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SEMI D32-0303 © SEMI 2003 1 SEMI D32-0303 SPECIFICATION FOR IMPROVED INFORMATION MANAGEMENT FOR GLASS FPD SUBSTRATES THRO UGH ORIENTATION CORNER UNIFICATION This specification was technically approved b y the Global FPD …

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SEMI D31-1102 © SEMI 2002 5
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SEMI D32-0303 © SEMI 2003 1
SEMI D32-0303
SPECIFICATION FOR IMPROVED INFORMATION MANAGEMENT FOR
GLASS FPD SUBSTRATES THROUGH ORIENTATION CORNER
UNIFICATION
This specification was technically approved by the Global FPD Materials and Components Committee and is
the direct responsibility of the Japanese FPD Materials and Components Committee. Current edition
approved by the Japanese Regional Standards Committee on January 10, 2003. Initially available at
www.semi.org January 2003; to be published March 2003.
1 Purpose
1.1 This specification provides the location,
dimensions, and message size of the marking symbol
that consists of a two-dimensional code symbol and
related alpha numeric characters (capable of being read
visually through the reader camera and display) and is
located outside of the quality area of glass flat panel
display (FPD) substrate.
1.2 The marking symbol in this specification allows the
inclusion of identification information for each
individual substrate together with the additional
information previously provided by various orientation
corner (OC) cut shapes.
1.3 Thus, this specification allows suppliers of glass
substrates for FPDs to simplify substrate information
management by marking such information in one
location around the OC on the substrate, before
shipping. In addition, use of this marking symbol will
facilitate the future elimination of the numerous types
of OC cut shapes presently in use.
1.4 The marking symbol covered by this specification
is intended for use by suppliers and purchasers of glass
substrates for FPDs.
2 Scope
2.1 This specification provides for a standardized OC
location in support of future unification of the OC cut
shape as well as location. When this is done, the
provisional nature of the specification can be removed.
2.2 This specification covers the content, dimensions,
and surface positioning of the marking symbol located
outside of the quality area of glass substrates for FPD
use.
2.2.1 This marking symbol is marked in a manner and
location to avoid affecting the user patterning process.
2.2.2 Although this specification does not specify the
marking technique to be employed when complying
with its requirements, it is assumed that the marking
symbol will be obtained by laser marking individual
dots.
2.3 Marking symbols are applicable across all stages of
FPD processing, from virgin substrates to fully
patterned substrates. The format and algorithm for the
Data Matrix code is based on two-dimensional
symbology specified in ISO/IEC 16022.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 Since the symbol is marked in a region of the
substrate outside of the quality area, it is not available
for use after this area is cut off.
3.2 Since only a single symbol is marked on each
substrate, the marking symbol is not directly applicable
for management of individual panels in multi-panel
displays.
4 Referenced Standards
4.1 ISO/IEC Standard
1
ISO/IEC 16022 — International Symbology Specifica-
tion – Data Matrix
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 Terms relating to the Data Matrix code symbol
characteristics are defined in ISO/IEC 16022.
5.2 Definitions of terms relating to alphanumeric
characters are as follows:
5.2.1 character separation — the horizontal distance
between the adjacent boundaries of any two adjacent
characters.
1 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30
Website: http://www.iso.ch
SEMI D32-0303 © SEMI 2003 2
5.2.2 character separation, vertical — the vertical
distance between the adjacent boundaries of any two
adjacent characters.
5.2.3 character spacing — the horizontal distance
between the character centerlines of two adjacent
characters.
5.3 Definitions of terms relating to the marking area
are as follows:
5.3.1 mark area — a rectangular area containing the
mark field(s) and the surrounding quiet zone.
5.3.2 mark field — an area within which all mark dots
occur.
5.3.3 quiet zone — an unpatterned, unmarked area that
surrounds a mark field.
5.3.4 TIR — total indicator reading, the difference
between the maximum and minimum distances of a line
from a reference line.
6 Ordering Information
6.1 Content information of mark, as agreed to between
purchaser and supplier
6.2 Number of message characters (up to a maximum
of 20, see Section 7.7.1), as agreed to between
purchaser and supplier.
7 Requirements
7.1 Orientation Corner — The OC location shall be
the lower left corner of the substrate with the pattern
surface up and the long edge at the bottom. Since the
necessary information is encoded in the identification
marks, it is not necessary to distinguish the shapes of
the other corners of the substrate. OC cut shape is not
specified at this time, but it is expected that in the future
a single shape will be established for the next
generation of substrates.
7.2 Shape, Size, and Location of Marking Symbols
7.2.1 The location of the mark field relative to the
orientation corner and the adjacent edges of the sub-
strate shall be as shown in Figure 1. The reference
point of the two-dimensional code symbol, together
with a parallelism requirement, locates the entire mark
field.
7.2.2 The mark field dimensions and the symbols
within the mark field shall be as shown in Figure 2.
7.2.3 Overall mark area dimensions shall be as shown
in Figure 3.
7.2.4 The values of the dimensions shall be as defined
in Tables 1 and 2.
7.3 Data Matrix Code Symbol Dimensions
7.3.1 Each rectangular Data Matrix code symbol shall
be composed of an array of 18 rows and 18 columns, as
shown schematically in Figure 4.
7.3.2 Cell spacing shall be 80 µ m, center to center.
7.3.3 The Data Matrix code symbol shall be
constructed such that it can be read in accordance with
ISO/IEC 16022.
7.4 Alphanumeric Symbol Dimensions
7.4.1 Use of the modified SEMI OCR Character Set as
defined in Table 3 is recommended.
7.4.2 Characters shall be marked in a dot matrix
format, contained within a character window 0.72 mm
high × 0.40 mm high.
7.4.3 Character window separation shall be 0.24 mm
horizontally and 0.16 mm vertically.
7.5 Reference Point for all symbols shall be the center
point of the cell common to the primary border row and
primary border column of the Data Matrix code
symbol.
7.6 Mark Field Dimensions shall be in accordance with
the dimensions D and F given in Table 2. Parallelism
(T) of the top of the mark field within dimension L,
relative to the nearest edge, shall be ≤ 1.0 mm TIR.
7.7 Message Characters
7.7.1 Up to 20 alphanumeric characters in the character
set listed in Table 3 shall be encoded in the two-
dimensional code symbol, and alphanumeric characters
with the same content shall be placed symmetrically
around the two-dimensional code symbol as shown in
Figure 2. The message content is not defined, but it
does not include any check sum characters. It may
include information provided by the glass substrate
supplier, and the remainder of the message characters,
if any, can be used to insert information agreed on
between supplier and purchaser. If the message
contains less than 20 characters, a dash (–) may be
inserted for the unused characters, at the supplier’s
discretion.
7.7.2 The Data Matrix code symbol shall be encoded
with error checking and correcting characters in
accordance with ECC 200 in accordance with ISO/IEC
16022.
7.7.3 Alphanumeric characters shall:
7.7.3.1 Be positioned such that their lower part faces
toward the nearest edge of the glass substrate.
7.7.3.2 Contain message characters identical to those
encoded in the Data Matrix code field.