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SEMI C3.23-1000 © SEMI 1984, 2004 1 SEMI C3.23-1000 (Withdrawn 1104) STANDARD FOR OXYGEN (O 2 ), 99.98% QUALITY This standard was technically approved b y the Global Gases Committee and is the direct r e sponsibility of …

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SEMI C3.22-1000 © SEMI 1983, 2004 6
Diagram B
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SEMI C3.23-1000 © SEMI 1984, 2004 1
SEMI C3.23-1000 (Withdrawn 1104)
STANDARD FOR OXYGEN (O
2
), 99.98% QUALITY
This standard was technically approved by the Global Gases Committee and is the direct responsibility of the
North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published
November 2004. Originally published in 1984; previously published in 1995.
NOTICE: This document was balloted and approved
for withdrawal in 2004.
1 Description
1.1 Oxygen is a colorless, odorless, and oxidizing gas.
It supports combustion.
2 Specifications
QUALITY: 99.98%
Impurities
Maximum Acceptable
Level (ppm)*
Argon (Ar) 100
Carbon Monoxide (CO) 1
Carbon Dioxide (CO
2
) 1
Krypton (Kr) 10
Nitrogen (N
2
) 30
Nitrous Oxide (NO) 1
Particles **
Total Hydrocarbons expressed as
Methane (THC)
1
Water (H
2
O) (v/v) 1
TOTAL IMPURITIES 146
*An analysis of significant figures has not been considered. The
number of significant figures will be based on analytical accuracy and
the precision the provided procedure.
** To be determined between supplier and user.
3 Physical Constants (for information only)
Metric Units US Units
Molecular weight 31.999 31.999
Boiling point at 1 atm -183°C -297.4°F
Density of gas at 25°C
(77°F) and 1 atm
1.309 kg/m
3
0.082 lb/ft
3
Specific gravity of gas at
21.1°C (70°F) and 1 atm
(air = 1)
1.1049 1.1049
Density of liquid at boiling
point
1142 kg/m
3
71.27 lb/ft
3
4 Analytical Procedures (See Notes 1, 2)
4.1 Argon — This procedure is for the determination
of argon using a gas chromatograph with a thermal
conductivity detector.
4.1.1 Detection Limit — 25 ppm (mole/mole)
4.1.2 Instrument Parameters
4.1.2.1 Column: 3.6 m (12 ft) by 3.2 mm (1/8 in)
stainless steel tubing packed with molecular sieve 5A,
60/80 mesh, washed to remove fines and activated at
300°C for 24 hours or equivalent.
4.1.2.2 Carrier Flow: 45 mL/min helium.
4.1.2.3 Sample Volume: 1–3 mL.
4.1.2.4 Temperatures:
Detector 40°C
Column -50°C
4.1.3 Calibration Standard — 50–150 ppm (mole/
mole) argon, balance helium.
4.1.4 Operating Procedure
4.1.4.1 With the valve in Position A, load the sample
loop. Switch the valve to Position B to inject the sample
into the column. After the argon has been detected,
switch the valve back to Position A to backflush the
oxygen from the column. Record the peak area and
retention time.
4.1.4.2 Inject oxygen sample to be tested in the same
manner as in 4.1.4.1. Record the retention times and
peak areas.
4.1.4.3 Repeat 4.1.4.1.
4.1.4.4 Calculate the concentration of argon in the
sample, using the formula below. The result may not
exceed the specification Section 2 of this Standard.
Sample of
ionConcentrat
Standard of
ionConcentrat
AreaPeak Standard
AreaPeak Sample
4.2 Carbon Monoxide — This procedure is for the
determination of carbon monoxide using dual beam
optical non-dispersive infrared spectrophotometry.
4.2.1 Detection Limit — 0.2 ppm (mole/mole)
4.2.2 Instrument Parameters
4.2.2.1 Detector: “Luft” type or equivalent
4.2.2.2 10" Infrared Gas Cell or gas cell with
equivalent sensitivity
SEMI C3.23-1000 © SEMI 1984, 2004 2
4.2.2.3 Sample Cell Pressure: 200 psig for full scale
range 0–20 ppm carbon monoxide or appropriate
pressure recommended by the cell manufacturer.
4.2.2.4 Sample Flowrate: 500 cc/minute or as
specified by the instrument manufacturer.
4.2.2.5 Wavelength: 4.75 micrometers (4750 nm)
4.2.2.6 Wavenumber: 2100 cm
-1
4.2.3 Calibration Standard — 5 ppm (mole/mole)
carbon monoxide, balance oxygen.
4.2.4 Operating Procedure (See Notes 5, 6.)
4.2.4.1 Open the zero gas (prepurified nitrogen or
certified pure oxygen, independently measured to be
less than 0.1 ppm CO) cylinder valve. Open valve V1,
close valves V2 and V3. Flow the gas through the
system and adjust the back pressure regulator to 200
psig as shown on gauge G. Adjust the flowrate on the
flowmeter to 1000 cc/minute by adjusting valve V1.
After a constant readout is observed, adjust the zero
control knob of the analyzer to set the absorbance
output to read zero.
4.2.4.2 Open the calibration gas standard cylinder
valve. Close V1 and V2, and open valve V3. Flow the
calibration gas through the system and adjust the back
pressure regulator to 200 psig. Adjust the flowrate on
the flowmeter to 1000 cc/minute. After a constant
readout is observed, record the absorbance of the
calibration standard, if the instrument indicates
absorbance directly. If the instrument indicates
concentration, adjust the span control to read the
concentration of carbon monoxide in the calibration
gas.
4.2.4.3 Introduce the oxygen sample into the analyzer
by closing valves Vl and V3, opening valve V4 and
slowly opening valve V2 until the flowrate on the
flowmeter is 1000 cc/minute. Adjust the back pressure
regulator to 200 psig. If the instrument indicates
absorbance, read the absorbance of the sample and
calculate the quantity of carbon monoxide, using the
formula below. If the instrument indicates
concentration, record the concentration. The results
may not exceed the specification in Section 2 of this
Standard.
Sample of
ionConcentrat
Standard of
ionConcentrat
Standard of Absorbance Measured
Sample of Absorbance Measured
4.3 Carbon Dioxide — This procedure is for the
determination of carbon dioxide using dual beam
optical non-dispersive infrared spectrophotometry.
4.3.1 Detection Limit — 0.05 ppm (mole/mole)
4.3.2 Instrument Parameters
4.3.2.1 Detector: “Luft” type or equivalent
4.3.2.2 10" Infrared Gas Cell or gas cell with
equivalent sensitivity
4.3.2.3 Sample Cell Pressure — 100 psig for full scale
range 0–5 ppm carbon dioxide; 200 psig for full scale
range of 0–2.5 ppm carbon dioxide or appropriate
pressure as recommended by cell manufacturer.
4.3.2.4 Sample Flowrate: 500 cc/minute or as
specified by the instrument manufacturer
4.3.2.5 Wavelength: 4.4 micrometers (4400 nm)
4.3.2.6 Wavenumber: 2250 cm
-1
4.3.3 Calibration Standard — 5 ppm (mole/mole)
carbon dioxide, balance oxygen.
4.3.4 Operating Procedure — (See Notes 5 and 6)
4.3.4.1 Open the zero gas (prepurified nitrogen or pure
oxygen, independently measured to be less than 0.1
ppm CO
2
) cylinder valve. Open valve V1, close valves
V2 and V3. Flow the gas through the system and adjust
the back pressure regulator to 100 psig as shown on
gauge G. Adjust the flowrate on the flowmeter to 1000
cc/minute by adjusting valve Vl. After a constant
readout is observed, adjust the zero control knob of the
analyzer to set the absorbance output to read zero.
4.3.4.2 Open the calibration gas standard cylinder
valve. Close V1 and V2, and open valve V3. Flow the
calibration gas through the system and adjust the back
pressure regulator to 100 psig. Adjust the flowrate on
the flowmeter to 1000 cc/minute. After a constant
readout is observed, record the absorbance of the
calibration standard, if the instrument indicates
absorbance directly. If the instrument indicates
concentration, adjust the span control to read the
concentration of carbon dioxide in the calibration gas.
4.3.4.3 Introduce the oxygen sample into the analyzer
by closing valves V1 and V3, opening valve V4 and
slowly opening valve V2 until the flowrate on the
flowmeter is 1000 cc/minute. Adjust the back pressure
regulator to 100 psig. If the instrument indicates
absorbance, read the absorbance of the sample and
calculate the quantity of carbon dioxide, using the
formula below. If the instrument indicates
concentration, record the concentration. The results
may not exceed the specification in Section 2 of this
standard.
Sample of
ionConcentrat
Standard of
ionConcentrat
Standard of Absorbance Measured
Sample of Absorbance Measured