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SEMI E125.1-0305 © SEMI 2005 5 Namespaces in XML — W3C, 14 January 199 9 (http://www.w3.o rg/TR/1999/REC-x ml-names-19990114/) XML Schema Part 0: Primer — W3 C, 2 May 2001 (http://www.w3.org/TR/xmlschema-0/) XML Schema P…

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1 Purpose
1.1 SOAP Implementation Mapping
1.1.1 The purpose of this specification is to provide an implementation mapping of the SEMI E125 specification to
the SOAP 1.1 protocol. This document provides a description of the XML Schema data types used to support the
UML classes defined in SEMI E125, and also describes the WSDL port type and binding definitions used to support
the operations defined by the interfaces specified in SEMI E125.
2 Scope
2.1 Specification Scope
2.1.1 The scope of this specification is the representation of the EqSD model in an XML Schema and corresponding
WSDL port types and bindings. It will not add new domain information or concepts to the SEMI E125 model. The
only additions made are those needed to render useful WSDL or XML Schema.
2.1.2 This specification requires SEMI E132 authentication, and defines requirements for the application of SEMI
E132 concepts to the SEMI E125 specification.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 Provisional Specification
3.1.1 This specification is provisional pending the approval of the SEMI E138, SEMI E120.1 and SEMI E132.1.
This specification relies on XML Schema types defined by each of these specifications, and cannot be fully
implemented without these types. Finalization of these specifications is a condition for the removal of the
provisional status of this document.
3.1.2 This specification is provisional pending approval of the SEMI specification for Units for the Semiconductor
Industry. This specification relies on the unit of measure symbols defined in that specification. Finalization of this
specification is a condition for the removal of the provisional status of this document.
4 Referenced Standards
4.1 SEMI Standards
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E132.1 — Specification for SOAP Binding of Equipment Client Authentication and Authorization
SEMI E125 — Specification for Equipment Self Description (EqSD)
4.2 OMG Standards
1
Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67,
(http://www.omg.org/technology/documents/modeling_spec_catalog.htm)
4.3 W3C Standards
2
Extensible Markup Language (XML) 1.0 (Second Edition) — W3C, 6 October 2000
(http://www.w3.org/TR/2000/REC-xml-20001006/)
1 Object Management Group, Inc., 250 First Ave. Suite 100, Needham, MA 02494, USA, Telephone:1.781.444.0404, Fax: 1.781.444.0320,
website: www.omg.org.
2 World Wide Consortium, Massachusetts Institute of Technology (MIT) Computer Science and Artificial Intelligence Laboratory (CSAIL), 32
Vassar Street Room 32-G515, Cambridge, MA 02139, USA Telephone: 1.617.253.2613 Fax: 1.617.258.5999, website: www.w3c.org.
SEMI E125.1-0305 © SEMI 2005 5
Namespaces in XML — W3C, 14 January 1999 (http://www.w3.org/TR/1999/REC-xml-names-19990114/)
XML Schema Part 0: Primer — W3C, 2 May 2001 (http://www.w3.org/TR/xmlschema-0/)
XML Schema Part 1: Structures — W3C, 2 May 2001 (http://www.w3.org/TR/xmlschema-1/)
XML Schema Part 2: Datatypes — W3C, 2 May 2001 (http://www.w3.org/TR/xmlschema-2/)
XML Path Language (Xpath) — W3C, 16 November 1999 (http://www.w3.org/TR/xpath/)
Web Services Description Language (WSDL) 1.1 — W3C Note, (http://www.w3.org/TR/wsdl)
Simple Object Access Protocol (SOAP) 1.1 — W3C Note, (http://www.w3.org/TR/2000/NOTE-SOAP-20000508/)
4.4 Other Standards
Secure Sockets Layer (SSL) Protocol 3.0 (available from http://wp.netscape.com/eng/ssl3/draft302.txt)
Web Services Interoperability (WS-I): Basic Profile Version 1.0a (available from http://www.ws-
i.org/Profiles/Basic/2003-08/BasicProfile-1.0a.html)
SEMI Specification for XML Semiconductor Common Components
SEMI Specification for the Representation of Measurement Units in XML
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 SOAP — Simple Object Access Protocol
5.1.2 UML — Unified Modeling Language
5.1.3 W3C — World Wide Web Consortium
5.1.4 WSDL — Web Service Description Language
5.1.5 XML — eXtensible Markup Language
5.2 Definitions
5.2.1 UML (Unified Modeling Language) — a notation for representing object-oriented designs and views created
by Booch, Rumbaugh, and Jacobson in order to merge their three popular notations plus aspects of other existing
notations into a single object-oriented notation intended to be usable by all.
5.2.2 XML (eXtensible Markup Language) — a markup language used for representing data rich with context and
content in documents and in communications. XML is an extension of SGML, a document-oriented markup
language. It was created by W3C for use on the Internet.
6 Conventions
6.1 Translating UML to XML Schema
6.1.1 The reader is expected to have a working knowledge of the UML, XML, WSDL, SOAP, and Schema
specifications (see ¶¶4.2 and 4.3). This document does not provide tutorial information on these subjects.
6.1.2 This document follows the guidelines for XML as outlined in SEMI E121.
6.1.3 Some of the key guidelines followed in this document are summarized here:
Attributes of UML classes from SEMI E125 are generally represented as XML attributes, to improve efficiency
in transferring metadata descriptions from the equipment. Exceptions to this convention are UML attributes
that correspond to data structures or other constructs that cannot be represented as XML attributes, or may
include text values that may need to include non-parsed character data (CDATA).
Composition associations are mapped to a single XML element (or multiple such elements if the specified
multiplicity is greater than 1).
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Aggregations are mapped to contained elements or arrays of references to one or more unique attributes of the
target type.
Inheritance is modeled using complexType extension. In cases where a reference to an abstract base class
occurs in the UML model, a choice compositor for each of the possible derived types is used in order to restrict
instance documents from including arbitrary extension through type substitution.
6.1.4 The translation of a UML class to XML Schema types is documented using a table format illustrated by
Table 1. Operations defined for a UML class are translated into WSDL operations.
6.1.5 Translation Table Column Header Description
Attribute or Role Name — If an attribute, the name of the attribute is placed here. If an association (including
aggregation or composition), the role name from the UML diagram is placed here. Compositions are often not
assigned role names. In that case “none” is placed here.
UML Name/Type — If an attribute, the data type of the UML attribute is placed here. If an association, the type
of association is placed here. The possible association types are “Composition”, “Aggregation”, or the basic
“Association”. UML defines these three types of association.
XML Element or Attribute — Lists the type of XML construct used to represent the UML attribute or
association.
XML Name/Type — Provides the name and data type of the resulting XML construct. The type may be a built-
in type (for example, xsd:string), or a named type defined within the XML Schema.
Table 1 Example Translation Table
Attribute or Role Name UML Name/Type XML Element or Attribute XML Name/Type
friend association element Friend: HumanReferenceArray
employees aggregation element Employees: HumanArray
family composition element Family: HumanArray
name string element Name: xsd:string
6.1.6 Translating Operations to XML Schema
6.1.6.1 The translation of an operation defined for UML interface classes to XML Schema types is documented
using a table format illustrated in Table 2. One row is provided for each possible input/output argument for the
operation being described.
Table 2 Example Translation Table for Operation Input/Output Arguments
Argument Name Format XML Element or Attribute XML Name/Type
<argument name from
abstract specification>
<argument format from
abstract specification>
<whether the argument is modeled as
an Element or Attribute>
<namespace-qualified name of the
attribute/element>
6.2 Documenting XML Schema and WSDL Files
6.2.1 Associated with this document are XML Schema and WSDL files that are core components of the
specification. Each such document is described using a table format illustrated by Table 3.
Table 3 Example Schema/WSDL Document Description Table
File Name <.xsd or .wsdl file name>
Target Namespace <target namespace defined in the schema or WSDL file>
Imported/Referenced
Namespaces
<namespaces imported or used by the schema or WSDL file>
Description <brief description of the purpose/function of the schema or WSDL file>