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SEMI S2-0703a E © SEMI 1991, 2004 3 EN 775 — Manipulating in dustrial robots--Safety EN 1050 — Safety of Machi nery--Risk Assessm ent EN 1127-1 — Expl osive atmospheres -- Explosi on prevention a nd protection -- Part 1:…

SEMI S2-0703a

Appendix 6 — Fire Protection: Flowchart for Selecting

Materials of Construction

NOTICE: A new Appendix will be added (in

numerical order) upon July 1, 2006 publication as

shown in Delayed Revisions Section 1. The EH&S

Committee has voted that addition of this Appendix

section is OPTIONAL before the Effective Date.

2.3 Precedence of Sectional Requirements — In the

case of conflict between provisions in different sections

of this guideline, the section or subsection specifically

addressing the technical issue takes precedence over the

more general section or subsection.

NOTICE: This safety guideline does not purport to

address all of the safety issues associated with its use.

It is the responsibility of the users of this safety

guideline to establish appropriate safety and health

practices and determine the applicability of regulatory

or other limitations prior to use.

3 Limitations

3.1 This guideline is intended for use by supplier and

user as a reference for EHS considerations. It is not

intended to be used to verify compliance with local

regulatory requirements.

3.2 It is not the philosophy of this guideline to provide

all of the detailed EHS design criteria that may be

applied to semiconductor manufacturing equipment.

This guideline provides industry-specific criteria, and

refers to some of the many international codes,

regulations, standards, and specifications that should be

considered when designing semiconductor

manufacturing equipment.

3.3 Existing models and subsystems should continue to

meet the provisions of SEMI S2-93A. Models with

redesigns that significantly affect the EHS aspects of

the equipment should conform to the latest version of

SEMI S2. This guideline is not intended to be applied

retroactively.

3.4 In many cases, references to standards have been

incorporated into this guideline. These references do

not imply applicability of the entire standards, but only

of the sections referenced.

4 Referenced Standards

NOTICE: New Referenced Standards will be added

(in alphabetical or numerical order as appropriate)

upon July 1, 2006 publication as shown in Delayed

Revisions Section 1. The EH&S Committee has

voted that implementation of the information is

OPTIONAL before the effective date.

4.1 SEMI Standards

SEMI E6 — Facilities Interface Specifications

Guideline and Format

SEMI F5 — Guide for Gaseous Effluent Handling

SEMI F14 — Guide for the Design of Gas Source

Equipment Enclosures

SEMI F15 — Test Method for Enclosures Using Sulfur

Hexafluoride Tracer Gas and Gas Chromatography

SEMI S1 — Safety Guideline for Equipment Safety

Labels

SEMI S3 — Safety Guideline for Heated Chemical

Baths

SEMI S6 — Safety Guideline for Ventilation

SEMI S7 — Safety Guidelines for Environmental,

Safety, and Health (ESH) Evaluation of Semiconductor

Manufacturing Equipment

SEMI S8 — Safety Guidelines for Ergonomics

Engineering of Semiconductor Manufacturing

Equipment

SEMI S9 — Safety Guideline for Electrical Design

Verification Tests for Semiconductor Manufacturing

Equipment

SEMI S10 — Safety Guideline for Risk Assessment

SEMI S12 — Guidelines for Equipment

Decontamination

SEMI S13 — Safety Guidelines for Operation and

Maintenance Manuals Used with Semiconductor

Manufacturing Equipment

SEMI S14 — Safety Guidelines for Fire Risk

Assessment and Mitigation for Semiconductor

Manufacturing Equipment

4.2 ANSI Standards

ANSI/IEEE C95.1 — Standard for Safety Levels with

Respect to Human Exposure to Radio Frequency

Electromagnetic Fields, 3 kHz to 300 GHz

ANSI/RIA R15.06 — Industrial Robots and Robot

Systems -- Safety Requirements

ANSI/ISA S84.01 — Application of Safety

Instrumented Systems for the Process Industry

4.3 CEN/CENELEC Standards

1 American National Standards Institute, New York Office: 11 West

42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900;

Fax: 212.398.0023 Website: www.ansi.org

2 European Committee for Standardization (CEN)/European

Committee for Electrotechnical Standardization (CENELEC), Central

Secretariat: rue de Stassart 35, B-1050 Brussels, Belgium

SEMI S2-0703a

EN 775 — Manipulating industrial robots--Safety

EN 1050 — Safety of Machinery--Risk Assessment

EN 1127-1 — Explosive atmospheres -- Explosion

prevention and protection -- Part 1: Basic concepts and

methodology

4.4 DIN Standards

DIN V VDE 0801 — Principle for Computers in

Safety-Related Systems

4.5 IEC Standards

IEC 61010-1 — Safety Requirements for Electrical

Equipment for Measurement, Control, and Laboratory

Equipment, Part 1: General Requirements

IEC 61508 — Functional Safety of

Electrical/Electronic/Programmable Electronic Safety-

Related Systems

4.6 ISO Standards

ISO 10218 — Manipulating industrial robots—Safety

ISO 13849-1 (EN 954-10) — Safety of Machinery -

Safety-Related Parts of Control Systems

4.7 NFPA

Standards

NFPA 12 — Standard on Carbon Dioxide

Extinguishing Systems

NFPA 13 — Standard for Installation of Sprinkler

Systems

NFPA 72 — National Fire Alarm Code

NFPA 497 — Recommended Practice for the

Classification of Flammable Liquids, Gases, or Vapors

and of Hazardous (Classified) Locations for Electrical

Installations in Chemical Process Areas

NFPA 704 — Identification of the Fire Hazards of

Materials

NFPA 2001 — Standard on Clean Agent Fire

Extinguishing Systems

4.8 Other Standards and Documents

ACGIH, Industrial Ventilation Manual

3 Available from Deutches Institut für Normung e.V., Beuth Verlag

GmbH, Burggrafenstrasse 4-10, D-10787 Berlin, Germany, website:

www.din.de

4 International Electrotechnical Commission, 3, rue de Varembé,

Case Postale 131, CH-1211 Geneva 20, Switzerland. Telephone:

41.22.919.02.11; Fax: 41.22.919.03.00 Website: www.iec.ch

5 International Organization for Standardization, ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30

Website: www.iso.ch

6 National Fire Protection Association, 1 Batterymarch Park, Quincy,

MA 02269, Website: www.nfpa.org

ASHRAE Standard 110 — Method of Testing

Performance of Laboratory Fume Hoods

Burton, D.J., Semiconductor Exhaust Ventilation

Guidebook

Uniform Building Code

™

(UBC)

Uniform Fire Code

™11

NOTICE: As listed or revised, all documents cited

shall be the latest publications of adopted standards.

5 Terminology

NOTICE: New Acronyms and Definitions will be

added in alphabetical order to the Terminology

Section upon July 1, 2006 publication as shown in

Delayed Revisions Sections 1 and 2. The EH&S

Committee has voted that implementation of the

information is OPTIONAL before the effective date.

5.1 Abbreviations and Acronyms

5.1.1 ACGIH

— American Conference of

Governmental Industrial Hygienists (ACGIH is a

registered trademark of the American Conference of

Governmental Industrial Hygienists.)

5.1.2 ASHRAE — American Society of Heating,

Refrigeration, and Air Conditioning Engineers

5.2 Definitions

5.2.1 abort switch — a switch that, when activated,

interrupts the activation sequence of a fire detection or

fire suppression system.

5.2.2 accredited testing laboratory — an independent

organization dedicated to the testing of components,

devices, or systems; competent to perform evaluations

based on established safety standards; and recognized

by a governmental or regulatory body.

5.2.3 baseline — for the purposes of this document,

“baseline” refers to operating conditions, including

process chemistry, for which the equipment was

designed and manufactured.

5.2.4 breathing zone — imaginary globe, of 600 mm

(two foot) radius, surrounding the head.

7 ACGIH, 1330 Kemper Meadow Road, Cincinnati, Ohio 45240,

USA, www.acgih.org

8 ASHRAE, 1791 Tullie Circle, NE, Atlanta, Georgia 30329, USA,

www.ashrae.org

9 IVE, Inc., 2974 South Oakwood, Bountiful, Utah 84010, USA,

www.eburton.com

10 International Conference of Building Officials, 5360 Workman

Mill Road, Whittier, California 90601-2298, USA, www.icbo.org

11 International Fire Code Institute, 5360 Workman Mill Road,

Whittier, California 90601-2298, USA, www.ifci.org

SEMI S2-0703a

5.2.5 capture velocity — the air velocity that at any

point in front of the exhausted hood or at the exhausted

hood opening is necessary to overcome opposing air

currents and to capture the contaminated air at that

point by causing it to flow into the exhausted hood.

5.2.6 carcinogen — confirmed or suspected human

cancer-causing agent as defined by the International

Agency for Research on Cancer (IARC) or other

recognized entities.

5.2.7 chemical distribution system — the collection of

subsystems and components used in a semiconductor

manufacturing facility to control and deliver process

chemicals from source to point of use for wafer

manufacturing processes.

5.2.8 cleanroom — a room in which the concentration

of airborne particles is controlled to specific limits.

5.2.9 coefficient of entry (C

) — the ratio of actual

airflow into the exhausted hood to the theoretical

airflow if all hood static pressure could be converted

into velocity, as would be the case if the hood entry loss

factor (K or F

) were zero. C

= (VP/SP

)

0.5

where VP

= duct velocity pressure and SP

= hood static pressure

(see also Appendix 2).

5.2.10 combustible material — for the purpose of this

guideline, a combustible material is any material that

does propagate flame (beyond the ignition zone with or

without the continued application of the ignition

source) and does not meet the definition in this section

for noncombustible material. (See also the definition for

noncombustible material.)

5.2.11 equipment — a specific piece of machinery,

apparatus, process module, or device used to execute an

operation. The term “equipment” does not apply to any

product (e.g., substrates, semiconductors) that may be

damaged as a result of equipment failure.

5.2.12 face velocity — velocity at the cross-sectional

entrance to the exhausted hood.

5.2.13 facilitization — the provision of facilities or

services.

5.2.14 fail-safe — designed so that a failure does not

result in an increased risk.

NOTE 1: For example, a fail-safe temperature limiting

device would indicate an out-of-control temperature if it were

to fail. This might interrupt a process, but would be preferable

to the device indicating that the temperature is within the

control limits, regardless of the actual temperature, in case of

a failure.

5.2.15 Fail-to-safe equipment control system (FECS)

— A safety-related programmable system of control

circuits designed and implemented for safety functions

in accordance with recognized standards such as ISO

13849-1 (EN 954-1) or IEC 61508, ANSI SP 84. These

systems [e.g. safety Programmable Logic Controller

(PLC), safety-related Input and Output (I/O) modules]

diagnose internal and external faults and react upon

detected faults in a controlled manner in order to bring

the equipment to a safe state.

NOTE 2: A FECS is a subsystem to a (PES) Programmable

Electronic System as defined in IEC61508 -4 Definitions

NOTE 3: Related Information 14 provides additional

information on applications of FECS design.

5.2.16 failure — the termination of the ability of an

item to perform a required function. Failure is an event,

as distinguished from “fault,” which is a state.

5.2.17 fault — the state of an item characterized by

inability to perform a required function, excluding the

inability during preventive maintenance or other

planned actions, or due to lack of external resources.

5.2.18 fault-tolerant — designed so that a reasonably

foreseeable single point failure does not result in an

unsafe condition.

5.2.19 flammable gas — any gas that forms an

ignitable mixture in air at 20 C (68 F) and 101.3 kPa

(14.7 psia).

5.2.20 flammable liquid — a liquid having a flash

point below 37.8 C (100 F).

5.2.21 flash point — the minimum temperature at

which a liquid gives off sufficient vapor to form an

ignitable mixture with air near the surface of the liquid,

or within the test vessel used.

5.2.22 gas cylinder cabinet — cabinet used for housing

gas cylinders, and connected to gas distribution piping

or to equipment using the gas. Synonym: gas cabinet.

5.2.23 gas panel — an arrangement of fluid handling

components (e.g., valves, filters, mass flow controllers)

that regulates the flow of fluids into the process.

Synonyms: gas jungle, jungle, gas control valves, valve

manifold.

5.2.24 gas panel enclosure — an enclosure designed to

contain leaks from gas panel(s) within itself.

Synonyms: jungle enclosure, gas box, valve manifold

box.

5.2.25 hazard — a condition that is a prerequisite to a

mishap.

5.2.26 hazardous production material (HPM) — a

solid, liquid, or gas that has a degree-of-hazard rating in

health, flammability, or reactivity of class 3 or 4 as

ranked by NFPA 704 and which is used directly in

research, laboratory, or production processes that have

as their end product materials that are not hazardous.