semi合集-English.pdf - 第1841页
SEMI E42-0704 © SEMI 1995, 2004 110 15.9.1 Recipe Executor Com pliance Table — Table 15.16 provides a st atement of complia nce for the recipe executor . Table 15.16 RMS Compliance Statement RMS Compliance Statement Fund…
SEMI E42-0704 © SEMI 1995, 2004 109
15.9 Recipe Executor — Table 15.15 describes requirements for compliance for the recipe executor. The recipe
executor exhibits RMS compliance through its attributes, behavior, and services.
Table 15.15 Section References for Recipe Executor Capabilities
Capability Reference Fundamental
Fundamental compliance to execution recipe 15.x Y
OSS services for execution recipe attributes 11.1 Y
OSS services for recipe executor attributes 11.1 Y
Unique recipe identifier 6.6 Y
Protection of recipe execution area 6.5 Y
Change control 6.6, 11.2.10, 11.2.10.5 Y
Recipe download and vertify (RMEDnLdVer) 11.2.1, 14.3 Y
Recipe verify (RMEVerify) 11.2.2, 14.4 Y
Recipe rename (RMERename) 11.2.4, 14.6 Y
Get available storage (RMESpaceInquire) 11.2.5, 14.7 Y
Recipe delete (RMEDelete) 11.2.6, 14.8 Y
Recipe select (RMESelect) 11.2.7, 11.2.7.1, 11.2.7.6,
11.2.7.6.1, 14.9
Y
Recipe de-select 11.2.8, 14.10 Y
Recipe validation 11.2.7.2 Y
Variable parameters 11.2.7.4 Y
Recipe upload (RMEUpload) 11.2.3, 14.5 Y
Get recipe descriptor 11.2.9, 14.11 Y
Action completion notification 14.12 Y
Recipe delegation 11.2.7.3 N
Recipe creation 6.6.1, 11.2.10.2, 11.4 N
Recipe compression 6.6.2, 11.2.2.1, 11.2.10.3,
11.4
N
Recipe modification 6.6.3, 11.2.10.1, 11.4 N
Save last values 6.6.4, 11.2.10.4 N
SEMI E10 Productive state minimum approval (ProdApprove) 6.7, Table 6.2 N
SEMI E10 Productive state minimum certification (ProdCertify) 6.7, Table 6.2 N
Cycle units (RunCycleUnit) Table 6.2 N
Variable parameters (RecipeSelectParameters) Table 6.2 N
Change notification (RMEChange) 14.12 N
SEMI E42-0704 © SEMI 1995, 2004 110
15.9.1 Recipe Executor Compliance Table — Table 15.16 provides a statement of compliance for the recipe
executor.
Table 15.16 RMS Compliance Statement
RMS Compliance Statement
Fundamental RMS Requirements Implemented RMS Compliant
RMS Compliant Execution Recipe ❒ Yes ❒ No
Basic Requirements ❒ Yes ❒ No
OSS Services for Execution Recipe ❒ Yes ❒ No
OSS Services for Recipe Executor ❒ Yes ❒ No
Unique Recipe Identifier ❒ Yes ❒ No
Protection of Recipe Execution Area ❒ Yes ❒ No
Change Control ❒ Yes ❒ No
Recipe Download and Verify ❒ Yes ❒ No
❒ Yes
11
❒ No
Fundamental RMS Requirements Implemented RMS Compliant
Recipe Verify ❒ Yes ❒ No
Recipe Rename ❒ Yes ❒ No
Get Available Storage ❒ Yes ❒ No
Recipe Delete ❒ Yes ❒ No
Recipe Select ❒ Yes ❒ No
Recipe De-Select ❒ Yes ❒ No
Recipe Validation ❒ Yes ❒ No
Variable Parameters ❒ Yes ❒ No
Recipe Upload ❒ Yes ❒ No
Get Recipe Descriptors ❒ Yes ❒ No
Action Complete Notification ❒ Yes ❒ No
Additional Capabilities Implemented RMS Compliant
12
Recipe Delegation ❒ Yes ❒ No ❒ Yes ❒ No
Recipe Creation ❒ Yes ❒ No ❒ Yes ❒ No
Recipe Compression ❒ Yes ❒ No ❒ Yes ❒ No
Recipe Modification ❒ Yes ❒ No ❒ Yes ❒ No
Save Last Values ❒ Yes ❒ No ❒ Yes ❒ No
SEMI E10 Productive State Minimum Approval ❒ Yes ❒ No ❒ Yes ❒ No
SEMI E10 Productive State Minimum Certification ❒ Yes ❒ No ❒ Yes ❒ No
Cycle Units ❒ Yes ❒ No ❒ Yes ❒ No
Change Notification ❒ Yes ❒ No ❒ Yes ❒ No
11
Do not mark YES unless all fundamental RMS requirements are implemented.
12
Additional capabilities may not be marked RMS compliant unless all fundamental RMS requirements are implemented.
SEMI E42-0704 © SEMI 1995, 2004 111
16 Glossary of Terms
The list of terms in this section is intended only as a
guide. Formal definitions are provided in the main body
of the document.
agent — A type of resource system in a factory that
includes both hardware and software components, at
least some of which are also resources.
Examples of agents include recipe namespace servers,
cells, stations, clusters, attached cluster modules,
equipment, and smart equipment subsystems. Agents
are associated with a physical system or a collection of
physical systems, including computer platforms.
agent-specific attribute — A recipe attribute that
applies only to a specific agent.
agent-specific parameter — A variable parameter that
has been “tuned” for a specific agent by modifying its
original initial value and/or restrictions and placing the
result in the agent-specific attribute AgentSpecific
LinkParam.
agent-specific recipe — A recipe stored in the default
namespace of a specific agent.
agent-specific dataset — The recipe component
containing the set of agent-specific attributes that have
been set for that recipe for a specific agent.
approve — The operation that sets a recipe's
ApprovalLevel
attribute to a non-zero value.
approved — A recipe is approved whenever its
ApprovalLevel
attribute is non-zero.
approval level — (1) Used to reflect different degrees
of recipe development and qualification; (2) The value
of the attribute ApprovalLevel
.
attribute — Information concerning an object that may
be used either for internal or external purposes.
attribute length — The length of an individual attribute,
calculated as the sum of the lengths of the attribute
name and the attribute value, exclusive of formatting
information.
attribute length attribute — An attribute that contains
the sum of the lengths of the attributes. A managed
recipe, agent-specific dataset, and execution recipe
each have their own attribute length attribute.
attribute timestamp attribute — The timestamp of the
last change to any of a recipe's attributes.
authorized user — A user who is able to identify him or
herself to the host or equipment as having the level of
authority required for a particular activity, such as
certifying a recipe for that equipment.
body — See recipe body.
centralized namespace — A recipe namespace that is
not distributed.
certification-level — The value of the attribute
Certified
.
certified — (1) Factory-level approval that a recipe
produces the expected results on a particular instance of
equipment; (2) A recipe for which the Certified
attribute is defined and given a non-zero value for a
specific agent.
certify — The operation of changing the certification-
level of a recipe for an installation of equipment.
class — See recipe class.
clear — An attribute is cleared (reset) by setting its
value to its default value.
component agent — A subordinate agent that provides
services to a supervisory agent.
copy — Originate a recipe by the internal operation of
duplicating a recipe and assigning a new identifier.
create — The operation of entering a recipe body into a
namespace and assigning it a new (unused) identifier.
de-certify — The operation of clearing the certification
level (Certified
attribute) for a specific agent.
dedicated namespace — A recipe namespace with
exactly one member.
default namespace — A dedicated, centralized
namespace that is used by standalone equipment and/or
for hardware-specific (agent-specific) recipes.
default value — A pre-defined value. All non-
mandatory recipe attributes are assigned a default value
as part of their definition. An attribute set to its default
value may be omitted when a recipe is transferred.
delegate — An agent's supervisor delegates a recipe
that is executed by its component agent. The delegating
agent is responsible for ensuring that the component has
access to a current copy of the recipe and that the recipe
is selected, started, and deselected at the proper time.
delete — A recipe is deleted by removing its identifier,
preventing further access, and freeing its storage.
derived object form — An object form of a recipe that
is based upon a recipe in source form and that
represents a more efficient format for execution
purposes. Typically, but not by definition, this is a
“tokenized” form and requires less storage.
descriptor — (1) The length and timestamp attributes of
a recipe's attributes or of one of its components; (2) The
set of all of the individual descriptors of a recipe.