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SEMI E54.14-0305 © SEMI 2005 22 9.6.5.3 The additional Services of Sensor BI-EP are m apped as described in Ta ble 38. Table 38 Sensor BI-EP A dditional Service Mapping SEMI SDM Service ID Service Write Value to Index 64…

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SEMI E54.14-0305 © SEMI 2005 21
Table 34 Endpoint Device Object Identifiers
SDM Object
Name
SDM Object ID NCS Module ID
Sensor-BI-TH-EP EPD3 203
Assembly-EPD#1 EPD4 204
Assembly- EPD#2 EPD5 205
Assembly- EPD#3 EPD6 206
Assembly- EPD#4 EPD7 207
9.6.4 Attributes
9.6.4.1 The mapping of Attribute Tags and Identifiers is defined in §7 for SAC. The same method applies here for
the SDM.
9.6.4.2 Tables 35 and 36 show the mapping of the specific SDM attributes.
Table 35 DM Object Additional Attribute Identifiers
SEMI SDM
Attribute ID
PROFINET
Index
Attribute
SacA65 129 Number of Endpoint Objects
Table 36 Sensor-BI-TH-EP Object Additional Attribute Identifiers
SEMI SDM
Attribute ID
PROFINET
Index
Attribute
EpA1 160 Minimum Time
EpA2 161 Maximum Time
EpA3 162 Target Time
EpA4 163 Elapsed Time
EpA5 164 Time Stamp
EpA6 165 Recipe Identifier
EpA7 166 Step Identifier
9.6.5 Services
9.6.5.1 The mapping of Service Tags and Identifiers is defined in §7 for SAC. The same method applies here for
the SDM.
9.6.5.2 The additional Services of SAC are mapped as described in Table 37.
Table 37 SAC Additional Service Mapping
SEMI SDM Service
ID
Service Write Value to
Index 64
SacS33 Reset Endpoint 33
SacS34 Download Recipe 34
SacS35 Upload Recipe 35
SacS36 Calibrate 36
SEMI E54.14-0305 © SEMI 2005 22
9.6.5.3 The additional Services of Sensor BI-EP are mapped as described in Table 38.
Table 38 Sensor BI-EP Additional Service Mapping
SEMI SDM Service
ID
Service Write Value to
Index 64
EpS1 Endpoint On 11
EpS2 Endpoint Off 12
EpS3 Endpoint Start 13
EpS4 Endpoint Suspend 14
EpS5 Endpoint Resume 15
10 Related Documents
10.1 IEEE Standards
6
IEEE 802.3 — Information technology – Telecommunications and information exchange between systems – Local
and metropolitan area networks – Specific requirements – Part 3: Carrier sense multiple access with collision
detection (CSMA/CD) access method and physical layer specifications
IEEE 802.1D — Information technology – Telecommunications and information exchange between systems –
Local and metropolitan area networks – Common Specification – Media Access Control (MAC) Bridges
IEEE 802.1Q — Information technology – Telecommunications and information exchange between systems –
Local and metropolitan area networks – Common Specification – Virtual Bridged Local Area Networks
10.2 Internet Engineering Task Force Standards
7
RFC 768 — UDP: User Datagram Protocol; IETF, available at <http://www.ietf.org>
RFC 791 — IP: Internet Protocol; IETF, available at <http://www.ietf.org>
RFC 1541 — DHCP: Dynamic Host Configuration Protocol; IETF, available at <http://www.ietf.org>
10.3 Other Documents
C706, CAE Specification DCE1.1: Remote Procedure Call (RPC); OSF available at <http://www.opengroup.org/
onlinepubs/9629399/toc.htm>
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the risk of infringement of such rights are entirely their own responsibility.
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7 Internet Engineering Task Force, c/o Corporation for National Research Initiatives 1895 Preston White Drive, Suite 100 Reston, VA 20191-
5434, USA. Telephone: 1.703.620.8990, Fax 1.703.620.9071, Website: www.ietf.org
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consent of SEMI.
SEMI E54.15-0305 © SEMI 2005 1
SEMI E54.15-0305
SENSOR/ACTUATOR NETWORK COMMUNICATION SPECIFICATION
FOR SafetyBUS p
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on December 10, 2005. Initially available at www.semi.org
February 2005; to be published March 2005.
1 Purpose
1.1 This standard defines a communication specification based on the SafetyBUS p protocol to enable
communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI
specified device models (common and device specific) in a semiconductor manufacturing equipment.
1.2 Background and Motivation
1.2.1 SafetyBUS p is a device level network which provides a simple, inexpensive, fast, and deterministic means of
exchanging data among industrial devices (e.g., sensors and actuators) and higher level devices such as controllers
(e.g., programmable control systems) while at the same time providing for the communication of information at a
high priority level to support reliable operations. SafetyBUS p provides:
A solution to low-level device networking,
Access to intelligence present in low-level devices,
Networking between higher level controllers,
Master/Slave and Peer-to-Peer communication capabilities, and
Serial communication of device-critical information.
1.2.2 SafetyBUS p specifies a communication model and protocol. The Physical and Data Link Layer definitions
are defined by the Controller Area Network (CAN) technology. The CAN specification provides the Media Access
Control (MAC) methodology and physical signaling characteristics.
1.2.3 This document enables communications between intelligent devices on a SEMI compliant SAN by providing
a presentation mapping of common and specific device network visible structure and behavior to SafetyBUS p
network.
1.2.4 This Network Communication Standard specification for SafetyBUS p is not intended to be a safety guideline
for using SafetyBUS p technology. This document specifies a SAN communications standard specification based
on the Object Communication Specification (OCS) for the SafetyBUS p Protocol. This SAN is structured in
compliance with SEMI E54.1.
2 Scope
2.1 This document specifies the protocol and services that compliant intelligent devices shall support to exchange
information over the SafetyBUS p semiconductor equipment sensor/actuator network.
2.2 This document specifies the utilization of the SafetyBUS p protocol to present externally visible device
structure and behavior, specified in the Common Device Model (CDM) and appropriate Specific Device Models
(SDMs), on a SafetyBUS p network.
2.3 This document is used in conjunction with a SEMI standard SAN Common Device Model specification, one or
more SEMI standard Specific Device Model (SDM) specifications (e.g. for a mass flow device), the SafetyBUS p
Object Communications Specification Reference Guide. Together, they describe the SafetyBUS p protocol, the
externally visible data structures and behaviors of devices utilizing the SafetyBUS p networking capability in a
SEMI compliant SAN system.