semi合集-English.pdf - 第1290页

SEMI E5-1104 © SEMI 1982, 2004 232 Stream,Function Name (Mnemonic) Direction S16,F15 PRJobMultiCreate M,H->E, reply Description Use this single message to Create Mult iple Process Jobs, each of which may be unique in …

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SEMI E5-1104 © SEMI 1982, 2004 231
Stream,Function Name (Mnemonic) Direction
S16,F12 PRJobCreateEnh Acknowledge S,H<-E
Description
This message acknowledges the request and reports any errors in the creation of a process job.
Structure
L,2
1. <PRJOBID>
2. L,2
1. <ACKA>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
If n = 0, no errors exist.
Stream,Function Name (Mnemonic) Direction
S16,F13 PRJobDuplicateCreate M,H->E,reply
Description
Not used.
Structure
Exception
Stream,Function Name (Mnemonic) Direction
S16,F14 PRJobDuplicateCreate Acknowledge S,H<-E
Description
Not used.
Structure
Exception
SEMI E5-1104 © SEMI 1982, 2004 232
Stream,Function Name (Mnemonic) Direction
S16,F15 PRJobMultiCreate M,H->E,reply
Description
Use this single message to Create Multiple Process Jobs, each of which may be unique in its association of material to process
recipe. If multi-block, this message must be preceded by the S16,F1/F2 transaction.
Structure
L,2
1. <DATAID>
2. L,p [p = # of process jobs being created]
1. L,6
1. <PRJOBID
1
>
2. <MF
1
>
3a. L,n [MF = carrier, n = # of carriers]
1. L,2
1. <CARRIERID
1
>
2. L,j [j = # of slots, may be implemented as an array]
1. <SLOTID
1
>
2. <SLOTID
2
>
.
.
j. <SLOTID
j
>
.
.
n. L,2
1. <CARRIERID
n
>
2. L,j [j = # of slots, may be implemented as an array]
1. <SLOTID
1
>
2. <SLOTID
2
>
.
.
j. <SLOTID
j
>
3b. L,n [MF = substrate, n = # of MID]
1. <MID
1
>
.
.
n. <MID
n
>
4. L,3
1. <PRRECIPEMETHOD
1
>
2. <RCPSPEC
1
>
3. L,m [m = # recipe parameters]
1. L,2
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
.
.
m. L,2
1. <RCPPARNM
m
>
2. <RCPPARVAL
m
>
5. <PRPROCESSSTART
1
>
6. <PRPAUSEEVENT
1
>
.
.
p. L,6
1. <PRJOBID
p
>
2. <MF
p
>
3a. L,n [MF = carrier, n = # of carriers]
1. L,2
1. <CARRIERID
1
>
2. L,j [j = # of slots, may be implemented as an array]
1. <SLOTID
1
>
2. <SLOTID
2
>
SEMI E5-1104 © SEMI 1982, 2004 233
.
.
j. <SLOTID
j
>
.
.
n. L,2
1. <CARRIERID
n
>
2. L,j [j = # of slots, may be implemented as an array]
1. <SLOTID
1
>
2. <SLOTID
2
>
.
.
j. <SLOTID
j
>
3b. L,n [MF = substrate, n = # of MID]
1. <MID
1
>
.
.
n. <MID
n
>
4. L,3
1. <PRRECIPEMETHOD
p
>
2. <RCPSPEC
p
>
3. L,m [m = # recipe parameters]
1. L,2
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
.
.
m. L,2
1. <RCPPARNM
m
>
2. <RCPPARVAL
m
>
5. <PRPROCESSSTART
p
>
6. <PRPAUSEEVENT
p
>
Exception
The list for specifying material (item 3a and 3b) is empty (L,0 instead of L,n), when no material is specified for the process job.
The form of data item 3(a or b) depends on the value in MF.