semi合集-English.pdf - 第5571页

SEMI P10-0705 © SEMI 1990, 2005 66 <xs:attribute name="p10End" type="xs:string" use="required" fixed="EndPlacement"/> </xs:complexType> <xs:complexType name="Pa…

SEMI P10-0705 © SEMI 1990, 2005 65

<xs:element name="PatternOptions"

type="PatternOptionsType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="Placement" type="PlacementType"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartPatternInstance"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndPatternInstance"/>

</xs:complexType>

<xs:complexType name="PlacementType">

<xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="Location" type="XYType"/>

<xs:sequence minOccurs="0">

<xs:element name="SteppingDistance"

type="XYType"/>

<xs:element name="SteppingCount"

type="XYType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="ArrayDiameter" type="xs:double"/>

<xs:element name="ArrayCenter" type="XYType"/>

<xs:sequence minOccurs="0">

<xs:element name="ArrayDiameterInclusive"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DataOffset" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="Dropout" type="XYType"/>

<xs:sequence minOccurs="0">

<xs:element name="ScribeTone"

type="xs:string"/>

<xs:element name="ScribeInsideCorners"

type="WindowType"/>

<xs:element name="ScribeOutsideCorners"

type="WindowType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="LocationSpec" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdMeasureDie" type="xs:string"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartPlacement"/>

SEMI P10-0705 © SEMI 1990, 2005 66

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndPlacement"/>

</xs:complexType>

<xs:complexType name="PatternOptionsType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PatternFunction" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DataFileSize" type="xs:integer"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DataChecksum" type="xs:integer"/>

<xs:element name="DataChecksumType"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PatternAddressSize"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="ScaleFactor" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DigitizedDataDark"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="StripeHeight" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="UnscaledPatternSize"

type="XYType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="MfgBiasPreapplied"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="LithoModeReqd" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="VirtualAddress" type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SurroundingTone" type="xs:string"/>

<xs:element name="SurroundingWidth"

type="xs:double"/>

<xs:element name="SurroundingHeight"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="MirrorPattern" type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="ShipPlot" type="ShipPlotType"/>

</xs:sequence>

SEMI P10-0705 © SEMI 1990, 2005 67

<xs:sequence minOccurs="0">

<xs:element name="PatternPlotApprReqd"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="Films" type="FilmsType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PhaseShift" type="PhaseShiftType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="Registration"

type="RegistrationType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CdGroup" type="CdGroupType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CdSet" type="CdSetType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CdXyDefinition"

type="CdXyDefinitionType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CdIsoDenseDefinition"

type="CdIsoDenseDefinitionType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PercentClear" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="InspectAllSites"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="DefectDefinition"

type="DefectDefinitionType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="ButtingError" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="AdditionalPatternInfo"

type="xs:string"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartPatternOptions"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndPatternOptions"/>

</xs:complexType>

<xs:complexType name="ShippableDataType">

<xs:sequence>

<xs:sequence minOccurs="0">