semi合集-English.pdf - 第1192页

SEMI E5-1104 © SEMI 1982, 2004 134 Stream,Function Name (Mnemonic) Direction S7,F10 M/P M Data (MMD) M,H<->E Description In the response to S7,F9, the e quipment will trans mit the current matrix it contains. The m…

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SEMI E5-1104 © SEMI 1982, 2004 133
Stream,Function Name (Mnemonic) Direction
S7,F8 Process Program ID Data (PID) S,H->E
Description
This message is used to transmit a single matrix entry in response to S7,F7.
Structure
L,2
1. <PPID>
2. <MID>
Exception
A zero-length list returned means no such MID or other error.
Stream,Function Name (Mnemonic) Direction
S7,F9 M/P M Request (MMR) S,H<->E,reply
Description
This message is used to request the transmission of the material/process matrix. If the message is from the host, the response
will be the current matrix in the equipment. If the message is from the equipment, the response will be a new matrix to initialize
the equipment.
Structure
Header only
Exception
None
NOTE 8: M/PM defines the Material/Process Matrix. The Material/Process Matrix is a table which links the material to the
process program to be used in processing the material.
SEMI E5-1104 © SEMI 1982, 2004 134
Stream,Function Name (Mnemonic) Direction
S7,F10 M/P M Data (MMD) M,H<->E
Description
In the response to S7,F9, the equipment will transmit the current matrix it contains. The matrix will be the sum of all matrix
updates transmitted since initialization less the completed material whose linkages have been deleted. Programs with no pending
material will be deleted from the matrix but not from the equipment program directory.
Structure
L,n number of process programs
1. L,2
1. <PPID
1
>
2. L,a (number of MID for this PPID)
1. <MID
1
>
.
.
a. <MID
a
>
2. L,2
.
.
n. L,2
1. <PPID
n
>
2. L,b
1. <MID
1
>
.
.
b. <MID
b
>
Function 10 Example 2 process programs (1 and 3 MID, respectively)
L,2
L,2
1. <PPID
1
>
2. L,1
1. <MID
a
>
L,2
1. <PPID
2
>
2. L,3
1. <MID
b
>
2. <MID
c
>
3. <MID
d
>
Exception
a = 0 indicates that this PPID will be used for all material processed. The last default transmitted will be the one used; all other
entries will be deleted from the active matrix. A zero-length list returned means no such matrix.
SEMI E5-1104 © SEMI 1982, 2004 135
Stream,Function Name (Mnemonic) Direction
S7,F11 M/P M Update Send (UMS) S,H->E,[reply]
Description
This message is used by the host to add to the M/PM in the equipment.
Structure
L,n (number of process programs)
1. L,2
1. <PPID
1
>
2. L,a (number of MID's using PPID1)
1. <MID
1
>
.
.
a. <MID
a
>
2. L,2
.
.
n. L,2
1. <PPID
n
>
2. L,b
1. <MID
1
>
.
.
b. <MID
b
>
Exception
If a = 0, then the preceding PPID is to be used for all material processed. All other entries will be deleted from the active matrix.
Stream,Function Name (Mnemonic) Direction
S7,F12 M/P M Update Acknowledge (UMA) S,H<-E
Description
Acknowledge or error
Structure
<ACKC7>
Exception
None