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SEMI E100-1104 © SEMI 2000, 2003 6 Figure 3 External Fron t View of 230 mm and 6 inch RSP         Figure 4 Section A-A: Internal Front View of 230 mm RSP    d63 = 35 + 0.9 / -0.1 Figure 5 Detail B: Top Robotic…

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SEMI E100-1104 © SEMI 2000, 2004 5
d63
= 35 + 0.9 / -0.1
Figure 1
External Top View of 230 mm and 6 inch RSP

Figure 2
Detail A: External Top View of Side Handling Flange Alignment Hole
SEMI E100-1104 © SEMI 2000, 2003 6
Figure 3
External Front View of 230 mm and 6 inch RSP
Figure 4
Section A-A: Internal Front View of 230 mm RSP
d63 =
35 + 0.9 / -0.1
Figure 5
Detail B: Top Robotic Handling Flange Hole Feature
SEMI E100-1104 © SEMI 2000, 2004 7
y129 75.5
Figure 6
Door Only Top View of 230 mm RSP
Figure 7
Section A-A: Internal Front View of 6 inch RSP