semi合集-English.pdf - 第5662页
SEMI P10-0705 © SEMI 1990, 2005 157 PRICE 2000 START_TITLE 2 TITLE_TEXT DIFFUSION END_TITLE 2 START_BARCODE A BARCODE_TEXT 9999-26 END_BARCODE A MIN_MASK_FEATURE_SIZE 10 END_MASK 1 ! MASK_ID 2 !<mask_definition> DE…
SEMI P10-0705 © SEMI 1990, 2005 156
PRODUCT_TYPE RETICLE
PRODUCT_MAGNIFICATION 5X
PRODUCT_IMAGING_TYPE BINARY
TITLE_TYPE DEVICE
TITLE_LOCATION 12500,58500
END_TITLE 1
START_TITLE 2
TITLE_TYPE MASK
TITLE_LOCATION 12500,56500
END_TITLE 2
START_BARCODE A
BARCODE_TYPE GCA
BARCODE_LOCATION -50000,57500
END_BARCODE A
MIRROR_MASK T
START_SUBSTRATE S1
BLANK_SIZE 5/90
BLANK_TYPE ULTE
BLANK_FLATNESS 2
MASK_COATING LOW_REFLECTANCE_CHROME
RESIST_TYPE POSITIVE
END_SUBSTRATE S1
START_REGISTR RG1
REGISTR_ERROR 0.25
REGISTR_REF_MASK_ID 2
END_REGISTR RG1
START_CD SPECIFICATION
CD_TOLERANCE 0.25
CD_RANGE 0.3
END_CD SPECIFICATION
START_DEFECT_DEFINITION C
DEFECT_SIZE 2.0
DEFECT_COUNT 0
INSPECTION_AREA -30000,-35000,30000,35000
END_DEFECT C
PACKAGE H60-51-63A09
END_MASK_GROUP_OPTIONS 5X
!
PLACEMENT_TOP_CELL C1
!
MASK_ID 1 !<mask_definition>
DELIVERABLE_MASK T
LINE_ITEM_NUMBER 1
STATUS NEW
DUE_DATE_TIME_REQUESTED 1992-04-20, 14:00Z
SEMI P10-0705 © SEMI 1990, 2005 157
PRICE 2000
START_TITLE 2
TITLE_TEXT DIFFUSION
END_TITLE 2
START_BARCODE A
BARCODE_TEXT 9999-26
END_BARCODE A
MIN_MASK_FEATURE_SIZE 10
END_MASK 1
!
MASK_ID 2 !<mask_definition>
DELIVERABLE_MASK T
LINE_ITEM_NUMBER 2
STATUS NEW
DUE_DATE_TIME_REQUESTED 1992-04-21, 14:00Z
PRICE 2000
PRICE_UNITS USD
START_TITLE 2
TITLE_TEXT POLY
END_TITLE 2
START_BARCODE A
BARCODE_TEXT 9999-10
END_BARCODE A
MIN_MASK_FEATURE_SIZE 10
END_MASK 2
!
CELL_ID C1 !<cell_definition>
END_CELL_OPTIONS C1
CELL_INSTANCE C2 !MAIN ARRAY
END_CELL_INSTANCE_OPTIONS C2
START_PLACEMENT P2
LOCATION 0,0
END_PLACEMENT
P2
END_CELL_INSTANCE C2
PATTERN_GROUP_INSTANCE PG3 !RMS ALIGNMENT KEYS
START_PLACEMENT PG3
LOCATION 0,-57500
LOCATION -11000,57500
END_PLACEMENT PG3
END_CELL C1 !END TOP CELL DEFINITION
!
CELL_ID C2 !MAIN ARRAY DEFINITION
END_CELL_OPTIONS C2
PATTERN_GROUP_INSTANCE PG1 !PRIMARY DIE
SEMI P10-0705 © SEMI 1990, 2005 158
START_PLACEMENT
PG1
LOCATION -15000,-17500
STEPPING_DISTANCE 30000,35000
STEPPING_COUNT 2,2
END_PLACEMENT PG1
END_PATTERN_GROUP_INSTANCE PG1
PATTERN_GROUP_INSTANCE PG2 !SCRIBE LINE
START_PLACEMENT PG2
LOCATION 0,0
END_PLACEMENT PG2
END_PATTERN_GROUP_INSTANCE PG2
END_CELL C2
!
PATTERN_GROUP_ID PG1 !PRIMARY PATTERN GROUP
START_PATTERN_OPTIONS PTN1
PATTERN_ADDRESS_SIZE 0.5
SCALE_FACTOR 1.0
STRIPE_HEIGHT 1024
UNSCALED_PATTERN_SIZE 25000,30000
END_PATTERN_OPTIONS PTN1
END_PATTERN_GROUP_OPTIONS PG1
LEVEL_ID 1
PATTERN_NAME VT9999X-1A-26
START_PATTERN_OPTIONS PTN1.26
DIGITIZED_DATA_DARK T
END_PATTERN_OPTIONS PTN1.26
END_PATTERN_DEFINITION 1
LEVEL_ID 2
PATTERN_NAME VT9999X-1A-10
START_PATTERN_OPTIONS PTN1.10
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS PTN1.10
END_PATTERN_DEFINITION 2
END_PATTERN_GROUP PG1
!
PATTERN_GROUP_ID PG2 !SCRIBE PATTERN GROUP
START_PATTERN_OPTIONS PTN2
PATTERN_ADDRESS_SIZE 0.5
SCALE_FACTOR 1.0
STRIPE_HEIGHT 1024
UNSCALED_PATTERN_SIZE 65000,75000
START_CD CD_SITES_1
CD_SITE_ID CD_1
CD_LOCATION -40000,0
END_CD CD_SITE_1