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SEMI F4-1000 © SEMI 1990 , 2000 2 5.1.2 cyl inder — a press ure vessel d e s igned for pressu res higher th an 276 kPa (40 psia), havi ng a circular cros s-section, and a maximum water capacity of les s than 454 kg (1,00…

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SEMI F4-1000 © SEMI 1990, 20001
SEMI F4-1000
SPECIFICATION FOR PNEUMATICALLY ACTUATED CYLINDER
VALVES
This specification was technically approved by the Global Facilities Committee and is the direct
responsibility of the North American Facilites Committee. Current edition approved by the North American
Regional Standards Committee on August 28, 2000. Initially available on SEMI OnLine September 2000; to
be published October 2000. Originally published in 1990; previously published February 2000.
1 Purpose
1.1 This specification establishes t he minimum design
and performance requirements for pneumatically
actuated cylinder valves used in semiconductor
manufacturing. It is also intended as an aid in the
procurement of these valves.
2 Scope
2.1 This specification applies to pn eumatically
actuated valves for use on cylinders containing gases
used in semiconductor manufacturing facilities and in
comparable research and development areas.
2.2 This specification does not pur port to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this specification to
establish appropriate safety and health practices and
determine the applicability of regulatory limitations
prior to use.
3 Limitations
3.1 This specification is not a repl acement for safety
regulations. It is the responsibility of the user to ensure
that pneumatically actuated cylinder valves comply
with all applicable safety regulations.
3.2 This specification excludes design or performance
requirements for any electrically operated devices used
in conjunction with, or as a replacement for, pneumatic
actuators.
4 Referenced Standards
4.1 SEMI Standards
SEMI F1 — Specification for Leak Integrity of High-
Purity Gas Piping Systems and Components
SEMI F19 — Specification for the Finish of the Wetted
Surfaces of Electropolished 316L Stainless Steel
Components
SEMI F20 — Specification for 316L Stainless Steel
Bar, Extruded Shapes, Plate and Investment Castings
for Components Used in High Purity Semiconductor
Manufacturing Applications
SEMI F32
Test Method for Determination of Flow
Coefficient for High Purity Shutoff Valves
SEMI S5 — Safety Guideline for Flow Limiting
Devices
4.2 ASME Document
1
B1.1 — Unified Inch Screw Threads (UN and UNR
Thread Form)
4.3 CGA Standards
2
CGA G-4.1 — Cleaning Equipment for Oxygen Service
CGA S-1.1 — Pressure Relief Device Standards - Part
1 - Cylinders for Compressed Gases
CGA S-7 — Method for Selecting Pressure Relief
Devices for Compressed Gas Mixtures for Cylinders
CGA V-1 — Compressed Gas Cylinder Valve Outlet
and Inlet Connections
CGA V-9
Compressed Gas Association Standard for
Compressed Gas Cylinder Valves
4.4 ISO Standards
3
ISO 68 — General Purpose Screw Threads - Basic
Profile
ISO 261 — General Purpose Metric Screw Threads -
General Plan
4.5 US Code of Federal Regulations
4
Title 49 CFR, Parts 100–199 —Transportation
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
5 Terminology
5.1 Definitions
5.1.1 burst pressure — a pressure at which rupture or
uncontrolled leakage of one or more of the pressure
retaining components of the device occurs.
1 American Society of Mechanical Engineers, 345 East 47th Street,
New York, NY 10017
2 Compressed Gas Association, Inc., 1725 Jefferson Davis Highway,
Suite 1004, Arlington, VA 22202
3 International Organization for Standardization, Case Postale 56,
Geneve 20, CH-1211, Switzerland
4 Department of Transportation, Superintendent of Documents, U.S.
Government Printing Office, Mail Stop: SSOP, Washington, D.C.
20402-9328
SEMI F4-1000 © SEMI 1990, 2000 2
5.1.2 cylinder — a pressure vessel designed for
pressures higher than 276 kPa (40 psia), having a
circular cross-section, and a maximum water capacity
of less than 454 kg (1,000 lbs.). It does not include a
portable tank, multi-unit tank car tank, cargo tank, or
tank car.
5.1.3 cylinder valve — a mechanica l device attached
to a compressed gas cylinder that permits flow into or
out of the cylinder when the device is in the open
position and prevents flow when in the closed position.
5.1.4 disconnect shutoff — a device, which will not
permit the flow of gas through an open cylinder valve
without attachment to an outlet connector.
5.1.5 flow coefficient (Cv) — a num eric constant used
to characterize the flow capacity of a valve.
5.1.6 manual locking device — a device used to
prevent the cylinder valve from opening during
transportation or service.
5.1.7 manual override — a device u sed for opening
the cylinder valve manually.
5.1.8 normal temperature — a temp erature of 21°C ±
6°C (70°F ± 10°F).
5.1.9 normally closed — a design in which the
cylinder valve closure member automatically assumes
the closed position upon loss of compressed gas to the
actuator.
5.1.10 packless valve — a valve with a diaphragm or
bellows stem seal instead of a packing or O-ring seal at
the stem.
5.1.11 pneumatic actuator — a devic e which converts
compressed gas pressure into mechanical motion and
force to move the cylinder valve closure member.
5.1.12 proof pressure — a pressure g reater than the
cylinder valve’s rated pressure that the cylinder valve
can withstand without impairing its ability to meet the
leak rate limits specified in SEMI F1 upon return to
rated pressure.
5.1.13 rated pressure — the pressure at which the
cylinder valve can meet the performance and
qualification requirements of this specification. Rated
pressure shall be specified by the manufacturer.
5.1.14 valve closure member — that part of the cylin-
der valve which is positioned in the flow stream to per-
mit or obstruct flow, depending on its closure position.
5.1.15 wetted surface — surface with in the interior of
the cylinder valve, which is in contact with the
controlled gas. The surface in contact with the gas used
to actuate the cylinder valve is not, for the purpose of
this specification, considered a “wetted surface”.
6 Design Requirements
6.1 General — Components not covered by this
specification or CGA Standards shall be constructed
such that they do not compromise the safety,
substantiality, and durability of the valve or actuator.
6.2 Configuration — The cylinder valve shall be a
packless valve design with a normally closed actuator.
6.3 Size — The cylinder valve and actuator shall be of
a design size which permits the use of a protective
transportation cover which satisfies the requirements of
49 CFR Section 173.40(d)(2).
6.4 Materials — Ferrous materials used for the wetted
surfaces shall be per SEMI F20. Other materials may be
supplied to satisfy specific material or performance
requirements, provided they are compatible with the gas
service.
6.5 Inlet — The inlet of the cylind er valve shall have
tapered external threads as specified by CGA V-1 or
other recognized governmental or industry standards for
the connection of cylinder valves to gas cylinders.
6.6 Outlet — The outlet of the cylinder valve shall
conform to a CGA 630/710 series connection in
accordance with CGA V-1 or other recognized
governmental or industry standards for the outlet
connections of gas cylinder valves.
6.7 Actuator Pressure — The actuating pressure
required to open the cylinder valve fully shall not
exceed 550 kPa (gauge) (80 psig).
6.8 Manual Override — A manual override shall be
supplied.
6.9 Vents — Vent hole(s) for mass spectrometer
helium leak testing shall be supplied at appropriate
locations.
6.10 Internal Volume — The wetted surfaces should
be configured, and the internal volume minimized, to
enhance the efficacy of purging.
6.11 Particle Control — The design should minimize
accumulation and generation of particles.
6.12 Threaded Fasteners — Thread ed fasteners used
in the covers, housings, casings, and any external
mounting brackets shall have threads conforming to, as
applicable, the ASME B1.1, ISO 68, or ISO 261
standards.
6.13 Cleanliness — The cylinder valve and actuator
shall be cleaned, as a minimum, per CGA Standard G-
4.1.
SEMI F4-1000 © SEMI 1990, 20003
7 Optional Design Requirements
7.1 Flow Limiting Device — Provision for limiting
flow, per SEMI S5, shall be supplied when specified.
7.2 Pressure Relief Devices — Pressure relief devices
must be required in accordance with CGA S-1.1 or S-7.
7.3 Disconnect Shutoff — A disco nnect shutoff shall
be supplied when specified.
7.4 Manual Locking Device — A manual locking
device shall be supplied when specified.
7.5 Electropolish — Cylinder valves shall be
electropolished per SEMI F19 when specified.
7.6 Cleanliness — Cleaning above the minimum
requirements of CGA G-4.1 may be specified.
7.7 Position Indicator — A device for visual
confirmation of open or closed position may be
specified.
8 Qualification Requiremen ts
8.1 General — Any new cylinder valve design or
substantially revised cylinder valve design shall be
tested prior to production to demonstrate compliance
with this specification.
8.1.1 Leakage — Cylinder valves shall be leak tested
using the methods and leak rate limits specified in
SEMI F1 for qualification of components.
8.1.2 Operating Temperature Range — The cylinder
valves shall perform satisfactorily at any temperature
between -40°C (-40°F) and 55°C (131°F).
8.2 Qualification Cylinder Valve Samples — Nine
cylinder valves shall be selected at random from the
pre-production manufacturing phase of the product for
qualification to this specification.
a. One cylinder valve shall be used for the Flow
Coefficient and Transportation Vibration Tests.
b. Three cylinder valves shall be used for the Pressure
Tests.
c. Three cylinder valves shall be used for the
Endurance Test.
d. Two cylinder valves shall be used for the Tip-Over
Tests.
8.3 Flow Coefficient Test — The flow coefficient of a
fully open cylinder valve tested without a flow
restrictor shall be a minimum of 0.1. The method of test
for determining the flow coefficient shall be as
prescribed by SEMI F32.
8.4 Transportation Vibration Test — After being
subjected to vibration for one hour at a frequency of
3400 to 3600 vibrations per minute at an amplitude of
0.8 mm (0.031 in.) to 1.6 mm (0.063 in.), the cylinder
valve shall not exceed the inboard, outboard, and
internal leak rate limits specified.
8.5 Pressure Tests
8.5.1 Back Pressure — The cylinder valve shall not
exceed the internal leak rate limits specified in SEMI
F1 with the cylinder valve closed, the rated pressure
applied at the outlet, and the inlet connected to the leak
detector.
8.5.2 Proof Pressure — The proof p ressure at normal
temperature shall be a minimum of 1.67 times the rated
pressure. Tests shall be conducted following the back
pressure test with the cylinder valve open, the outlet
capped, and the pressure relief port capped or plugged.
After exposure to an aerostatic proof pressure for ten
minutes, the cylinder valve shall not exceed the
inboard, internal, and outboard leak rate limits specified
in SEMI F1.
8.5.3 Burst Pressure — The burst pressure at normal
temperature shall be a minimum of three times the rated
pressure. Tests shall be conducted hydrostatically
following the proof pressure test with the cylinder valve
open, the outlet capped, and the pressure relief port
capped or plugged. Visible outboard leakage is not
permitted during the burst test. After testing, the
cylinder valve need not be functional.
8.5.3.1 Pressure Rating Determination — The rated
pressure shall be less than or equal to the pressure
determined from the burst pressure test as follows:
P ≤ 0.33BT
m
/T
a
Where:
P = Rated pressure
B = The lowest burst pressure recorded for the three
specimens tested
T
a
= The actual tensile strength of the failed test
specimen material obtained from Certified Material
Test Reports.
T
m
= The specified minimum tensile strength of the failed
specimen material.
NOTE 2: The factor of T
m
/T
a
is included to normalize
between the particular steel stock from which the test
specimens were made and the minimum tensile strength of the
specified steel.
8.6 Endurance Test — The cycle l ife of the cylinder
valve shall be at least 5,000 operational cycles. During
and after 5,000 operations, the cylinder valve shall not
exceed the inboard, internal, and outboard leak rate
limits specified in SEMI F1. A cycle shall consist of
one opening and one closing of the cylinder valve.