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SEMI G75.1-069 8 © SEMI 1998 1 SEMI G75.1-0698 TEST ME THOD FOR MEASUREME NT OF IONIC IM PURITIES I N LEADFRAME TAPE 1 Summary of Method 1.1 Ion ic impurities are extracted f r o m sample tape by water at 100°C or 121°C …

SEMI G75-0698 © SEMI 19983

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SEMI G75.1-0698 © SEMI 19981

SEMI G75.1-0698

TEST METHOD FOR MEASUREMENT OF IONIC IMPURITIES IN

LEADFRAME TAPE

1 Summary of Method

1.1 Ionic impurities are extracted from sample tape by

water at 100°C or 121°C and quantitatively analyzed by

ion chromatography and flame photometry or atomic

absorption spectrometry. The pH and electrical

conductivity of the extracted solutions are also

measured.

1.2 If sample tape needs the cure before the extraction,

vender should inform the customer of the necessity of

curing and report the impurity data after cure.

1.3 Ion chromatography is used to determine the

presence and concentration of the following ionic

species: Na

, NH4

, K

, NO

, Cl

, Br

, SO

, PO

1.4 Flame photometry or atomic absorption

spectrometry is used to determine the concentration of

and K

ions.

1.5 pH and conductivity measurements are also de-

scribed.

2 Referenced Documents

NOTE: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

2.1 SEMI Standards

SEMI G29 — Test Method for Trace Contaminants in

Molding Compounds

SEMI G59 — Test Method for Measurement of Ionic

Contamination on Leadframe Interleafing and the

Contamination Transferred from the Interleafing to the

Leadframes

2.2 ASTM Standards

ASTM D 1125 — Standard Test Methods for Electrical

Conductivity and Resistivity of Water

ASTM D 1193 — Standard Specification for Reagent

Water

ASTM D 4327 — Standard Test Method for Anions in

Water by Ion Chromatography

ASTM E 70 — Standard Test Method for pH of

Aqueous Solutions with the Glass Electrode

2.3 JIS Specifications

1 American Society for Testing Materials, 100 Barr Harbor Drive,

West Conshohoken, PA 19428-2959

JIS K 0121 — General Rules for Atomic Absorption

Spectrochemical Analyses

JIS Z 8802 — Method for Determination of pH of

Aqueous Solutions

3 Interferences

3.1 All the sample preparations and measurements

must be carried out in clean containers which have been

washed in deionized water in order to reduce any

spurious readings.

3.2 Electrodes and syringes must be similarly cleaned

before each test.

3.3 Contamination from the sampling process may

also affect the results.

4 Equipment

4.1 Ion Extraction Vessels-Parr bomb with Teflon

liner.

4.2 Ion chromatograph for anion and cation analysis

(see SEMI G59).

4.3 Flame photometer or atomic absorption

spectrometer.

4.4 Standard solution preparation vessels, balance and

volumetric dispensers (see SEMI G29 and SEMI G59).

4.5 pH meter.

4.6 Microconductivity cell and meter.

5 Reagents and Materials

5.1 Deionized water, conductivity of less than 1.0 µ

S/cm at 25°C per ASTM D 1193.

5.2 Eluents and regenerants for specific

chromatograph columns prepared per chromatograph

equipment manufacturer’s recommendations so that the

water peak can be separated from the ionic peaks.

5.3 Compounds for Standard Solutions

5.3.1 Cations — NaCl, NH

Cl, KCl

5.3.2 Anions — NaCl, Na2HPO

•12H2O, NaBr,

NaNO

, K

NOTE: All compounds to be reagent grade.

2 Japanese Standards Association, 1-24, Akasaka 4 Chome, Minato-

ku, Tokyo, Japan

SEMI G75.1-0698 © SEMI 1998 2

5.4 pH standard solutions.

6 Sampling

6.1 Personnel handling the tape must wear double-

layered cotton gloves and polyethylene outer gloves in

order to avoid additional sample contamination.

6.2 The sampling is one sample per one lot. The

vendor must report the definition of lot, if customer

requires it.

7 Preparation of Standard Solution and

Equipment Calibration

7.1 Preparation of Standard Solutions and

Chromatograph Calibration

7.1.1 Refer to SEMI G59, Section 9 and ASTM D

4327.

7.2 Preparation of Standard Solutions and Flame

Photometer or Atomic Absorption Spectrometer

Calibration

7.2.1 Refer to SEMI G29 and JIS K 0121.

7.3 Preparation of Standard Solutions and pH Meter

Calibration

7.3.1 Refer to ASTM E 70 or JIS Z 8802.

7.3.2 Using the standard pH solutions, calibrate the pH

meter according to the manufacturer's instructions.

7.4 Preparation of Standard Solutions and

Conductivity Cell Calibration

7.4.1 Refer to ASTM D 1125.

8 Measurement

8.1 Procedure for Impurity Extrac tion

8.1.1 Remove the protective film from the sample of

tape. Cure the tape per tape manufacturer's

recommendation, if necessary.

8.1.2 Cut the sample of tape so that it becomes smaller

than 2 cm × 2 cm.

8.1.3 Place 5.0 ± 0.1 grams of the tape sample into the

Parr bomb, and add 50 ± 0.5 grams of deionized water.

8.1.3.1 In a second bomb, add deionized water only so

that a blank solution may be obtained for measurement

of the ionic contributed by the bomb.

NOTE: It may be necessary to perform the blank test on both

bombs in order to leach out excessive extractable ionic

species.

8.1.4 Seal the caps and heat the bombs in an oven set

at 100°C ± 2°C, for 20 ± 0.25 hours.

NOTE: The oven temperature may be set at 121°C ± 2°C for

20 hours, if specified.

8.1.5 Allow the bombs to reach room temperature.

8.1.6 Open the bombs just before the measurements

are to be made. Measurements must be made within

eight (8) hours of the completion of the sample

preparation.

8.2 Quantitative Analysis by Ion Chromatography

8.2.1 Prepare the chromatograph for operation by

regenerating the columns according to the

manufacturer’s recommendations.

8.2.2 Run the eluent through the chromatograph until a

stable baseline calibration is established.

8.2.3 Inject the recommended sample size of test

solution into the chromatograph and record the ion

chromatogram.

8.2.4 Repeat for all the samples and also run the

background sample.

8.2.5 Determine the ionic type and concentration from

the calibration curves.

8.2.6 Results

8.2.6.1 The concentration of ionic species in the

leadframe tape is given by:

(B − C) × 50

where :

A is the ionic content of the leadframe

tape (ppm)

B is the ionic content on the extracted

solution, determined from the calibration

curves (ppm)

C is the ionic concentration of the back-

ground sample (ppm)

8.3 Quantitative Analysis by Flame Photometer or

Atomic Absorption Spectrometer

8.3.1 Set a specific operational condition for an

apparatus.

8.3.2 Introduce the recommended sample size of test

solution into a flame.

8.3.3 Repeat for all the samples and also introduce the

background sample.

8.3.4 Determine the concentration from calibration

curves.

8.3.5 Results