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SEMI S2-0703a E © SEMI 1991, 2004 47 APPENDIX 6 FIRE PROTECTION: FLOWCHART FOR SELECTING MATERIALS OF CONSTRUCTION NOTICE : The material in this appendix is an official part of SEMI S2 and was approved by full letter bal…

SEMI S2-0703a

Optical Energy Physical Quantity

Measured

(units)

Access Limit Testing Methods

Visible Light

400 nm to

700 nm

(e.g., heating

lamps)

Irradiance

µW/cm

(See NOTES 1, 2,

and 3.)

Radiance

W/m

- sr

Wavelength dependent

20% of the applicable

exposure limits.

(See Reference 1.)

Thermocouple, thermopile, pyroelectric, photoelectric

Direct measurement locating the maximum irradiance and

orientation of the light energy at the closest approach to

view port(s) or accessible leakage point(s).

Ultraviolet

Energy

315 nm to

400 nm

(e.g., plasma,

stepper)

Irradiance

mW/cm

(See NOTES 1

and 2.)

0.2 mW/cm

Photoelectric detectors with filters and or controlled

phosphors

Direct measurements locating the maximum irradiance

and orientation of the energy at the closest approach to

the view port(s) or accessible leakage point(s).

Ultraviolet

Light

180 nm to

315 nm

(e.g., plasma,

stepper)

Effective

Irradiance

µW/cm

(See NOTE 4.)

0.02 W/ cm

Photoelectric detectors with filters and/or controlled

phosphors (See NOTE 5.)

Direct measurements locating the maximum irradiance

and orientation of the energy at the closest approach to

the view port(s) or accessible leakage point(s).

NOTE 1: “Irradiance” is essentially the same as “power density.”

NOTE 2: Lamp manufacturer data can sometimes be used to estimate and evaluate exposures using a spreadsheet.

NOTE 3: These guidelines cover visible, IR-A, and IR-B, and are frequency dependent. Separate evaluations may be needed for thermal or

photochemical retinal hazards and infrared eye hazards.

NOTE 4: “Effective irradiance” is irradiance adjusted to account for the wavelength-dependent biological hazard. Permissible exposure time =

0.003 J/cm2 divided by the effective irradiance.

NOTE 5: Instrumentation is commercially available that accounts for the wavelength dependence of the standard and gives results in effective

irradiance.

A5-5 References

1. 1996 TLVs and BEIs Threshold Limit Values for Chemical Substances and Physical Agents Biological

Exposure Indices, ACGIH, Cincinnati, OH

2. ANSI/IEEE Standard for Safety Levels with Respect to Human Exposure to Radio Frequency Electromagnetic

Fields, 3 kHz to 300 GHz, C95.1-1991, Piscataway, New Jersey

3. Guidelines on Limits of Exposure to Broad-Band Incoherent Optical Radiation (0.38 to 3 M), Health Physics

Vol. 73, No. 3 (September), pp.539-554, 1997

4. ICNIRP 1994 “Guidelines on Limits of Exposure to Static Magnetic Fields,” Health Physics Vol 66 (1)

(January), pp. 100-106, 1994

5. Interim Guidelines on the Limits of Exposure to 50/60 Hz Electric and Magnetic Fields, IRPA/ICNIRP

Guidelines, Health Physics Vol. 58, No. 1 (January), pp. 113-122, 1990

SEMI S2-0703a

APPENDIX 6

FIRE PROTECTION: FLOWCHART FOR SELECTING MATERIALS OF

CONSTRUCTION

NOTICE: The material in this appendix is an official part of SEMI S2 and was approved by full letter ballot

procedures on December 15, 1999 by the North American Regional Standards Committee.

Construct of

materials which do

not propagate flame

Can the system

reasonably be constructed

of materials which do not

propagate flame

Start

Construct from

non-combustible

materials

Can the system

reasonably be constructed

of non-combustible

materials?

Is there a significant fire

risk, based on process

chemicals?

End

Does a qualified

party (see Section 14.2.1)

accept the risk assessment and

engineering controls?

Yes

Design engineering controls to mitigate

the fire risks based on materials of

construction and process chemicals.

This may include fire detection and

suppression systems.

Yes

Assess the fire risks based on the

materials of construction and process

chemicals.

Assess the fire risks based

on the process chemicals.

*beyond the ignition zone with or

without the continued application of

the ignition source

SEMI S2-0703a

NOTICE: Paragraphs entitled “NOTE” are not an

official part of this safety guideline and are not intended

to modify or supersede the official safety guideline.

These have been supplied by the committee to enhance

the usage of the safety guideline.

SEMI makes no warranties or representations as to the

suitability of the guideline set forth herein for any

particular application. The determination of the

suitability of the guideline is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. This guideline is subject to change

without notice.

The user’s attention is called to the possibility that

compliance with this guideline may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this guideline, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this guideline. Users of this guideline

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

NOTICE: A new Appendix will be added (in

numerical order) upon July 1, 2006 publication as

shown in Delayed Revisions Section 1. The EH&S

Committee has voted that addition of this Appendix

section is OPTIONAL before the Effective Date.