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SEMI D29-1101 © SEMI 2001 2 6.2 Measurement Devices 6.2.1 3-dimensional Profile Measurem ent Device — Use a Stylus ty pe s urface roug hness measurement device, AFM or l aser mi croscope. 6.2.2 Co lor Illumina tor — See …
SEMI D29-1101 © SEMI 20011
SEMI D29-1101
TEST METHOD FOR HEAT RESISTANCE IN FLAT PANEL DISPLAY
(FPD) COLOR FILTERS
This test method was technically approved by the Global Flat Panel Display Materials and Components
Committee and is the direct responsibility of the Japanese Flat Panel Display Materials and Components
Committee. Current edition approved by the Japanese Regional Standards Committee on August 3, 2001.
Initially available at www.semi.org September 2001; to be published November 2001.
1 Purpose
1.1 The purpose of this document is to standardize the
method for measurement of heat resistance in color
filters used for flat panel displays (FPD).
2 Scope
2.1 This method is to be used by suppliers and users of
FPD color filters to measure quality in products as well
as items under development.
2.2 This method is used in general FPD production to
test the resistance of color filters to heat.
2.3 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determines
the applicability of regulatory limitations prior to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI D19 — Test Method for the Determination of
Chemical Resistance of Flat Panel Display Color Filter
SEMI D22 — Test Method for the Determination of
Color, Transmittance of Flat Panel Display Color Filter
Assemblies
3.2 ISO Standards
1
ISO 7724
2
,
3
— Paints and varnishes -- Colorimetry
NOTE 1: Unless otherwise indicated, all documents cited
shall be the latest published versions.
1 International Organization for Standards(ISO), 1, rue de Varembe,
Case, postale 56 CH-1211 Geneva 20, Switzerland. Tel: +41-22-749-
01-11, E-mail: central@iso.ch, http://www.iso.ch
2 Available in Japanese as JIS Z8730 — Method for Specification of
Color Differences for Opaque Material. Japanese Standards
Association, 1-24, Akasaka 4 Chome, Minato-ku, Tokyo, 107-8440
Japan. Tel: +81-3-3583-8000, E-mail:
webmaster@jsa.or.jp,
http://www.jsa.or.jp
3 The expression method of its color differences is equal to the
method defined in Publication of CIE No. 87 (1990) Parametric
Effects in Color – Difference Evaluation. Commission Internationale
de l’Eclairage, Kegelgasse 27, A-1030 Vienna, Austria. Tel: +43-1-
714-31-87-0
4 Terminology
4.1 atomic force microscope (AFM) — a device which
precisely measures surface shape by gauging the
reciprocal active force between atoms through use of a
probe.
4.2 clean oven — a device that heats a specimen
through circulation of heated air through an air filter.
4.3 confocal scanning laser microscope — a
microscope which is able to create an image of just the
focal point by concentrating light on a specimen using a
confocal laser. This device can also measure surface
shape by recording height information, which matches
the focal point of each scans line image.
5 Summary of Method
5.1 Measure spectral transmittance, chromaticity, and
surface shape of specimen.
5.2 Place specimen in heating device and leave at
specified temperature for specified length of time.
5.3 Remove specimen from heating device and cool
them.
5.4 Observe visually and by microscope to see if any
exterior changes have occurred in the specimen.
5.5 Measure spectral transmittance, chromaticity, and
surface shape of specimen.
6 Apparatus
6.1 Heating Device and Holders
6.1.1 Heating Device — Use a clean oven. The
heating device being used must have the accuracy of
temperature verified. Also, the device should have
enough capacity to be able to heat the specimen evenly
to the target temperature promptly. For example, there
are devices where it is necessary to place a metal block
inside to increase the heating capacity to the specimen.
6.1.2 Holder — First the holder should be raised to the
specified temperature and then the specimen should be
set in the holder.
SEMI D29-1101 © SEMI 2001 2
6.2 Measurement Devices
6.2.1 3-dimensional Profile Measurement Device —
Use a Stylus type surface roughness measurement
device, AFM or laser microscope.
6.2.2 Color Illuminator — See SEMI D19.
6.2.3 Floodlight — See SEMI D19.
6.2.4 Microscope — See SEMI D19.
6.2.5 Spectrophotometer — Use a device in
conformance with SEMI D22.
7 Test Conditions
7.1 As long as the test condition should be written in
the test result, any combination of temperature and
heating time can be acceptable in the conditions. The
test conditions used should reflect actual conditions in
the manufacturing process of flat panel displays. Table
1 contains a reference for test temperature, maintain
time and atmosphere.
Table 1 Test Conditions
Item Device Condition Test Temperature Maintain time
1 Room Air
180°C (± 2°C)
200°C (± 2°C)
230°C (± 2°C)
1 hour (± 5%)
2 Nitrogen Gas
180°C (± 2°C)
200°C (± 2°C)
230°C (± 2°C)
1 hour (± 5%)
8 Test Specimen
8.1 Use FPD color filters for specimens. In the test
report, note the existence or non-existence of
Transparent Conductive Film (ITO etc.).
9 Procedure
9.1 Adjust the temperature on the heating device and
make sure of the furnace temperature.
9.2 Measure the spectral transmittance, chromaticity.
Observe the surface of each color layer of the specimen.
(The measurement method is described in Sections 9.6
and 9.7.)
9.3 Mount the specimen in the heating device.
9.4 After the temperature returns to the specified
temperature, keep the specimen for the prescribed
length of time.
9.5 Remove the specimen from the heating device and
cool them to room temperature.
9.6 Inspect change of the outlook and the profile of the
specimen according to the following procedures.
9.6.1 Observe the existence of peculiar changes in
exterior appearance before and after each test (e.g.
wrinkles, cracks, color “mura” etc.). It is possible for
the users of this standard to use various appropriate
methods of observation.
9.6.2 Visual observation by color illuminator from
backside.
9.6.2.1 Visual observation by a floodlight from front
side.
9.6.2.2 Microscope observation with transmitted
illumination.
9.6.2.3 Microscope observation with reflected
illumination.
9.6.2.4 Surface roughness measurement using a stylus-
type surface roughness measurement device, AFM or
laser microscope.
9.7 Measure the color changes according to the
following procedures.
9.7.1 Measure the spectral transmittance and
chromaticity of each color layer after heating using the
method described in SEMI D22. (Measurements must
be taken at the same location as before heating.)
9.7.2 Before and after the test, calculate the color
difference
∆Ε
*ab
or
∆Ε
*uv,
in each color layer,
according to ISO 7724, from the chromaticity of each
color layer.
10 Reporting Results
10.1 Report the following items:
10.1.1 report date,
10.1.2 test date,
10.1.3 heating device type and conditions of use,
10.1.4 condition of specimen (with/without
Transparent Conductive Film (ITO etc.), size, etc.),
10.1.5 conditions of test (temperature, length of time),
10.1.6 existence of change in outward appearance,
10.1.7 chromaticity, spectral transmittance of each
color layer before and after thermal treatment (number
of measuring points, position),
10.1.8 color difference of each color layer before and
after thermal treatment, and
10.1.9 change in spectral transmittance at specified
wavelength (e.g. back-light peak wavelength, etc.).
SEMI D29-1101 © SEMI 20013
11 Related Documents
11.1 SEMI Standards
SEMI D13 — Terminology for FPD Color Filter
Assemblies
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