° ← B28 45° ← B29 133 ± 1 ← B30 148 ± 1 ← B31 14 ± 1 ← 5.5 Retainer 5.5.1 Front Retainer — Dim ensions of a front reta…
SEMI M29-1296 © SEMI 1996, 2003 9
Figure 13
Bottom Rib and Orientation Mark
Table 3 Dimensions of Box Bottom
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
B1 ø 430 max ø 450 max
B2 126.5 ± 1 186.5 ± 1
B3 7 min ←
B4 30° ←
B5 38.5° ←
B6 22.5° ←
B7 158 ± 1 ←
B8 86 ± 1 146 ± 1
B9 156.5 ± 0.5 ←
B10 171.5 ± 0.5 ←
B11 101.5 ± 0.5 161.5 ± 1
B12 10 max ←
B13 18 max ←
B14 16.5 ± 0.5 ←
B15 12 max ←
B16 3 ± 0.5 ←
B17 3 ± 0.5 ←
B18 70 ± 10 ←
B19 30 ± 10 ←
B20 90 ± 10 ←
B21 30 ± 10 ←
B22 30 ± 10 ←
B23 55 ± 10 ←
B24 40 ± 1 ←
B25 27° ←
B26 45° min ←
SEMI M29-1296 © SEMI 1996, 2003 10
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
B27 45° ←
B28 45° ←
B29 133 ± 1 ←
B30 148 ± 1 ←
B31 14 ± 1 ←
5.5 Retainer
5.5.1 Front Retainer — Dimensions of a front retainer are shown in Figure 14 and Table 4.
NOTE 1: Usually, this part is made of an elastic material, and hence, it is difficult to show its form or to measure it. Here, the
front view of this part shows the dimensions in the status fitted with a cassette.
Figure 14
Front Retainer
Table 4 Dimensions of Front Retainer
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
FR1 220 ± 1 ←
FR2 183 ± 1 303 ± 1.5
FR3 178 ± 1 298 ± 1.5
FR4 153.5 ± 1 273.5 ± 1.5
FR5 11 ± 0.5 ←
FR6 13 ± 0.5 ←
FR7 12.5 ± 0.5 ←
FR8 59 ± 2 ←
FR9 187 ± 1 307 ± 1.5
SEMI M29-1296 © SEMI 1996, 2003 11
5.5.2 Rear Retainer — Dimensions of a rear retainer are shown in Figure 15 and Table 5.
Figure 15
Rear Retainer
Table 5 Dimensions of Rear Retainer
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
RR1 110 ± 1 ←
RR2 184 ± 2 304 ± 3
RR3 157 ± 2 ←
RR4 19.5 ± 1 ←
RR5 27 ± 1 ←
RR6 10 ± 0.5 ←
RR7 20 ± 0.5 ←
RR8 23 ± 2 ←
RR9 25 ± 1 ←
RR10 15 ± 5 ←
RR11 5 ± 0.5 ←