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SEMI E118-1104 E © SEMI 2002, 2004 5 command is sent to one head, the host can send additional comm ands such as a read command and a status confirmat ion command to another head before t he first he ad sends the respons…

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Parameter Name Description Format: Possible Value
6.3.3.2 A row is provided in the table for each parameter of a service.
6.3.4 Service Message Definition
6.3.5 A service message definition table defines the parameters used in a service, as shown in the following table:
Parameter Req/Ind Rsp/Cnf Comment
6.3.5.1 The columns labeled REQ/IND and RSP/CNF link the parameters to the direction of the message. The
message sent by the initiator is called the “Request”. The receiver terms this message the “Indication” or the request.
The receiver may then send a “Response” which the original sender terms the “Confirmation”.
6.3.5.2 The following codes appear in the REQ/IND and RSP/CNF columns and are used in the definition of the
parameters (e.g., how each parameter is used in each direction):
Code Description
M Mandatory Parameter — Must be given a valid value.
C Conditional Parameter — May be defined in some circumstances and undefined in others. Whether a value
is given may be completely optional or may depend on the value of the other parameter.
U User-Defined Parameter.
- The parameter is not used.
= (For response only.) Indicates that the value of this parameter in the response must match that in the primary
(if defined).
7 Overview
7.1 The Wafer ID Reader Model defines the behavior and services (functions). The Wafer ID Reader is a small
intelligent system, typically used as a subsystem within equipment.
7.1.1 The primary functionality of the Wafer ID Reader is to read the identifier of the wafer (Wafer ID).
7.1.2 The acronym WIDR is used to refer to the Wafer ID Reader.
7.1.3 An object model for the WIDR is provided in Related Information 2 – Object Model.
7.2 Number of Heads
7.2.1 A WIDR provides one or more ID reader heads and is connected to an upstream controller by a single
interface. This allows the upstream controller to control either one head or multiple heads using the same interface
specification.
7.2.2 Single Head Configuration
7.2.2.1 In the case of a single head, the head may be presented as an integrated part of the WIDR.
7.2.3 Multiple Head Configuration
7.2.3.1 In the case of multiple heads, some services are logically performed by the WIDR, and the individual heads
logically perform others. The individual heads are numbered sequentially and may be referenced individually by the
upstream controller. Note that the upstream controller does not communicate directly with the heads. All
communications are between the upstream controller and the WIDR unit.
7.2.3.2 In the multi-head case, the WIDR shall allow independent control of the heads. Multiple transactions
invoking services performed by the individual heads may be open at the same time. For example, when a read
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command is sent to one head, the host can send additional commands such as a read command and a status
confirmation command to another head before the first head sends the response to the first command.
7.3 Upstream Controller
7.3.1 The WIDR provides certain services when requested by the upstream controller. The upstream controller
sends a message requesting the specified service, and the WIDR sends a message with the response.
7.3.2 This standard assumes that an upstream controller initiates each service message to the WIDR, and the WIDR
sends its response to the upstream controller. The upstream controller must watch the response time to monitor the
communication timeout. This standard will define the recommended method for handling exceptions caused by
timeouts.
7.3.3 In addition, some WIDR may provide asynchronous notification to the upstream controller. Examples of this
include, but are not limited to, the detection of a fault condition resulting in an alarm. Asynchronous notification is
not required for compliance to this standard.
8 Attributes
8.1 An attribute is an item of information about an entity that is maintained and is available by request. There is
certain information concerning the WIDR that is of potential interest to the upstream controller, including the
manufacturer, the model, and the serial number of the device. This information is considered as attributes of the
WIDR and is available on request.
8.2 WIDR Attribute Definition Table
8.2.1 Table 1 defines the attributes of the WIDR subsystem.
Table 1 WIDR Attribute Definitions
Attribute Name Description Access Reqd Form
Fundamental
Configuration Number of heads. RO Y Text
AlarmStatus Current WIDR substate of ALARM
STATUS.
RO Y Enumerated:
0 = NO ALARMS
1 = ALARMS
OperationalStatus Current WIDR substate of
OPERATIONAL.
RO
Y Enumerated:
IDLE
BUSY
MAINTENANCE
SoftwareRevisionLevel Revision (version) of software. RO Y Text
Optional
DateInstalled Date the subsystem was installed. RO N Protocol dependent.
DeviceType Identifiers subsystem as a WIDR. RO N WIDR (Text)
HardwareRevisionLevel Revision number of the hardware. RO N Text
MaintenanceData Supplier dependent. RO N Text
Manufacturer The name or identifier of the
manufacturer.
RO N Protocol dependent.
ModelNumber The manufacturers model designation. RO N Text
SerialNumber Subsystem serial number assigned by
manufacturer.
RO N Protocol dependent.
8.3 Reader Head Attributes
8.3.1 Table 2 defines the attributes for the Reader Head.
NOTE 2: In the case of an integrated single head, the attributes in Table 2 are regarded as an extension of Table 1.
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8.3.2 In the case of multiple heads, it must be possible to distinguish between the attributes of different heads.
Table 2 Reader Head Attribute Definitions
Attribute Name Description Access Reqd Form
Fundamental
HeadStatus The current state. RO Y Enumerated:
IDLE
BUSY
NOT OPERATING
HeadID Head number 0–31. RO Y if
multi-head
Text. 2 digits.
Optional
HeadCondition The current Maintenance status. RO N Enumerated:
No alarms
Needs Maintenance
Read fault
HeadDateInstalled Date this head was installed. RO N Protocol dependent.
HeadMaintenance-Data Supplier dependent. RO N Text
9 State Models
9.1 To facilitate independent control of the individual heads, this section defines two separate state models, one for
WIDR subsystem and one to be applied to each of the individual heads.
9.2 WIDR State Model
9.2.1 This section defines the state model for the WIDR subsystem. Figure 1 shows the diagram for this model.
1
WIDR
INITIALIZING
OPERATING
3
2
NO ALARMS
A
LARMS
C
MAINTENANCE
4
5
9 10
A
LARM STATUS
OPERATIONAL STATUS
RUNNING
11
IDLE
7
8
6
BUSY
Figure 1
WIDR State Model Diagram