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SEMI E88-1104 E © SEMI 1999, 2004 49 STEP COMMENTS HOST SC COMMENTS 12.  S6,F11 Event Report Send (ERS) CraneIdle 13. Event Report Acknowledge (ERA) S6,F12  14.  S6,F11 Event Report Send (ERS) CarrierWaitOut · Carrier…

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ID Error Error Description Input Port Action Intrabay Output Port Action*
Mismatch The carrier ID read results in an ID
that does not match any entries in
the SC database.
Example - Carrier 456 requested to
ID reader but CarrierIDRead result
is 123, but there is no SC database
entry for a carrier with CarrierID
123.
1. CarrierWaitOut event for 456.
2. CarrierIDRead 123 event sent.
3. TransferComplete for 456 with
mismatch error.
4. SC automatically deletes
carrier 456 from SC database
and send
CarrierRemoveCompleted
event.
5. SC automatically creates
carrier 123 at the port and
sends CarrierWaitOut event
6. Carrier continues to LP of this
output port. (CarrierWaitOut
for 123 at each position.)
7. IDReadError event sent when
carrier arrives at the LP of this
output port.
Note: Optionally step 3 may come
after step 4 or 5.
13.2.3.2 The following scenario represents a carrier ID failure at the stocker input port with option 1 implemented.
STEP COMMENTS HOST SC COMMENTS
1. The SC assigns an unknown
CarrierID based on the
failure. An exam
p
le of such an
unknown CarrierID would be
“UNKNOWNSTK001”
Note: IDReadStatus = 1 means
that a Carrier ID Read failure
occurred.
S6,F11
Event Report Send (ERS)
CarrierIDRead
· CarrierID =
“UNKNOWNSTK001”
· PortID
· IDReadStatus = 1
2. Event Report Acknowledge (ERA)
S6,F12
3.
S6,F11
Event Report Send (ERS)
CarrierWaitIn
· CarrierID =
“UNKNOWNSTK001”
· CarrierLoc = SOURCE
· CarrierZoneName
4.
Event Report Acknowledge (ERA)
S6,F12
5.
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
6. Event Report Acknowledge (ERA)
S6,F12
7. No TRANSFER command issued by
Host since recovery is
automatic.
8.
S6,F11
Event Report Send (ERS)
CarrierTransferring
· CarrierID =
“UNKNOWNSTK001”
· CarrierLoc
· CarrierZoneName
9. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
10.
S6,F11
Event Report Send (ERS)
CraneActive
11. Event Report Acknowledge (ERA)
S6,F12
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© SEMI 1999, 2004 49
STEP COMMENTS HOST SC COMMENTS
12.
S6,F11
Event Report Send (ERS)
CraneIdle
13. Event Report Acknowledge (ERA)
S6,F12
14.
S6,F11
Event Report Send (ERS)
CarrierWaitOut
· CarrierID =
“UNKNOWNSTK001”
· CarrierLoc = “LP1”
· PortType = “LP”
· CarrierZoneName
15. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
16.
S6,F11
Event Report Send (ERS)
IDReadError
· CarrierID =
“UNKNOWNSTK001”
· CarrierLoc
· IDReadStatus = 1
17. Event Report Acknowledge (ERA)
S6,F12
18. Carrier leaves the domain of
the stocker as it is acquired
by a person(PGV)
S6,F11
Event Report Send (ERS)
CarrierRemoved
· CarrierID
· HandoffType = MANUAL
19. Event Report Acknowledge (ERA)
S6,F12
20.
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
21. Event Report Acknowledge (ERA)
S6,F12
13.2.4 Host Initiated CANCEL of a TRANSFER Command
13.2.4.1 The Host wishes to cancel a previously issued transfer command. The assumption is that the carrier is
currently sitting on a stocker shelf and has not been picked up by the stocker crane.
STEP COMMENTS HOST SC COMMENTS
1. Assumption is that a TRANSFER
command(CommandID = 111111) is
in the QUEUED state.
2. Host Command Send (HCS)
CANCEL
· CARRIERID = “111111”
S2,F41
3.
S2,F42
Host Command Acknowledge (HCA)
4.
S6,F11
Event Report Send (ERS)
TransferCancelInitiated
· CommandID = “111111”
· CarrierID = “123456”
· CarrierLoc = “STORAGE”
· CarrierZoneName
5. Event Report Acknowledge (ERA)
S6,F12
6.
S6,F11
Event Report Send (ERS)
TransferCancelCompleted
· CommandID = “111111”
· CarrierID = “123456”
· CarrierLoc = “STORAGE”
· CarrierZoneName
7. Event Report Acknowledge (ERA)
S6,F12
8. Event Report Acknowledge (ERA)
S6,F12
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13.2.5 Host Initiated ABORT of a TRANSFER Command
13.2.5.1 The Host wishes to abort a previously issued transfer command. The assumption is that the carrier is
currently in the ALTERNATE substate of STORED.
STEP COMMENTS HOST SC COMMENTS
1. Assumption is that a TRANSFER
command (CommandID = 111111)
is in the ACTIVE state.
2. Host Command Send (HCS)
ABORT
· COMMANDID = “111111”
S2,F41
3.
S2,F42
Host Command Acknowledge (HCA)
4. The stocker must abort the
transfer command if the carrier
was in the ALTERNATE sub-state.
Other INSTALL stocker carrier
states may cause ABORT command
rejection. The latter scenario
is supplier specific.
5.
S6,F11
Event Report Send (ERS)
TransferAbortInitiated
· CommandID = “111111”
· CarrierID = “123456”
· CarrierLoc = “STOCKER
CRANE”
· CarrierZoneName
6.
Event Report Acknowledge (ERA)
S6,F12
7.
S6,F11
Event Report Send (ERS)
TransferAbortCompleted
· CommandID = “111111”
· CarrierID = “123456”
· CarrierLoc = “STOCKER
CRANE”
· CarrierZoneName
8. Event Report Acknowledge (ERA)
S6,F12
9. Event Report Acknowledge (ERA)
S6,F12
10. Two options may be available
for recovery:
1. Manual Recovery
2. Host Initiated Recovery
The host would have to issue a
TRANSFER command to dis
p
ose of
the carrier on the stocker
crane end-effector for the
crane to be utilized for
future transfers.
This is a Supplier Option
13.2.6 Connection or Reconnection between SC and Host
13.2.6.1 The Host System crashes (or loses communication with the SC for a time exceeding all time-outs and
retries) and must re-synchronize with the SC with the possibility of several events completing while the
communication link was lost.
STEP COMMENTS HOST SC COMMENTS
1. Communication session between
host and SC (re)established.
Host establishes communication
with the SC per the GEM
standard scenario (e.
g
., S1F13,
etc).